• 2693 Citations
  • 27 h-Index
19932018
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Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 5 Similar Profiles
Silicon Chemical Compounds
lithography Physics & Astronomy
Lithography Engineering & Materials Science
Etching Chemical Compounds
silicon nitrides Physics & Astronomy
Fabrication Chemical Compounds
Microchannels Engineering & Materials Science
fabrication Physics & Astronomy

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Research Output 1993 2018

1 Citations

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R. 15 Feb 2018 In : Journal of micromechanics and microengineering. 28, 4, 044003

Research output: Contribution to journalArticle

Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
1 Citations
Photolithography
Silicon
Ion beams
Masks
Etching
6 Citations

Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes

Vijselaar, W., Westerik, P., Veerbeek, J., Tiggelaar, R. M., Berenschot, E., Tas, N. R., Gardeniers, H. & Huskens, J. Mar 2018 In : Nature energy. 3, 3, p. 185-192 8 p.

Research output: Contribution to journalArticle

Photocathodes
Molybdenum
Silicon
Nickel
Light absorption

Three-dimensional fractal geometry for gas permeation in microchannels

Malankowska, M., Schlautmann, S., Berenschot, E. J. W., Tiggelaar, R. M., Pina, M. P., Mallada, R., Tas, N. R. & Gardeniers, H. 27 Jan 2018 In : Micromachines. 9, 2, 45

Research output: Contribution to journalArticle

Open Access
File
Microchannels
Permeation
Fractals
Geometry
Gases
6 Citations
Photoresists
Etching
Fabrication
Coatings
Plasmas

Activities 2007 2007

  • 1 Oral presentation

Simple technique for direct patterning of nanowires using a nanoslit shadow mask

D.H. Tong (Speaker), Henricus V. Jansen (Speaker), Niels Roelof Tas (Speaker), V.J. Gadgil (Speaker), Edwin Carlen (Speaker), A.H.J. van den Berg (Speaker)
10 Jun 2007

Activity: Talk or presentationOral presentation