Remco J. Wiegerink

dr.ir.

1989 …2020

Research output per year

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Research Output

Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 20 Jan 2000, Proceedings of the 3rd symposium on Microsystems in practice. Utrecht, p. - 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 18 Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

RIE lag in high aspect ratio trench etching of silicon

Jansen, H., de Boer, M., Wiegerink, R., Tas, N., Smulders, E., Neagu, C. & Elwenspoek, M., Feb 1997, In : Microelectronic engineering. 35, 1-4, p. 45-50 6 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Open Access
File
100 Citations (Scopus)
511 Downloads (Pure)

Scalable six-axis force-torque sensor with a large range for biomechanical applications

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J. & de Boer, M. J., 29 Jan 2012, Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. USA: IEEE Computer Society, p. 595-598 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstract

Open Access
File
97 Downloads (Pure)

Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 10 Jun 2001, Proceedings of Transducers 2001. p. 1436-1439

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sensor research at the Transducers Technology Group

van Baar, J. J. J., van Honschoten, J. W., Moktadir, Z., Lammerink, T. S. J., Wiegerink, R. J., Berenschot, J. W. & Elwenspoek, M. C., 11 Oct 2001, p. -.

Research output: Contribution to conferencePoster

Simple rail-to-rail low-voltage constant-transconductance CMOS input stage in weak inversion

Botma, J. H., Wassenaar, R. F. & Wiegerink, R. J., 1993, In : Electronics letters. 29, 12, p. 1145-1147

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Simple rail-to-rail low-voltage constant-transconductance CMOS input stage in weak inversion

Botma, J. H., Wassenaar, R. F. & Wiegerink, R. J., 1994, In : Electronics letters. 29, 12, p. 1145-1146

Research output: Contribution to journalArticleAcademicpeer-review

Single chip flow sensing system with a dynamic flow range of more than 4 decades

Lammerink, T. S. J., Lötters, J. C., Wiegerink, R. J., Groenesteijn, J. & Haneveld, J., 5 Jun 2011, Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE, p. 890-893 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
1 Downloads (Pure)

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 788-791 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Six-axis force-torque sensor

Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 14 Jan 2013, (In preparation) Patent No. WO2013NL50017, Priority date 14 Jan 2013

Research output: Patent

Six-axis force-torque sensor

Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 14 Jan 2013, (Submitted) Patent No. US201314371632

Research output: Patent

File
28 Downloads (Pure)

Six-axis force-torque sensor with a large range for biomechanical applications

Brookhuis, R. A., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 28 Feb 2014, In : Journal of micromechanics and microengineering. 24, 3, p. 1-10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)
3 Downloads (Pure)

Some design aspects of a two-stage rail-to-rail CMOS op amp

Gierkink, S. L. J., Holzmann, P. J., Wiegerink, R. J. & Wassenaar, R. F., Nov 1999, In : Analog integrated circuits and signal processing. 21, 2, p. 143-152 10 p., 10.1023/A:1008317623471.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

SU-8 micro Coriolis mass flow sensor

Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C. & Fernandez, L. J., 31 Mar 2017, In : Sensors and actuators. B: Chemical. 241, p. 744-749 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Superconducting Micro Electro Mechanical Systems

Sesé, J., Ebeling, R., Wiegerink, R. J. & Flokstra, J., 14 Sep 2003.

Research output: Contribution to conferencePoster

Superconducting Micro Electro Mechanical Systems

Sesé, J., Wiegerink, R. J. & Flokstra, J., 2 Feb 2004.

Research output: Contribution to conferencePoster

Superconducting Micro Electro Mechanical Systems

Sesé, J., Ebeling, R., Wiegerink, R. J. & Flokstra, J., 14 Sep 2004, Proceedings of the 6th European Conference on Applied Superconductivity. Andreone, S., Pepe, G. P., Cristiano, R. & Masullo, G. (eds.). Bristol: Institute of Physics Publishing, p. 3372-3378 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Superconducting Micro Mechanical Systems

Sesé, J., Flokstra, J. & Wiegerink, R. J., 2004, Proceedings 6th European Workshop on Low Temperature Electronics, WOLTE-6: 23-25 June, 2004, ESTEC, Noordwijk, The Netherlands. Noordwijk: ESA, p. 87-92 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Temperature balance micro flow sensor system based on a free oscillating differential power controller

Lammerink, T. S. J. & Wiegerink, R. J., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 19-24

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

The application of micro- and nanofluidics in Wobbe index meters

Wiegerink, R. J., Lötters, J. C., Lammerink, T. S. J., Pap, M. G. & Mouris, A. J., 10 Oct 2012, Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. 166-167 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

7 Downloads (Pure)

Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor

Hu, C., Zheng, D., Fan, S., Wiegerink, R. J. & Guo, Z., 21 Jan 2015, In : Microsystem technologies. 22, 4, p. 1-9 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Thermal and Coriolis type micro flow sensors based on surface channel technology

Wiegerink, R. J., Lammerink, T. S. J., Dijkstra, M. & Haneveld, J., Sep 2009, In : Procedia chemistry. 1, 1, p. 1455-1458 4 p., 10.1016/j.proche.2009.07.363.

