1989 …2019
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Fingerprint Dive into the research topics where Remco J. Wiegerink is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 13 Similar Profiles
Sensors Engineering & Materials Science
mass flow Physics & Astronomy
Microfluidics Engineering & Materials Science
Fabrication Engineering & Materials Science
sensors Physics & Astronomy
Pressure sensors Engineering & Materials Science
actuation Physics & Astronomy
Silicon Engineering & Materials Science

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Research Output 1989 2019

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Aspect ratio
Etching
Cleaning
Processing
Vapors

Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

Yu, Q., Veltkamp, H-W., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 103-105. 3 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
Microfluidics
Readout systems
Fabrication
Sensors
Substrates

Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 116-119. 4 p.

Research output: Contribution to conferencePaperAcademic

Open Access
File
electrodes
silicon
microchannels
fabrication
microfluidic devices

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Microfluidics
Electrodes
Tuning
Sensors

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion

Activities 1993 2017

  • 4 Oral presentation
  • 1 Organising a conference, workshop, ...

3rd Conference on MicroFluidic Handling Systems, MFHS 2017

Joost Conrad Lötters (Chair), Gerald Urban (Chair), Remco J. Wiegerink (Organiser), Susan Janse (Organiser), Dennis Alveringh (Organiser), Remco G.P. Sanders (Organiser), Henk-Willem Veltkamp (Organiser), Jarno Groenesteijn (Organiser), Yiyuan Zhao (Organiser), Yaxiang Zeng (Organiser)
4 Oct 20176 Oct 2017

Activity: Participating in or organising an eventOrganising a conference, workshop, ...

Miniaturized Gravity gradiometers for space applications

Jakob Flokstra (Speaker), R. Cuperus (Speaker), Remco J. Wiegerink (Speaker)
19 Apr 2007

Activity: Talk or presentationOral presentation

A TES X-ray microcalorimeter array for imaging spectroscopy

P.A.J. de Korte (Speaker), H.F.C. Hoevers (Speaker), J.W.A. den Herder (Speaker), J.A.M. Bleeker (Speaker), W.M. Bergmann Tiest (Speaker), M.P. Bruijn (Speaker), M.L. Ridder (Speaker), Remco J. Wiegerink (Speaker), J.S. Kaastra (Speaker), J. van der Kuur (Speaker), W.A. Mels (Speaker)
27 Aug 2002

Activity: Talk or presentationOral presentation

MOS Translinear Circuits

Remco J. Wiegerink (Speaker)
5 Feb 1993

Activity: Talk or presentationOral presentation