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Research Output 1997 2019

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Conference article
2013
3 Citations (Scopus)

Strain characterization of FinFETs using Raman spectroscopy

Kaleli, B., van Hemert, T., Hueting, R. J. E. & Wolters, R. A. M., 31 Aug 2013, In : Thin solid films. 541, p. 57-61 5 p.

Research output: Contribution to journalConference articleAcademicpeer-review

fins
Raman spectroscopy
finite element method
silicon
Silicon