Philip Lucke

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20192020
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Fingerprint Dive into the research topics where Philip Lucke is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 5 Similar Profiles
x ray optics Physics & Astronomy
deformable mirrors Physics & Astronomy
projection Physics & Astronomy
mirrors Physics & Astronomy
modulation Physics & Astronomy
photolithography Physics & Astronomy
wavelengths Physics & Astronomy
actuators Physics & Astronomy

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Research Output 2019 2020

Mirror for a microlithographic projection exposure system, and method for operating a deformable mirror

Lippert, J., Gruner, T., Hild, K., Lucke, P. & Nematollahi, M., 30 Jan 2020, IPC No. G03F 7/ 20 A I, Patent No. WO2020020550, Priority date 26 Jul 2018, Priority No. DE201810212508

Research output: Patent

deformable mirrors
projection
mirrors
inventions
electrodes

Adaptive piezoelectric optics for XUV wavelengths

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M. & Bijkerk, F., 13 Jun 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
21 Downloads (Pure)

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Nematollahi, M., Lucke, P., Bayraktar, M., Yakshin, A., Rijnders, A. J. H. M. & Bijkerk, F., 15 Oct 2019, In : Optics letters. 44, 20, p. 5104-5107 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
x ray optics
modulation
photolithography
wavelengths
actuators

Activities 2018 2018

  • 2 Oral presentation

Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation

Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems

Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor), F. Bijkerk (Contributor)
7 Nov 2018

Activity: Talk or presentationOral presentation