1989 …2019
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Research Output 1989 2019

2009
13 Downloads (Pure)

Optimized biomimetic hair sensor arrays for sensing oscillating air flows

Jaganatharaja, R. K., Bruinink, C. M., Kolster, M., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 26 Oct 2009, Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing. Juelich, Germany: Forschungszentrum Juelich GmbH, p. 16 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
40 Downloads (Pure)

Parallel plate structures for optical modulation and casimir force measurement

Syed Nawazuddin, M. B., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 22 Sep 2009, MME 09 - Proceedings 20th MicroMechanics Europe 2009. Toulouse: LAAS-CNRS, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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10 Citations (Scopus)
43 Downloads (Pure)

Thermal and Coriolis type micro flow sensors based on surface channel technology

Wiegerink, R. J., Lammerink, T. S. J., Dijkstra, M. & Haneveld, J., Sep 2009, In : Procedia chemistry. 1, 1, p. 1455-1458 4 p., 10.1016/j.proche.2009.07.363.

Research output: Contribution to journalArticleAcademicpeer-review

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10 Citations (Scopus)
297 Downloads (Pure)

Towards embedded control for resonant scanning MEMS micromirror

Kuijpers, A. A., Lierop, D., Sanders, R. H. M., Tangenberg, J., Moddejonge, H., Eikenbroek, J. W. T., Lammerink, T. S. J. & Wiegerink, R. J., Sep 2009, In : Procedia chemistry. 1, 1, p. 1307-1310 4 p., 10.1016/j.proche.2009.07.326.

Research output: Contribution to journalArticleAcademicpeer-review

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2008
6 Citations (Scopus)

A complete three-dimensional sound intensity sensor integrated on a single chip

Yntema, D. R., van Honschoten, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 23 Sep 2008, In : Journal of micromechanics and microengineering. 18, 2008/16200/11, p. 1-9 9 p., 10.1088/0960-1317/18/11/115004.

Research output: Contribution to journalArticleAcademicpeer-review

A MEMS-based gravity gradiometer for future planetary missions

Flokstra, J., Cuperus, R., Wiegerink, R. J. & van Essen, M. C., 24 Jun 2008, Proceedings Wolte-8. p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

60 Downloads (Pure)

Analysis of the angular sensitivity of an innovative particle velocity sensor

van Honschoten, J. W., Yntema, D. R., Wiegerink, R. J. & Elwenspoek, M. C., 2008, Proceedings of IEEE Sensors 2008. Lecce, Italy: Lecce University, p. 4 4 p. 10.1109/ICSENS.2008.4716381

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
67 Downloads (Pure)

An integrated three-dimensional sound-intensity-probe

Yntema, D. R., 3 Oct 2008, Enschede: University of Twente. 172 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

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Biomimetic aquatic hair sensors design

Izadi, N., Krijnen, G. J. M. & Wiegerink, R. J., 9 Apr 2008, The Sense of Contact, workshop sensortechnology. The Netherlands: STW, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

54 Downloads (Pure)

Design and fabrication process for artificial lateral line flow sensors

Izadi, N., Verlaat, B., Berenschot, J. W., Wiegerink, R. J., de Boer, M. J., Mogdans, J. & Krijnen, G. J. M., 12 Oct 2008, Proceedings of the International Conference on Sensor and Sensing in Biology and Engineering. NewYork: Engineering Conferences International, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
18 Downloads (Pure)

Fabrication scheme for dense aquatic flow sensor arrays

Izadi, N., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., Lammerink, T. S. J., Jansen, H. V. & Krijnen, G. J. M., Sep 2008, Proceedings of Eurosensors XXII. Germany: Verein Deutscher Ingenieure e.V. (VDI), p. 912-915 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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10 Downloads (Pure)

Flowmeter

Lammerink, T. S. J., Dijkstra, M., Haneveld, J. & Wiegerink, R. J., 15 Dec 2008, (Submitted) Patent No. US20080335045

Research output: PatentProfessional

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25 Citations (Scopus)
121 Downloads (Pure)

