1989 …2019
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Research Output 1989 2019

2006

Miniaturized Gravity Gradiometer

Cuperus, R., Flokstra, J., Wiegerink, R. J., Koop, R. & Selig, A., 2006, p. -.

Research output: Contribution to conferencePosterOther research output

Miniaturized gravity gradiometers

Cuperus, R., Flokstra, J., Wiegerink, R. J., Koop, R. & Selig, A., 16 Nov 2006, p. 175-175. 1 p.

Research output: Contribution to conferencePaperAcademic

58 Downloads (Pure)

Nano-flow thermal sensor applying dymamic w-2w sensing method

Dijkstra, M., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 3 Sep 2006, Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton: Southampton University Press, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Particle velocity sensors for separating multi incoherent sound (noise) sources

Yntema, D. R., Winkel, J. C., de Bree, H. E., Wiegerink, R. J. & Druyvesteyn, W. F., 22 Oct 2006, Proceedings of the 31st FISITA World Automotive Congress. Japan: Society of Automotive Engineers of Japan (JSAE) and FISITA, p. 1-3 3 p. (Technical programm; no. F2006D191).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Prospects for a Gradiometry Mission for High-resolution Mapping of the Martian Gravity Field

Koop, R., Bouman, J., Smit, M., Selig, A., Wiegerink, R. J., Flokstra, J., Vermeersen, B., Visser, P. & van den Berg, A., 18 Sep 2006, p. -.

Research output: Contribution to conferencePosterOther research output

Prospects for a Gradiometry Mission for High-resolution Mapping of the Martian Gravity Field

Koop, R., Bouman, J., Smit, M., Selig, A., Wiegerink, R. J., Flokstra, J., Vermeersen, B., Visser, P. & van den Berg, A., 28 Aug 2006, p. -.

Research output: Contribution to conferencePosterOther research output

60 Downloads (Pure)

Versatile surface channel concept for microfluidic applications

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 3 Sep 2006, Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton: Southampton University Press, p. 37-40 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2005
46 Downloads (Pure)

A capacitive RF power sensor based on MEMS technology

Fernandez, L. J., 17 Dec 2005, Enschede: University of Twente. 134 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

Open Access
File
MEMS
Sensors
Thermistors
Telecommunication systems
Thermocouples
109 Downloads (Pure)

A cmos compatible process for improved rf performance on highly doped substrates

Fernandez, L. J., Arz, U., Schubert, D., Berenschot, J. W., Wiegerink, R. J. & Flokstra, J., May 2005, Proceedings. 9th IEEE Workshop on Signal Propagation on Interconnects, 2005.. Los Alamitos: IEEE Computer Society Press, p. 167-170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Downloads (Pure)

Analysis Of Micromachined Capacitive Incremental Position Sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 2005, 16th MicroMechanics European Workshop. Amsterdam: Elsevier, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
12 Downloads (Pure)

Analysis Of Micromachined Capacitive Incremental Position Sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 4 Sep 2005, 16th MicroMechanics Europ Workshop. Göteborg: Elsevier, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
27 Citations (Scopus)
38 Downloads (Pure)

Arrays of cricket-inspired sensory hairs with capacitive motion detection

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H., de Boer, R. & Krijnen, G. J. M., 2005, Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems. Los Alamitos: IEEE Computer Society, p. 646-649 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
114 Citations (Scopus)
41 Downloads (Pure)

Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

Dijkstra, M., van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H. & Krijnen, G. J. M., 7 Jul 2005, In : Journal of micromechanics and microengineering. 15, 7, p. S132-S138 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

File

Charge trapping phenomena in capacitive MEMS-based sensors

van Essen, M. C., Wiegerink, R. J. & Flokstra, J., 8 Dec 2005, p. -.

Research output: Contribution to conferencePosterOther research output

45 Downloads (Pure)

Cryogenic imaging x-ray spectrometer

Wiegerink, R. J., van Baar, J. J. J., de Boer, J. H., Ridder, M. L., Bruijn, M. P., Germeau, A. & Hoevers, H. F. C., 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos: IEEE Computer Society, p. 56-59 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Design and fabrication of stable capacitive test structures to study charge trapping phenomena

van Essen, M. C., Wiegerink, R. J., Fernandez, L. J., Rogalla, H. & Flokstra, J., 4 Sep 2005.

Research output: Contribution to conferencePosterOther research output

Design and fabrication of stable capacitive test structures to study charge trapping phenomena

van Essen, M. C., Wiegerink, R. J., Fernandez, L. J., Rogalla, H. & Flokstra, J., 4 Sep 2005, p. 296-299. 4 p.

