1989 …2019
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Research Output 1989 2019

2003
7 Citations (Scopus)
3 Downloads (Pure)

Micromachined two dimensional resistor arrays for determination of gas parameters

van Baar, J. J. J., Verwey, W. B., Dijkstra, M., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M. C., Jun 2003, TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos: IEEE, p. 1606-1609 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

resistors
temperature distribution
gases
channel flow
thermal conductivity

Micromechanical systems for electrical applications

Fernandez, L. J., Sesé, J., Visser, E., Reitsema, J. M., de Jong, B., Wiegerink, R. J. & Flokstra, J., 12 Mar 2003, p. -.

Research output: Contribution to conferencePosterOther research output

Modelling and thermal characterization of an array of microcalorimeters at sub kelvin temperatures

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Krouwer, E., van Baar, J. J. J., Elwenspoek, M. C., Wiegerink, R. J., Kinnunen, K. & Pekola, J. P., 22 Oct 2003, Proceedings of IEEE sensors 2003 Conference. Toronto, Canada, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

13 Downloads (Pure)

Novel rf power sensor based on capacitive MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Jansen, H. V., Wiegerink, R. J. & Flokstra, J., 2 Nov 2003, p. 41-44. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File

Novel rf power sensor based on capacitive MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Jansen, H., Wiegerink, R. J. & Flokstra, J., 2 Nov 2003, p. -.

Research output: Contribution to conferencePosterOther research output

Out of plane artificial hairs for flow sensing

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 25 Nov 2003, Proceedings of Safe workshop 2003. Velthoven, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
47 Downloads (Pure)

Pirani pressure sensor with distributed temperature measurement

de Jong, B. R., Bula, W. P., Zalewski, D. R., van Baar, J. J. J. & Wiegerink, R. J., 22 Oct 2003, Proceedings of IEEE Sensors 2003. Piscataway: IEEE Computer Society, p. 718-722 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
pressure sensors
heaters
temperature measurement
Pirani gages
pressure gages

Radio frequency power sensor based on MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. & Elwenspoek, M. C., 10 Oct 2003, p. -.

Research output: Contribution to conferencePosterOther research output

33 Citations (Scopus)
43 Downloads (Pure)

Radio frequency power sensor based on MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Jansen, H. V., Flokstra, J., Flokstra, J. & Elwenspoek, M. C., Oct 2003, p. 549-552. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File

Superconducting Micro Electro Mechanical Systems

Sesé, J., Ebeling, R., Wiegerink, R. J. & Flokstra, J., 14 Sep 2003.

Research output: Contribution to conferencePosterOther research output

1 Citation (Scopus)
26 Downloads (Pure)

Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Baars, N. H. R., Krouwer, E., van Baar, J. J. J. & Wiegerink, R. J., 22 Oct 2003, p. 353-357. 5 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
2002
19 Citations (Scopus)

2D finite element simulations for long range capacitive position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 6 Oct 2002, Proceedings of MME 2002 Conference. Sinaia, Romenia, p. 181-184

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2D-finite element simulations for long range capacitive position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 30 Nov 2002, Proceedings of SeSens workshop. Veldhoven: Sesens, p. - 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

A TES x-ray microcalorimeter-array for imaging spectroscopy

de Korte, P. A. J., Hoevers, H. F. C., den Herder, J. W. A., Bleeker, J. A. M., Bergmann Tiest, W. M., Bruijn, M. P., Ridder, M. L., Wiegerink, R. J., Kaastra, J. S., van der Kuur, J. & Mels, W. A., 24 Aug 2002, X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy: 24-28 August, 2002, Waikoloa, Hawaii, USA. Truemper, J. & Tananbaum, H. D. (eds.). SPIE, p. 779-789 11 p. (Proceedings of SPIE; vol. 4851).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

calorimeters
sensors
spectroscopy
x rays
imaging spectrometers

Capacitive MEMS application for high-frequency power sensor

Fernandes, A. M., Sesé, J., Flokstra, J. & Wiegerink, R. J., 6 Oct 2002, Proceedings of MME 2002 conference. Sinaia, Romenia, p. 209-212

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Comb drives: versatile micro-structure for capacitive sensing and electrostatic actuation

Krijnen, G. J. M., Kuijpers, A. A., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 21 May 2002, p. -.

Research output: Contribution to conferencePosterOther research output

2 Citations (Scopus)
1 Downloads (Pure)

Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation

Krijnen, G. J. M., Kuijpers, A. A., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 21 May 2002, Proceedings of SPIE - The International Society for Optical Engineering. Culshaw, B. (ed.). Bellingham, USA: SPIE - The International Society for Optical Engineering, p. 201-206 6 p. 10.1117/12.508735. (Proceedings of SPIE; vol. 4763).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
53 Downloads (Pure)

Combined-Pirani/bending membrane-pressure sensor

van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., Berenschot, J. W., Krijnen, G. J. M. & Elwenspoek, M. C., 20 Jan 2002, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 328-331 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Distributed thermal micro sensors for fluid flow

van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., Berenschot, J. W., Krijnen, G. J. M. & Elwenspoek, M. C., 3 Oct 2002, p. -.

