1989 …2019
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Research Output 1989 2019

Abstract
5 Downloads (Pure)

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Aspect ratio
Etching
Cleaning
Processing
Vapors
51 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers
4 Downloads (Pure)

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Microfluidics
Electrodes
Tuning
Sensors
6 Downloads (Pure)

Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades

Lötters, J. C., Lammerink, T. S. J., Groenesteijn, J., Haneveld, J. & Wiegerink, R. J., 15 Nov 2011, p. 1-1. 1 p.

Research output: Contribution to conferenceAbstractOther research output

File
Coriolis force
Resistors
Sensors
Lorentz force
Microchannels
6 Downloads (Pure)

Optimization of the Lorentz Force Actuation for a micro Coriolis mass flow sensor

Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., Haneveld, J. & Lötters, J. C., 15 Nov 2011, p. 1-1. 1 p.

Research output: Contribution to conferenceAbstractOther research output

File
Lorentz force
Sensors
Magnetic fields
Permanent magnets
75 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching

Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.

Research output: Contribution to conferenceAbstractProfessional

Article
17 Citations (Scopus)

2d-finite-element simulations for long-range capacitive position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 13 Jun 2003, In : Journal of micromechanics and microengineering. 13, 4, p. S183-S189 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Capacitance
Sensors
Microactuators
Capacitance measurement
Periodic structures
21 Citations (Scopus)
1 Downloads (Pure)

3D force sensor for biomechanical applications

Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J. & Elwenspoek, M. C., 8 May 2012, In : Sensors and actuators. A: Physical. 182, 182, p. 28-33 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

A 2D acoustic particle velocity sensor with perfectly orthogonal sensitivity directions

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 1 Aug 2016, In : Sensors and actuators. A: Physical. 246, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

A 2D particle velocity sensor with minimal flow disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 18 May 2016, In : IEEE sensors journal. 16, 24, p. 8706-8714 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

81 Citations (Scopus)
63 Downloads (Pure)

A capacitive rf power sensor based on mems technology

Fernandez, L. J., Wiegerink, R. J., Flokstra, J., Flokstra, J., Sesé, J., Jansen, H. V. & Elwenspoek, M. C., 28 Apr 2006, In : Journal of micromechanics and microengineering. 16, IEEE Produ, p. S1099-S1107 9 p., 10.1088/0960-1317/16/7/001.

Research output: Contribution to journalArticleAcademicpeer-review

File
6 Citations (Scopus)

A complete three-dimensional sound intensity sensor integrated on a single chip

Yntema, D. R., van Honschoten, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 23 Sep 2008, In : Journal of micromechanics and microengineering. 18, 2008/16200/11, p. 1-9 9 p., 10.1088/0960-1317/18/11/115004.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
50 Downloads (Pure)

A high-Tc 4-bit periodic threshold analog-to-digital converter

Gerritsma, G. J., Verhoeven, M. A. J., Verhoeven, M. A. J., Wiegerink, R. J. & Rogalla, H., 1997, In : IEEE transactions on applied superconductivity. 7, 2, p. 2987-2990 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
11 Citations (Scopus)
1 Downloads (Pure)

A MEMS-based gravity gradiometer for future planetary missions

Flokstra, J., Flokstra, J., Cuperus, R., Cupurus, R., Wiegerink, R. J. & van Essen, M. C., Nov 2009, In : Cryogenics. 49, 11, p. 665-668 4 p., 10.1016/j.cryogenics.2008.12.019.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)
59 Downloads (Pure)

A micromachined capacitive incremental position sensor: part 1. Analysis and simulations

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 10 May 2006, In : Journal of micromechanics and microengineering. 16, 10, p. S116-S124 9 p., 10.1088/0960-1317/16/6/S18.

Research output: Contribution to journalArticleAcademicpeer-review

File
13 Citations (Scopus)
9 Downloads (Pure)

A micromachined capacitive incremental position sensor: part 2. experimental assessment

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 10 May 2006, In : Journal of micromechanics and microengineering. 16, IEEE Produ/6, p. S125-S134 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
8 Citations (Scopus)

Analysis of a three-dimensional particle velocity sensor for design optimization

van Honschoten, J. W., Yntema, D. R., Wiegerink, R. J. & Elwenspoek, M. C., 3 Mar 2007, In : Journal of micromechanics and microengineering. 17, WP07-01, p. S137-S146 9 p., 10.1088/0960-1317/17/7/S11.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
144 Downloads (Pure)

Analysis of the performance of a particle velocity sensor between two cylindrical obstructions

van Honschoten, J. W., Yntema, D. R., Svetovoy, V., Dijkstra, M., Wiegerink, R. J. & Elwenspoek, M. C., May 2007, In : Journal of the Acoustical Society of America. 121, WP07-01/5, p. 2711-2722 12 p., 10.1121/1.2717406.