Highly sensitive micro coriolis mass flow sensor

Haneveld, J., Lammerink, T. S. J., Dijkstra, M., Droogendijk, H., Droogendijk, H., de Boer, M. J. & Wiegerink, R. J., 13 Jan 2008, MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. Piscataway: IEEE Computer Society, p. 920-923 4 p. 10.1109/MEMSYS.2008.4443807

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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2 Citations (Scopus)
49 Downloads (Pure)

Integrated 3D sound intensity sensor with four-wire particle velocity sensors

Yntema, D. R., van Honschoten, J. W. & Wiegerink, R. J., May 2008, Proceedings of DTIP 2008. Nice: EDA Publishing Association, p. 3 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

Interfacing of artificial hairs array for complex flow pattern recognition

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 28 Sep 2008, Micromechanics Europe Workshop 2008. Aachen: RWTH Aachen University, p. 129-132 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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13 Citations (Scopus)
51 Downloads (Pure)

Low-Drift flow sensor with zero-offset thermopile-based power feedback

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 9 Apr 2008, Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS. EDA Publisher, p. 4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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7 Citations (Scopus)
66 Downloads (Pure)

Low-Drift U-Shaped Thermopile Flow Sensor

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 26 Oct 2008, Sensors, 2008 IEEE. IEEE, p. 66-69 4 p. 10.1109/ICSENS.2008.4716384

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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2 Citations (Scopus)
36 Downloads (Pure)

MEMS-based Micro Coriolis mass flow sensor

Haneveld, J., Brouwer, D. M., Mehendale, A., Zwikker, R., Lammerink, T. S. J., de Boer, M. J. & Wiegerink, R. J., 18 May 2008, Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK: EUSPEN, p. 560-564

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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mass flow
microelectromechanical systems
sensors
liquid flow
silicon nitrides
58 Citations (Scopus)

Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 2 May 2008, In : Sensors and actuators. A: Physical. 143, 08332/1, p. 1-6 6 p., 10.1016/j.sna.2007.12.005.

Research output: Contribution to journalArticleAcademicpeer-review

Model-based optimization of tunable, biomimetic hair sensor arrays

Jaganatharaja, R. K., Izadi, N., Floris, J., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 8 Apr 2008, The Sense of Contact 10. Leusden: FHI - Federatie Van Technologiebranches, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

21 Downloads (Pure)

Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor

van Honschoten, J. W., Yntema, D. R., Wiegerink, R. J. & Elwenspoek, M. C., 2008, MME 2008. Aachen: RWTH Aachen University, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
13 Downloads (Pure)

Optimization Of Bio-inspired Hair Sensor Arrays

Jaganatharaja, R. K., Bruinink, C. M., Izadi, N., Lammerink, T. S. J., Wiegerink, R. J., Casas, J. & Krijnen, G. J. M., 12 Oct 2008, Sensors and Sensing in Biology and Engineering Conference. NewYork: Engineering Conferences International, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
13 Downloads (Pure)

Optimization Of Bio-inspired Hair Sensor Arrays

Jaganatharaja, R. K., Bruinink, C. M., Izadi, N., Lammerink, T. S. J., Wiegerink, R. J., Casas, J. & Krijnen, G. J. M., 15 Sep 2008, 34th International Conference on Micro & Nano Engineering. Athens, Greece.: Micro & Nano Engineering Committee, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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2007
4 Citations (Scopus)
49 Downloads (Pure)

Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening

Floris, J., Izadi, N., Jaganatharaja, R. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 11 Jun 2007, Proceedings of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Piscataway: IEEE, p. 1267-1270 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Adaptive, cricket-inspired artificial hair sensor arrays

Jaganatharaja, R. K., Izadi, N., Floris, J., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 19 Nov 2007, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht: Technology Foundation, p. 589-593 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)

Analysis of a three-dimensional particle velocity sensor for design optimization

van Honschoten, J. W., Yntema, D. R., Wiegerink, R. J. & Elwenspoek, M. C., 3 Mar 2007, In : Journal of micromechanics and microengineering. 17, WP07-01, p. S137-S146 9 p., 10.1088/0960-1317/17/7/S11.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
143 Downloads (Pure)

Analysis of the performance of a particle velocity sensor between two cylindrical obstructions

van Honschoten, J. W., Yntema, D. R., Svetovoy, V., Dijkstra, M., Wiegerink, R. J. & Elwenspoek, M. C., May 2007, In : Journal of the Acoustical Society of America. 121, WP07-01/5, p. 2711-2722 12 p., 10.1121/1.2717406.