Research output: Contribution to journalArticleAcademicpeer-review

File
10 Citations (Scopus)
65 Downloads (Pure)

Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Baars, N. H. R., Krouwer, E., van Baar, J. J. J. & Wiegerink, R. J., 22 Oct 2003, p. 353-357. 5 p.

Research output: Contribution to conferencePaper

File
1 Citation (Scopus)
45 Downloads (Pure)

Thermal flow-sensor drift reduction by thermopile voltage cancellation via power feedback control

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., Aug 2014, In : Journal of microelectromechanical systems. 23, 4, p. 908-917 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Thermal-wave balancing flow sensor with low-drift power feedback

Dijkstra, M., Lammerink, T. S. J., Pjetri, O., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 11 Apr 2014, In : Journal of micromechanics and microengineering. 24, 5, p. 055016 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
1 Citation (Scopus)
73 Downloads (Pure)

Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 3 Nov 2013, IEEE Sensors 2013. Los Alamitos, CA, USA: IEEE, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

Three-axis force-torque sensor with fully differential capacitive readout

Brookhuis, R. A., Sanders, R. G. P., Sikkens, B. N. A. & Wiegerink, R. J., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA: IEEE, p. 885-888 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
1 Downloads (Pure)

Towards 3D printed microfluidic devices in α-alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 156-159. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
57 Downloads (Pure)

Towards 3D printed microfluidic structures in alumina

Veltkamp, H-W., Zhao, Y., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop. Delft, p. 120-121 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Towards a Casimir force measurement between micromachined parallel plate structures

Syed Nawazuddin, M. B., Lammerink, T. S. J., Berenschot, J. W., de Boer, M. J., Ma, K., Elwenspoek, M. C. & Wiegerink, R. J., 20 Nov 2012, In : Challenges. 3, 2, p. 261-277 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
67 Downloads (Pure)

Towards a disposable polymer-based micro-bioreactor

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 4 Jul 2019, Proceedings of the 22nd Semiconductor Advances for Future Electronics (SAFE) workshop. Delft, p. 78-79 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Towards a fully integrated and disposable DNA amplification chip

Akegawa Monteiro, F., Veltkamp, H-W., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 2 Oct 2019, p. 128-131. 4 p.

Research output: Contribution to conferencePaper

Open Access
File
56 Downloads (Pure)

Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 2012, In : Bioinspiration & biomimetics. 7, 4, p. 046009 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
29 Citations (Scopus)
77 Downloads (Pure)

Towards a microvalve for proportional control of mass flow

Groen, M., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede: University of Twente, p. 148-151 4 p. (Micromachines).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.

Research output: Contribution to conferenceAbstract

Towards embedded control for resonant scanning MEMS micromirror

Kuijpers, A. A., Lierop, D., Sanders, R. H. M., Tangenberg, J., Moddejonge, H., Eikenbroek, J. W. T., Lammerink, T. S. J. & Wiegerink, R. J., Sep 2009, In : Procedia chemistry. 1, 1, p. 1307-1310 4 p., 10.1016/j.proche.2009.07.326.

Research output: Contribution to journalArticleAcademicpeer-review

File
11 Citations (Scopus)
388 Downloads (Pure)

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

Dagamseh, A. M. K., Lammerink, T. S. J., Sanders, R. G. P., Wiegerink, R. J. & Krijnen, G. J. M., Jan 2011, 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Citations (Scopus)
72 Downloads (Pure)

Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

Syed Nawazuddin, M. B., Lammerink, T. S. J., Wiegerink, R. J., Berenschot, J. W., de Boer, M. J. & Elwenspoek, M. C., 1 Aug 2011, Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE Electron Devices Society, p. 434-437 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Towards nanogram per second Coriolis mass flow sensing

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 193-196 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
1 Downloads (Pure)

Towards system-level modeling and characterization of components for intravenous therapy

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 8 Oct 2014, Proceedings of the 2nd International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universitat Freiburg, p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
290 Downloads (Pure)

Trapping in Capacitive MEMS Structures

van Essen, M. C., Wiegerink, R. J., Wormeester, H., Rogalla, H. & Flokstra, J., 23 Jan 2007, p. -.

Research output: Contribution to conferencePoster

Trench-assisted surface channel technology (TASCT) as platform for high-temperature physical parameter sensing

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 7 Jun 2018, Proceedings of the 21st Semiconductor Advances for Future Electronics (SAFE) workshop. Enschede, p. 9 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
150 Downloads (Pure)

Variable-gamma circuit for colour television based on the MOS voltage translinear principle

Wiegerink, R. J., ten Pierick, H., Jaspers, C., de Haan, W. & de Greef, D., 1996, In : Analog integrated circuits and signal processing. 9, p. 189-195

Research output: Contribution to journalArticleAcademicpeer-review

Versatile surface channel concept for microfluidic applications

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 3 Sep 2006, Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton: Southampton University Press, p. 37-40 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
74 Downloads (Pure)

Vortex generation and sensing in microfabricated surface channels

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Shanghai: IEEE, p. 812-815 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)

Wafer-through access trenches for surface channel technology

Groenesteijn, J., de Boer, M. J., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

μ-Coriolis mass flow sensor with resistive readout

Schut, T., Wiegerink, R. & Lötters, J., 11 Feb 2020, In : Micromachines. 11, 2, 184.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
12 Downloads (Pure)