Research output: Contribution to journalArticleAcademicpeer-review

File
13 Citations (Scopus)
52 Downloads (Pure)

An HTS Quasi-One junction SQUID-based periodic threshold comparator for a 4-bit superconductive flash A/D converter

Wiegerink, R. J., Gerritsma, G. J., Reuvekamp, E. M. C. M., Verhoeven, M. A. J. & Rogalla, H., 1995, In : IEEE transactions on applied superconductivity. 5, 3, p. 3452-3458 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
SQUIDs
converters
flash
comparator circuits
Comparator circuits
7 Citations (Scopus)
13 Downloads (Pure)

An integrated 3D sound intensity sensor using four-wire particle velocity sensors: I. Design and characterization

Yntema, D. R., van Honschoten, J. W. & Wiegerink, R. J., 14 Dec 2009, In : Journal of micromechanics and microengineering. 20, 1, p. 015042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)
8 Downloads (Pure)

An integrated 3D sound intensity sensor using four-wire particle velocity sensors: II. Modelling

van Honschoten, J. W., Yntema, D. R. & Wiegerink, R. J., 14 Dec 2009, In : Journal of micromechanics and microengineering. 20, 1, p. 015043 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)
1 Downloads (Pure)

A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Groen, M., Wu, K., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 26 Nov 2014, In : Journal of micromechanics and microengineering. 24, 12, p. 125020 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
36 Downloads (Pure)

Artificial lateral-line system for imaging dipole sources using Beamforming techniques

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Jan 2011, In : Procedia engineering. 25, p. 779-782 4 p.

Research output: Contribution to journalArticleAcademic

Open Access
File
Open systems
Biomimetics
Beamforming
Fish
Robots
114 Citations (Scopus)
41 Downloads (Pure)

Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

Dijkstra, M., van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H. & Krijnen, G. J. M., 7 Jul 2005, In : Journal of micromechanics and microengineering. 15, 7, p. S132-S138 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
41 Citations (Scopus)

A versatile surface channel concept for microfluidic applications

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 5 Sep 2007, In : Journal of micromechanics and microengineering. 17, LNCS4549/10, p. 1971-1977 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
71 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon
Silicon nitride
Microfluidics
platforms
Metals
3 Citations (Scopus)
53 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 126.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microfluidics
platforms
Fabrication
fabrication
slits
30 Citations (Scopus)

CMOS low-voltage operational amplifiers with constant gm rail-to-rail input stage

Hogervorst, R., Wiegerink, R. J., de Jong, P. A. L., Fonderie, J., Wassenaar, R. F. & Huijsing, J. H., 1994, In : Analog integrated circuits and signal processing. 5, 2, p. 135-146

Research output: Contribution to journalArticleAcademicpeer-review

13 Citations (Scopus)
64 Downloads (Pure)

Compact mass flow meter based on a micro coriolis flow sensor

Sparreboom, W., van de Geest, J., Katerberg, M., Postma, F. M., Haneveld, J., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 2013, In : Micromachines. 4, 1, p. 22-33 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

File

Computer aided analysis and design of MOS translinear circuits operating in strong inversion

Wiegerink, R. J., 1996, In : Analog integrated circuits and signal processing. 9, p. 181-187

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)
94 Downloads (Pure)

Design considerations for a micromachined proportional control valve

Groen, M., Brouwer, D. M., Wiegerink, R. J. & Lötters, J. C., 17 Apr 2012, In : Micromachines. 3, 2, p. 396-412 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
12 Citations (Scopus)

Development of an array of transition edge sensors for application in X-ray astronomy

Bruijn, M. P., Baars, N. H. R., Bergmann Tiest, W. M., Germeau, A., Hoevers, H. F. C., de Korte, P. A. J., Mels, W. A., Ridder, M. L., Krouwer, E., van Baar, J. J. & Wiegerink, R. J., 2004, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 520, 1-3, p. 443-445

Research output: Contribution to journalArticleAcademic

Astronomy
astronomy
Surface micromachining
Fabrication
X rays
13 Citations (Scopus)

Differential capacitive sensing circuit for a multi-electrode capacitive force sensor

Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 31 Aug 2015, In : Sensors and actuators. A: Physical. 234, p. 168-179 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
49 Downloads (Pure)

Dipole source localisation using bio-mimetic flow-sensor arrays

Dagamseh, A. M. K., Lammerink, T. S. J., Bruinink, C. M., Wiegerink, R. J. & Krijnen, G. J. M., 2009, In : Procedia chemistry. 1, 1, p. 891-894 4 p., 10.1016/j.proche.2009.07.222.

