• 2930 Citations
  • 29 h-Index
1993 …2019
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Fingerprint Dive into the research topics where Niels R. Tas is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 6 Similar Profiles
Silicon Chemical Compounds
Lithography Engineering & Materials Science
lithography Physics & Astronomy
Fabrication Chemical Compounds
Etching Chemical Compounds
Thin films Chemical Compounds
silicon nitrides Physics & Astronomy
Microchannels Engineering & Materials Science

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Research Output 1993 2019

19 Downloads (Pure)

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Le-The, H., Tiggelaar, R. M., Berenschot, E., Van Den Berg, A., Tas, N. & Eijkel, J. C. T., 12 Jun 2019, In : ACS nano. 13, p. 6782-6789 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Ozone
Silicon
Gold
ozone
adhesion
1 Citation (Scopus)

Selective area growth and stencil lithography for in situ fabricated quantum devices

Schüffelgen, P., Rosenbach, D., Li, C., Schmitt, T. W., Schleenvoigt, M., Jalil, A. R., Schmitt, S., Kölzer, J., Wang, M., Bennemann, B., Parlak, U., Kibkalo, L., Trellenkamp, S., Grap, T., Meertens, D., Luysberg, M., Mussler, G., Berenschot, E., Tas, N., Golubov, A. A. & 3 othersBrinkman, A., Schäpers, T. & Grützmacher, D., 29 Jul 2019, In : Nature nanotechnology. 14, 9, p. 825-831 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Quantum computers
quantum computation
Lithography
lithography
insulators
1 Citation (Scopus)
2 Downloads (Pure)

Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Le-The, H., Lozeman, J. J. A., Lafuente, M., Muñoz, P., Bomer, J. G., Duy-Tong, H., Berenschot, E., Van Den Berg, A., Tas, N. R., Odijk, M. & Eijkel, J. C. T., 7 Jul 2019, In : Nanoscale. 11, 25, p. 12152-12160 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Gold
Raman scattering
Fabrication
Silicon
Wet etching
4 Citations (Scopus)
4 Downloads (Pure)

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

Wilbers, J. G. E., Berenschot, J. W., Tiggelaar, R. M., Dogan, T., Sugimura, K., Van Der Wiel, W. G., Gardeniers, J. G. E. & Tas, N. R., 15 Feb 2018, In : Journal of micromechanics and microengineering. 28, 4, 044003.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Lithography
Nanostructures
Crystalline materials
Fabrication
6 Citations (Scopus)
26 Downloads (Pure)
Open Access
File

Activities 1999 2007

  • 4 Oral presentation

Simple technique for direct patterning of nanowires using a nanoslit shadow mask

D.H. Tong (Speaker), Henricus V. Jansen (Speaker), Niels Roelof Tas (Speaker), V.J. Gadgil (Speaker), Edwin Carlen (Speaker), A.H.J. van den Berg (Speaker)
10 Jun 2007

Activity: Talk or presentationOral presentation

Wet anisotropic etching for fluidic 1D nanochannels

J. Haneveld (Speaker), Henricus V. Jansen (Speaker), Johan W. Berenschot (Speaker), Niels Roelof Tas (Speaker), Michael Curt Elwenspoek (Speaker)
2003

Activity: Talk or presentationOral presentation

Micromachined hydraulic multivibrator

Niels Roelof Tas (Keynote speaker)
6 Sep 1999

Activity: Talk or presentationOral presentation

The electrostatic shuffle motor

Niels Roelof Tas (Keynote speaker)
6 Sep 1999

Activity: Talk or presentationOral presentation