Research output: Contribution to journalArticleAcademicpeer-review

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41 Citations (Scopus)

A versatile surface channel concept for microfluidic applications

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 5 Sep 2007, In : Journal of micromechanics and microengineering. 17, LNCS4549/10, p. 1971-1977 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
66 Downloads (Pure)

Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets

Wiegerink, R. J., Floris, J., Jaganatharaja, R. K., Izadi, N., Lammerink, T. S. J. & Krijnen, G. J. M., Oct 2007, Sensors, IEEE 2007. Los Alamitos: IEEE Computer Society, p. 1073-1076 4 p. 10.1109/ICSENS.2007.4388591

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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22 Citations (Scopus)
58 Downloads (Pure)

Biomimetic micromechanical adaptive flow-sensor arrays

Krijnen, G. J. M., Floris, J., Dijkstra, M., Lammerink, T. S. J. & Wiegerink, R. J., 2 May 2007, Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007". Bellingham: SPIE, p. 65920F 15 p. 10.1117/12.721807. (Proceedings of SPIE, Bioengineered and Bioinspired Systems; vol. 6592, no. WP07-01).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Downloads (Pure)

Choosing the most appropriate sensor for acoustic measurements

Yntema, D. R., Druyvesteyn, W. F. & Wiegerink, R. J., 2 Sep 2007, Proceedings of the 19th International Congress on Acoustics. Calvo-Manzano, A., Perez-Lopez, A. & Santiago, J. S. (eds.). Madrid: Spanish Acoustical Society, p. 1-6 6 p. (Loudspeakers and sound reinforcement; vol. 38, no. 06472).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

30 Citations (Scopus)
134 Downloads (Pure)

Cricket inspired flow-sensor arrays

Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J. & Casas, J., 28 Oct 2007, IEEE Sensors 2007. Piscataway, NJ 08855-1331: IEEE, p. 539-546 8 p. 10.1109/ICSENS.2007.4388455

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
13 Citations (Scopus)
53 Downloads (Pure)

Fully integrated three dimensional sound intensity sensor

Yntema, D. R., Wiegerink, R. J., van Honschoten, J. W. & Elwenspoek, M. C., 21 Jan 2007, Proceedings IEEE The Twentieth Annual International Conference on Micro Electro Mechanical Systems (MEMS 2007). Los Alamitos: IEEE Computer Society Press, p. 51-54 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
sound intensity
sensors
pressure sensors
sound pressure
microphones
20 Citations (Scopus)
82 Downloads (Pure)

Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 2007, Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on. Los Alamitos: IEEE Computer Society Press, p. 123-126 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
14 Downloads (Pure)

Model-based optimization and adaptivity of cricket-inspired biomimetic artificial hair sensor arrays

Jaganatharaja, R. K., Izadi, N., Floris, J., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 16 Sep 2007, MicroMechanics Europe Workshop 2007. Guimarães, Portugal: University of Minho, p. 203-206 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Trapping in Capacitive MEMS Structures

van Essen, M. C., Wiegerink, R. J., Wormeester, H., Rogalla, H. & Flokstra, J., 23 Jan 2007, p. -.

Research output: Contribution to conferencePosterOther research output

2006
81 Citations (Scopus)
62 Downloads (Pure)

A capacitive rf power sensor based on mems technology

Fernandez, L. J., Wiegerink, R. J., Flokstra, J., Flokstra, J., Sesé, J., Jansen, H. V. & Elwenspoek, M. C., 28 Apr 2006, In : Journal of micromechanics and microengineering. 16, IEEE Produ, p. S1099-S1107 9 p., 10.1088/0960-1317/16/7/001.

Research output: Contribution to journalArticleAcademicpeer-review

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19 Citations (Scopus)
59 Downloads (Pure)

A micromachined capacitive incremental position sensor: part 1. Analysis and simulations

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 10 May 2006, In : Journal of micromechanics and microengineering. 16, 10, p. S116-S124 9 p., 10.1088/0960-1317/16/6/S18.