Research output: Contribution to journalArticleAcademicpeer-review

File
46 Citations (Scopus)

Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

Dagamseh, A. M. K., Lammerink, T. S. J., Kolster, M. L., Bruinink, C. M., Wiegerink, R. J. & Krijnen, G. J. M., 19 Feb 2010, In : Sensors and actuators. A: Physical. 162, 2, p. 355-360 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Downloads (Pure)

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

mass flow
sensors
Sensors
equipartition theorem
random vibration
1 Citation (Scopus)
21 Downloads (Pure)

Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications

Fernandez, L. J., Berenschot, J. W., Wiegerink, R. J., Flokstra, J., Flokstra, J., Jansen, H. V. & Elwenspoek, M. C., 20 Mar 2006, In : Journal of micromechanics and microengineering. 16, IEEE Produ, p. 862-868 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
11 Citations (Scopus)
189 Downloads (Pure)

Fabrication of thick silicon nitride blocks for integration of rf devices

Fernandez, L. J., Berenschot, J. W., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. V. & Elwenspoek, M. C., 2 Mar 2005, In : Electronics letters. 41, 3, p. 1-2 2 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
5 Citations (Scopus)

First results of PRECISE—Development of a MEMS-based monopropellant micro chemical propulsion system

Gauer, M., Telitschkin, D., Gotzig, U., Batonneau, Y., Johansson, H., Ivanov, M., Palmer, P. & Wiegerink, R. J., Jan 2014, In : Acta astronautica. 93, p. 77-83 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

17 Downloads (Pure)

Fully integrated micro coriolis mass flow sensor operating at atmospheric pressure

Lötters, J. C., Lammerink, T. S. J., Haneveld, J., Hageman, T. A. G. & Wiegerink, R. J., 1 Jan 2012, In : Technisches Messen. 79, 1, p. 4-9 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
mass flow
Atmospheric pressure
atmospheric pressure
sensors
Sensors
155 Citations (Scopus)

Generalized translinear circuit principle

Seevinck, E. & Wiegerink, R. J., 1991, In : IEEE journal of solid-state circuits. 26, 8, p. 1098-1102 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Imaging dipole flow sources using an artificial lateral-line system made of biomimetic hair flow sensors

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 17 Apr 2013, In : Journal of the Royal Society. Interface. 10, 83, p. 20130162 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
66 Downloads (Pure)

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Tsoukalas, D. (ed.), Wiegerink, R. J. (ed.), Groenesteijn, J., Staufer, U. (ed.) & Lötters, J. C., 15 Jun 2016, In : Microelectronic engineering. 159, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
22 Citations (Scopus)

Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening

Droogendijk, H., Bruinink, C. M., Sanders, R. G. P., Dagamseh, A. M. K., Wiegerink, R. J. & Krijnen, G. J. M., 22 May 2012, In : Journal of micromechanics and microengineering. 22, 6, p. 065026 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Integrated pressure sensing using capacitive Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 2 Jun 2017, In : Journal of microelectromechanical systems. 26, 3, p. 653-661 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Sensors
Flow measurement
Microchannels
Scalability
Fabrication
6 Citations (Scopus)
67 Downloads (Pure)

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Lötters, J. C., Lammerink, T. S. J., Groenesteijn, J., Haneveld, J. & Wiegerink, R. J., 15 Mar 2012, In : Micromachines. 3, 1, p. 194-203 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
24 Citations (Scopus)
51 Downloads (Pure)

Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity

Dagamseh, A. M. K., Bruinink, C. M., Wiegerink, R. J., Lammerink, T. S. J., Droogendijk, H. & Krijnen, G. J. M., Mar 2013, In : Journal of micromechanics and microengineering. 23, 3, p. 035010 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
4 Citations (Scopus)
3 Downloads (Pure)

Low-cost piezoresistive silicon load cell independent of force distribution

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., Jun 2000, In : Journal of micromechanics and microengineering. 10, 2, p. 200-203 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Low creep and hysteresis load cell based on a force-to-fluid pressure transformation

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., Dec 1999, In : Sensors and actuators. A: Physical. 78, 2, p. 74-80 7 p.

Research output: Contribution to journalArticleAcademicpeer-review