Research output: Contribution to conferencePaperAcademic

11 Citations (Scopus)
185 Downloads (Pure)

Fabrication of thick silicon nitride blocks for integration of rf devices

Fernandez, L. J., Berenschot, J. W., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. V. & Elwenspoek, M. C., 2 Mar 2005, In : Electronics letters. 41, 3, p. 1-2 2 p.

Research output: Contribution to journalArticleAcademicpeer-review

File

Gravity gradiometry using MEMS technology

Cuperus, R., Wiegerink, R. J. & Flokstra, J., 8 Dec 2005, p. -.

Research output: Contribution to conferencePosterOther research output

86 Downloads (Pure)

MEMS based hair flow-sensors as model systems for acoustic perception studies

Krijnen, G. J. M., Dijkstra, M., van Baar, J. J., de Boer, J. H., Lammerink, T. S. J. & Wiegerink, R., 20 Jul 2005, p. 1-4. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
File
hair
microelectromechanical systems
acoustics
sensors
crickets
11 Downloads (Pure)

Micromachined capacitive displacement sensor for long-range nano-positioning

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 28 Feb 2005, p. -. 1 p.

Research output: Contribution to conferencePosterOther research output

File
40 Citations (Scopus)
47 Downloads (Pure)

Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures

Hoevers, H. F. C., Ridder, M. L., Germeau, A., Bruijn, M. P., de Korte, P. A. J. & Wiegerink, R. J., 20 Jun 2005, In : Applied physics letters. 86, 10.1063/1.1949269, p. 251903 3 p., 10.1063/1.1949269.

Research output: Contribution to journalArticleAcademicpeer-review

File
22 Downloads (Pure)

Radio frequency power sensor based on mems technology with ultra low loss

Fernandez, L. J., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. V. & Elwenspoek, M. C., 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos: IEEE Computer Society Press, p. 191-194 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2004

Broad temperature range measurements on capacitive MEMS

van Essen, M. C., Fernandez, L. J., Sesé, J., Wiegerink, R. J., Rogalla, H. & Flokstra, J., 14 Dec 2004, p. -.

Research output: Contribution to conferencePosterOther research output

Capacitive flow sensors based on receptor hairs of crickets

Dijkstra, M., van Baar, J. J., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H. & Krijnen, G. J. M., 5 Sep 2004, Proceedings of MicroMechanics Europe Conference 2004. Leuven, Belgium, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

17 Citations (Scopus)
42 Downloads (Pure)

Capacitive long-range position sensor for microactuators

Kuijpers, A. A., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 2004, Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). Los Alamitos: IEEE, p. 544-547 4 p. (Micro Electro Mechanical Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Characterisation of capacitive MEMs at cryogenic temperatures

van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J. & Flokstra, J., 30 Sep 2004.

Research output: Contribution to conferencePosterOther research output

Characterisation of Capacitive MEMS at Cryogenic Temperatures

van Essen, M. C., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., Sesé, J. & Flokstra, J., 2004, Proceedings 6th European Workshop on Low Temperature Electronics, WOLTE-6: 23-25 June, 2004, ESTEC, Noordwijk, The Netherlands. Noordwijk: ESA, p. 137-143 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Characterization of capacitive MEMS at cryogenic temperatures

van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J. & Flokstra, J., 5 Sep 2004, MME 2004 Proceedings. p. 92-95 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Characterization of capacitive MEMS at cryogenic temperatures

van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J. & Flokstra, J., 5 Sep 2004, p. -.

Research output: Contribution to conferencePosterOther research output

Cricket inspired hairs on suspended membranes with capacitive displacement detection

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 30 Sep 2004, p. -.

Research output: Contribution to conferencePosterOther research output

8 Downloads (Pure)

Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 2004, p. 726-729.

Research output: Contribution to conferencePaperAcademic

File
44 Downloads (Pure)

Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Jansen, H. V., Flokstra, J. & Elwenspoek, M. C., 27 Jun 2004, p. 117-118. 2 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
12 Citations (Scopus)

Development of an array of transition edge sensors for application in X-ray astronomy

Bruijn, M. P., Baars, N. H. R., Bergmann Tiest, W. M., Germeau, A., Hoevers, H. F. C., de Korte, P. A. J., Mels, W. A., Ridder, M. L., Krouwer, E., van Baar, J. J. & Wiegerink, R. J., 2004, In : Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment. 520, 1-3, p. 443-445

Research output: Contribution to journalArticleAcademic

Astronomy
astronomy
Surface micromachining
Fabrication
X rays

Fabrication of artificial hairs with capactive read out for flow sensing

van Baar, J. J. J., de Boer, J. H., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 5 Sep 2004, p. -.

