Philip Lucke

Source: Scopus
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Adaptive piezoelectric actuators for XUV wavelengths and scaling of hysteresis
Philip Lucke (Speaker), Muharrem Bayraktar (Contributor), Mohammadreza Nematollahi (Contributor), Evert Houwman (Contributor), Yorick Alexander Birkhölzer (Contributor), Andrey Yakshin (Contributor), Guus Rijnders (Contributor) & Fred Bijkerk (Contributor)
22 Jan 2020
Activity: Talk or presentation › Oral presentation
Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
7 Nov 2018
Activity: Talk or presentation › Oral presentation
Adaptive multilayer mirrors based on piezoelectric actuators for XUV lithography
Mohammadreza Nematollahi (Speaker), Philip Lucke (Contributor), Muharrem Bayraktar (Contributor), Kerstin Hild (Contributor), Toralf Gruner (Contributor), Andrey Yakshin (Contributor), A.J.H.M. Rijnders (Contributor), Eric Louis (Contributor) & F. Bijkerk (Contributor)
12 Dec 2018
Activity: Talk or presentation › Oral presentation

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