1989 …2019
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Research Output 1989 2019

2019

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion
2018
4 Downloads (Pure)

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

mass flow
sensors
Sensors
equipartition theorem
random vibration
244 Downloads (Pure)

Integrated throughflow mechanical microfluidic sensors

Alveringh, D., 6 Apr 2018, Enschede: University of Twente. 216 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
Microfluidics
Fluids
Sensors
Viscosity
Medical applications
1 Citation (Scopus)
108 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaperAcademicpeer-review

File
mass flow
actuators
actuation
sensors
thin films
2 Citations (Scopus)
82 Downloads (Pure)

On frequency-based interface circuits for capacitive MEMS accelerometers

Qiao, Z., Boom, B. A., Annema, A. J., Wiegerink, R. J. & Nauta, B., 25 Sep 2018, In : Micromachines. 9, 10, 21 p., 488.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Phase noise
Accelerometers
MEMS
Bandwidth
Networks (circuits)
2017
6 Citations (Scopus)
67 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon
Silicon nitride
Microfluidics
platforms
Metals
3 Citations (Scopus)
49 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 126.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microfluidics
platforms
Fabrication
fabrication
slits
80 Downloads (Pure)

Coriolis mass flow and density sensor actuation using a phase-locked loop

Alveringh, D., Schut, T., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 102-105 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Phase locked loops
Sensors
Electric potential
Electronic equipment
Nitrogen
77 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability
69 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry
51 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers
2 Citations (Scopus)

Integrated pressure sensing using capacitive Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 2 Jun 2017, In : Journal of microelectromechanical systems. 26, 3, p. 653-661 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Sensors
Flow measurement
Microchannels
Scalability
Fabrication
67 Downloads (Pure)

Micro Coriolis mass flow sensor driven by external piezo ceramic

Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, p. 45-48.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
File
mass flow
ceramics
sensors
vibration meters
chips

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 4 Oct 2017, p. 16-19. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
Pressure sensors
Sensors
Pressure drop
Viscosity
Fluids
10 Citations (Scopus)
185 Downloads (Pure)

Nano-G accelerometer using geometric anti-springs

Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., Beker, M. G., Oner, A. & Wees, van, D., 22 Jan 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 33-36 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Accelerometers
Stiffness
Leaf springs
Mechanics
Bandwidth
1 Citation (Scopus)

Phase relation recovery for scanning laser Doppler vibrometry

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 12 Jan 2017, In : Measurement science and technology. 28, 2, p. 025208 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Scanning
Recovery
Lasers
Doppler effect
Laser beams
1 Citation (Scopus)

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 18 Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Pressure sensors
Sensors
Pressure drop
Electronic equipment
Viscosity
71 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching
1 Citation (Scopus)

SU-8 micro Coriolis mass flow sensor

Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C. & Fernandez, L. J., 31 Mar 2017, In : Sensors and actuators. B: Chemical. 241, p. 744-749 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

isopropyl alcohol
2-Propanol
mass flow
Alcohols
Water
104 Downloads (Pure)

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Fluidics
Microfluidics
Sensors
Pressure sensors
Resonators
2016
4 Citations (Scopus)
1 Downloads (Pure)

A 2D acoustic particle velocity sensor with perfectly orthogonal sensitivity directions

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 1 Aug 2016, In : Sensors and actuators. A: Physical. 246, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

A 2D particle velocity sensor with minimal flow disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 18 May 2016, In : IEEE sensors journal. 16, 24, p. 8706-8714 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

15 Downloads (Pure)

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

Lötters, J. C., Groen, M., Wiegerink, R. J., Brouwer, D. M., Brookhuis, R. A. & Meutstege, E., 9 May 2016, (Submitted) Patent No. WO2016182437

Research output: PatentProfessional

File
2 Citations (Scopus)
64 Downloads (Pure)

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Tsoukalas, D. (ed.), Wiegerink, R. J. (ed.), Groenesteijn, J., Staufer, U. (ed.) & Lötters, J. C., 15 Jun 2016, In : Microelectronic engineering. 159, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
122 Downloads (Pure)

Microfluidic platform for Coriolis-based sensor and actuator systems

Groenesteijn, J., 15 Jan 2016, Enschede: University of Twente. 241 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
1 Citation (Scopus)
1 Downloads (Pure)

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 788-791 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
1 Downloads (Pure)

Three-axis force-torque sensor with fully differential capacitive readout

Brookhuis, R. A., Sanders, R. G. P., Sikkens, B. N. A. & Wiegerink, R. J., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA: IEEE, p. 885-888 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Towards nanogram per second Coriolis mass flow sensing

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 193-196 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

77 Downloads (Pure)

Two-dimensional acoustic particle velocity sensors based on a crossing wires topology