Research output: Contribution to journalArticleAcademicpeer-review

File
13 Citations (Scopus)
9 Downloads (Pure)

A micromachined capacitive incremental position sensor: part 2. experimental assessment

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 10 May 2006, In : Journal of micromechanics and microengineering. 16, IEEE Produ/6, p. S125-S134 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
14 Downloads (Pure)

Analysis of packaging effects on the performance of the microflown

van Honschoten, J. W., Yntema, D. R., Dijkstra, M., Svetovoy, V., Wiegerink, R. J. & Elwenspoek, M. C., 26 Apr 2006, Proceedings of DTIP of MEMS & MOEMS 2206. Grenoble: TIMA Editions/DTIP, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Analysis of packaging effects on the performance of the microflown

van Honschoten, J. W., Yntema, D. R., Dijkstra, M., Svetovoy, V., Wiegerink, R. J. & Elwenspoek, M. C., 1 Jan 2006, Tima Proceedings 2006. Grenoble: TIMA Editions, p. - 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)
58 Downloads (Pure)

A three dimensional microflown

Yntema, D. R., van Honschoten, J. W., de Bree, H. E., Wiegerink, R. J. & Elwenspoek, M. C., 25 Jan 2006, Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos: IEEE Computer Society Press, p. 654-657 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
27 Downloads (Pure)

Biomimetic, distributed micromechanical flow-sensing

Krijnen, G. J. M., Dijkstra, M., van Baar, J. J. J., Lammerink, T. S. J. & Wiegerink, R. J., 2006, Proceedings of 20th eurosensors conference. Götenborg: Chalmers University of Technology, p. 1-2 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Charge trapping in cryogenically stable capacitive MEMS devices

van Essen, M. C., Fernandez, L. J., Galan, J. A., Wiegerink, R. J., Rogalla, H. & Flokstra, J., 21 Jun 2006, p. 185-191. 6 p.

Research output: Contribution to conferencePaperAcademic

21 Downloads (Pure)

Directional sensitivity of a three dimensional particle velocity sensor

van Honschoten, J. W., Yntema, D. R., Wiegerink, R. J. & Elwenspoek, M. C., 6 Sep 2006, Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems. Southampton: Southampton University Press, p. 201-204 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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3 Citations (Scopus)
12 Downloads (Pure)

Drag force actuated bistable microswitches for flow sensing

Kuipers, W. J., van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H. & Krijnen, G. J. M., 22 Jan 2006, Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos: IEEE Computer Society, p. 658-661 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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1 Citation (Scopus)
21 Downloads (Pure)

Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications

Fernandez, L. J., Berenschot, J. W., Wiegerink, R. J., Flokstra, J., Flokstra, J., Jansen, H. V. & Elwenspoek, M. C., 20 Mar 2006, In : Journal of micromechanics and microengineering. 16, IEEE Produ, p. 862-868 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

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Gravity gradient sensor technology for future planetary missions

Flokstra, J., Cuperus, R., Wiegerink, R. J., Sesé, J., Hemmes, H. K. & Sotin, C., 2006, Enschede: University of Twente. 150 p.

Research output: Book/ReportReportProfessional

123 Citations (Scopus)
9 Downloads (Pure)

MEMS based hair flow-sensors as model systems for acoustic perception studies

Krijnen, G. J. M., Dijkstra, M., van Baar, J. J., Shankar, S. S., Kuipers, W. J., de Boer, R. J. H., Altpeter, D., Lammerink, T. S. J. & Wiegerink, R., 25 Jan 2006, In : Nanotechnology. 17, p. S84-S89 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

MEMS
Acoustics
Sensors
Sensor arrays
Coulomb interactions
24 Downloads (Pure)

Micro coriolis flow sensor

Haneveld, J., Lammerink, T. S. J., Dijkstra, M. & Wiegerink, R. J., 2006, Proceedings of the NanoNed / MicroNed Symposium II. Eindhoven: Eindhoven University of Technology, p. 174 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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