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Wafer scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond
Pordeli, Y. (Contributor), van der Wel, B. Y. (Contributor), Kooijman, L. J. (Contributor), Jonker, D. (Contributor), Berenschot, J. W. (Contributor), Borgelink, B. T. H. (Contributor), Le The, H. (Contributor), de Boer, M. J. (Contributor), Eijkel, J. C. T. (Contributor), Hueting, R. (Contributor), Tiggelaar, R. M. (Contributor), Gardeniers, J. G. E. (Contributor) & Tas, N. R. (Speaker)
6 Nov 2019Activity: Talk or presentation › Oral presentation