Research output per year
Research output per year
Search results
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2019
Method, apparatus and computer program for measuring and processing a spectrum of an xuv light source from soft x-rays to infrared wavelengths
Bayraktar, M. (Inventor), Bijkerk, F. (Inventor), Bastiaens, H. M. J. (Inventor) & Bruineman, C. (Inventor), 13 Jun 2019, European Patent Office, Patent No. 17817219.3 - 1020Research output: Patent
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2018
Method, apparatus and computer program for measuring and processing a spectrum of an XUV light source from soft x-rays to infrared wavelengths
Bijkerk, F. (Inventor), Bayraktar, M. (Inventor), Bastiaens, H. M. J. (Inventor) & Bruineman, C. (Inventor), 11 May 2018, IPC No. 164742.NL Dokter Octrooibureau, WO2018/084708 A1, Patent No. 2017729 IDF, Priority date 7 Nov 2016Research output: Patent
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2016
EUV-mirror, optical system with EUV-mirror and associated operating method
Dinger, U. (Inventor), Bijkerk, F. (Inventor), Bayraktar, M. (Inventor) & Dier, O. (Inventor), 29 Dec 2016, (Submitted) Patent No. US201615262272 20160912, Priority date 21 Mar 2012Research output: Patent