Pjetri, O., 21 Oct 2016, Enschede: Universiteit Twente. 176 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
1 Citation (Scopus)

Vortex generation and sensing in microfabricated surface channels

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Shanghai: IEEE, p. 812-815 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2015
32 Downloads (Pure)

A 2D particle velocity sensor with minimal flow-disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 1 Nov 2015, Proceedings IEEE Sensors 2015. Piscataway: IEEE, p. 1307-1310 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
12 Downloads (Pure)

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague: MNE 2015, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
mass flow
tuning
actuation
sensitivity
sensors
11 Citations (Scopus)

Differential capacitive sensing circuit for a multi-electrode capacitive force sensor

Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 31 Aug 2015, In : Sensors and actuators. A: Physical. 234, p. 168-179 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Lötters, J. C., Groenesteijn, J., van der Wouden, E. J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 21 Jun 2015, Proceedings of the18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 1798-1801 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

19 Downloads (Pure)

In-line picogram-resolution microchannel resonator for protein adsorption measurements operating at atmospheric pressure

Groenesteijn, J., Steenwelle, R. J. A., Steenwelle, R. J. A., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: University of Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
5 Citations (Scopus)

Inline pressure sensing mechanisms enabling scalable range and sensitivity

Alveringh, D., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 21 Jun 2015, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., p. 1187-1190 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Downloads (Pure)

Method and system for determining the fractions of a streaming gaseous medium

Lötters, J. C., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., van der Wouden, E. J. & Sparreboom, W., 5 Oct 2015, (Submitted) Patent No. WO2016056902

Research output: PatentProfessional

File
89 Downloads (Pure)

Microvalves for precise dosing: proportional flow control on a chip

Groen, M., 26 Nov 2015, Enschede: University of Twente. 128 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

File
9 Citations (Scopus)
119 Downloads (Pure)

Miniature large range multi-axis force-torque sensor for biomechanical applications

Brookhuis, R. A., Sanders, R. G. P., Ma, K., Lammerink, T. S. J., de Boer, M. J., Krijnen, G. J. M. & Wiegerink, R. J., 22 Feb 2015, In : Journal of micromechanics and microengineering. 25, 2, p. 025012 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2 Citations (Scopus)
2 Downloads (Pure)

Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

Groen, M., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 9 Sep 2015, In : Journal of micromechanics and microengineering. 25, p. 105008 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
257 Downloads (Pure)

Multi parameter flow meter for on-line measurement of gas mixture composition

van der Wouden, E. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 10 Apr 2015, In : Micromachines. 6, 4, p. 452-461 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)

Proportional control valves integrated in silicon nitride surface channel technology

Groen, M., Groenesteijn, J., Meutstege, E., Brookhuis, R. A., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 25 Jun 2015, In : Journal of microelectromechanical systems. 24, 6, p. 1759-1767 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Downloads (Pure)

Readout circuit for capacitance ratio measurement

Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: Universiteit Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2 Citations (Scopus)

Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor

Hu, C., Zheng, D., Fan, S., Wiegerink, R. J. & Guo, Z., 21 Jan 2015, In : Microsystem technologies. 22, 4, p. 1-9 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

2014
49 Downloads (Pure)

A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system

Groenesteijn, J., Dijkstra, M., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 8 Oct 2014, Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universität Freiburg, p. 21-24 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
5 Citations (Scopus)
1 Downloads (Pure)

A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer

Alveringh, D., Brookhuis, R. A., Wiegerink, R. J. & Krijnen, G. J. M., 26 Jan 2014, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. San Francisco: The Printing House, Inc., p. 680-683 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Torque
Sensors
Silicon
Reactive ion etching
Crosstalk
9 Citations (Scopus)
31 Downloads (Pure)

An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out

Groenesteijn, J., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Krijnen, G. J. M., 26 Jan 2014, Technical Digest of the 27th IEEE International Conference on Micro Electro Mechanical Systems. Los Alamitos, CA, USA: The Printing House, Inc., p. 696-699 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)
1 Downloads (Pure)

A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Groen, M., Wu, K., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 26 Nov 2014, In : Journal of micromechanics and microengineering. 24, 12, p. 125020 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

First results of PRECISE—Development of a MEMS-based monopropellant micro chemical propulsion system

Gauer, M., Telitschkin, D., Gotzig, U., Batonneau, Y., Johansson, H., Ivanov, M., Palmer, P. & Wiegerink, R. J., Jan 2014, In : Acta astronautica. 93, p. 77-83 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

12 Downloads (Pure)

Fluid flow regulator device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of using the same

Groen, M., Brouwer, D. M., Brookhuis, R. A. & Wiegerink, R. J., 24 Oct 2014, (Submitted) Patent No. WO2014NL50736, Priority date 24 Oct 2014

Research output: PatentProfessional

File