Research output: Contribution to conferencePosterOther research output

12 Downloads (Pure)

Measurements for a capacitive incremental position sensor for microactuators

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 2004, p. 760-763.

Research output: Contribution to conferencePaperAcademic

File

Optimization of a capacitive MEMS power sensor for radio frequency

Fernandez, L. J., Sesé, J., Wiegerink, R. J. & Flokstra, J., 5 Sep 2004, p. -.

Research output: Contribution to conferencePosterOther research output

14 Downloads (Pure)

Optimization of a capacitive MEMS power sensor for radio frequency applications

Fernandez, L. J., Sesé, J., Jansen, H. V., Wiegerink, R. J. & Flokstra, J., 5 Sep 2004, 15th MicroMechanics Europe Workshop, MME 2004. Leuven: MicroMechanics Europe, p. 257-260 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Superconducting Micro Electro Mechanical Systems

Sesé, J., Wiegerink, R. J. & Flokstra, J., 2 Feb 2004.

Research output: Contribution to conferencePosterOther research output

Superconducting Micro Electro Mechanical Systems

Sesé, J., Ebeling, R., Wiegerink, R. J. & Flokstra, J., 14 Sep 2004, Proceedings of the 6th European Conference on Applied Superconductivity. Andreone, S., Pepe, G. P., Cristiano, R. & Masullo, G. (eds.). Bristol: Institute of Physics Publishing, p. 3372-3378 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Superconducting Micro Mechanical Systems

Sesé, J., Flokstra, J. & Wiegerink, R. J., 2004, Proceedings 6th European Workshop on Low Temperature Electronics, WOLTE-6: 23-25 June, 2004, ESTEC, Noordwijk, The Netherlands. Noordwijk: ESA, p. 87-92 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2003
17 Citations (Scopus)

2d-finite-element simulations for long-range capacitive position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 13 Jun 2003, In : Journal of micromechanics and microengineering. 13, 4, p. S183-S189 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Capacitance
Sensors
Microactuators
Capacitance measurement
Periodic structures

Capacitance measurements for micromachined capacitive long-range position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 2003, Proceedings of Safe/SeSens Conference 2003. p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Capacitive rf power sensor based on MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Jansen, H., Flokstra, J. & Elwenspoek, M. C., 2 Jul 2003, p. -.

Research output: Contribution to conferencePosterOther research output

8 Citations (Scopus)
67 Downloads (Pure)

Development of arrays of transition edge sensors for application in X-ray astronomy

Bruijn, M. P., Bergmann Tiest, W. M., Hoevers, H. F. C., Krouwer, E., van der Kuur, J., Ridder, M. L., Moktadir, Z., Wiegerink, R. J., van Gelder, D. & Elwenspoek, M. C., 2003, Proceedings of PSD6 Conference. Amsterdam: Elsevier, p. 143-146 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Development of cryogenic microcalorimeter array for application in X-ray astronomy

Bruijn, M. P., Ridder, M. L., Krouwer, E., Hoevers, H. F. C., Wiegerink, R. J., van Baar, J. J. J. & Elwenspoek, M. C., 20 May 2003, Proceedings of the 4th ESA Round Table on Micro & Nano Technologies for Space Applications Statistics. Noordwijk: ESA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Citations (Scopus)
42 Downloads (Pure)

Fabrication of arrays of artificial hairs for complex flow pattern recognition

van Baar, J. J. J., Dijkstra, M., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Oct 2003, Proceedings of IEEE Sensors, 2003. Los Alamitos: IEEE Computer Society, p. 332-336 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
Surface micromachining
Flow patterns
Pattern recognition
Drag
Fabrication

High frequency power sensor based on MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Flokstra, J. & Elwenspoek, M. C., 2 Oct 2003, p. -.

Research output: Contribution to conferencePosterOther research output

15 Downloads (Pure)

Micromachined capacitive long-range displacement sensor

Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 1 Sep 2003, Proceedings of EuroSensors Conference 2003. Portugal, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Micromachined capacitive long-range displacement sensor

Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 2003, p. -.

Research output: Contribution to conferencePosterOther research output