Research output: Contribution to conferencePosterOther research output

3 Citations (Scopus)
24 Downloads (Pure)

Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness

Moktadir, Z., Bruijn, M. P., Wiegerink, R. J., Elwenspoek, M. C., Ridder, M. & Mels, W. A., 12 Jun 2002, Proceedings of IEEE Sensors. Piscataway: IEEE, p. 1024-1027 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)
30 Downloads (Pure)

Pressure sensor based on distributed temperature sensing

van Baar, J. J. J., Wiegerink, R. J., Berenschot, J. W., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M. C., 12 Jun 2002, Proceedings of IEEE Sensors. Piscataway: IEEE Computer Society, p. 964-968 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2001

Flow sensing using the temperature distribution along a heated microbeam

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Lammerink, T. S. J., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht, The Netherlands: Kluwer, p. 13-18

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High capacity silicon load cells

Wiegerink, R. J., Zwijze, A. F. & Krijnen, G. J. M., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. (ed.). Dordrecht: Kluwer, p. 71-75

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

39 Downloads (Pure)

Mechanical microsensors

Elwenspoek, M. C. & Wiegerink, R. J., 2001, Germany: Springer. 295 p. (Microtechnology and MEMS, ISSN 1615-8326)

Research output: Book/ReportBookAcademic

File

Micro-actuator research

Krijnen, G. J. M., Deladi, S., Saravanan, S., Wiegerink, R. J., Lammerink, T. S. J., Tas, N. R., Elwenspoek, M. C. & Sarajlic, E., 11 Oct 2001, p. -.

Research output: Contribution to conferencePosterOther research output

Micro-actuator research at the Transducers Technology Group

Kuijpers, A. A., Deladi, S., Saravanan, S., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J., Berenschot, J. W., Elwenspoek, M. C. & Sarajlic, E., 11 Oct 2001, p. -.

Research output: Contribution to conferencePosterOther research output

Micro electro mechanical systems: case studies

Elwenspoek, M. C. & Wiegerink, R. J., 2001, SMART structures: applications and related technologies. Suleman, A. (ed.). Italy: Springer, p. - 358 p. (CISM International Centre for Mechanical Sciences; no. 429).

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

Micro electro mechanical systems: microelectromechanical systems

Elwenspoek, M. C. & Wiegerink, R. J., 2001, SMART structures, applications and related technologies. Suleman, A. (ed.). Italy: Springer, p. - 358 p. (CISM International Centre for Mechanical Sciences; no. 429).

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

Micro electro mechanical systems: principles of measurement mechanical quantities: transduction of deformation

Elwenspoek, M. C. & Wiegerink, R. J., 2001, SMART structures: applications and related technologies. Suleman, A. (ed.). Italy: Springer, p. - 358 p.

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

Micro electro mechanical systems: small and large, scaling

Elwenspoek, M. C. & Wiegerink, R. J., 2001, SMART structures: applications and related technologies. Suleman, A. (ed.). Italy: Springer, p. - 358 p.

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

47 Citations (Scopus)

Micromachined structures for thermal measurements of fluid and flow parameters

van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M. C., Jul 2001, In : Journal of micromechanics and microengineering. 11, 4, p. 311-318 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

Bruijn, M. P., Ridder, M., Hoevers, H. F. C., Bergmann, W. M., de Korte, P. A. J., Moktadir, Z., Wiegerink, R. J. & Berenschot, J. W., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 179-184

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

34 Downloads (Pure)

Pirani pressure sensor with distributed temperature sensing

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 11 Nov 2001, ASME International Mechanical Engineering Congress and Exposition, Proceedings. New York, NY, USA: American Society of Mechanical Engineers (ASME), p. 2689-2696 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)
326 Downloads (Pure)

Platinum patterning by a modified lift-off technique and its application in a silicon load cell

Tong, D. H., Zwijze, A. F., Berenschot, J. W., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 3 Apr 2001, In : Sensors and materials. 13, 4, p. 235-246 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

File

Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 10 Jun 2001, Proceedings of Transducers 2001. p. 1436-1439

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sensor research at the Transducers Technology Group

van Baar, J. J. J., van Honschoten, J. W., Moktadir, Z., Lammerink, T. S. J., Wiegerink, R. J., Berenschot, J. W. & Elwenspoek, M. C., 11 Oct 2001, p. -.

Research output: Contribution to conferencePosterOther research output

Temperature balance micro flow sensor system based on a free oscillating differential power controller

Lammerink, T. S. J. & Wiegerink, R. J., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 19-24

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2000
79 Downloads (Pure)

Characterization of platinum lift off technique

Tong, D. H., Zwijze, A. F., Berenschot, J. W., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 1 Dec 2000, 11 p. Eindhoven

Research output: Other contributionOther research output

File
27 Downloads (Pure)

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Tong, D. H. & Elwenspoek, M. C., 5 Nov 2000, Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, p. - 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Determination of fluid and flow parameters using heat transfer

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 27 Aug 2000, Proceedings of 14th European Conference on Solid-State Transducers, Eurosensors 2000. Kopenhagen, Denemarken, p. 375-376

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Downloads (Pure)

High force 10 kN piezoresistive silicon force sensor with output independent of force distribution

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Berenschot, J. W., de Boer, M. J. & Elwenspoek, M. C., 18 Sep 2000, Proceedings of SPIE - The International Society for Optical Engineering. Peeters, E. & Paul, O. (eds.). Bellingham, WA, USA: SPIE, p. 47-58 12 p. (Proceedings of SPIE; vol. 4176).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
4 Citations (Scopus)
3 Downloads (Pure)

Low-cost piezoresistive silicon load cell independent of force distribution

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., Jun 2000, In : Journal of micromechanics and microengineering. 10, 2, p. 200-203 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Micro-machined structures for thermal measurement of fluid and flow parameters

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 3 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000 Conference. Uppsala, Sweden, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micromachined structures for thermal measurements of fluid and flow parameters

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 12 Oct 2000, Enschede

Research output: Other contributionOther research output

Quasi monolithic load cell

Wiegerink, R. J., Zwijze, A. F., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 27 Sep 2000, (Submitted) Patent No. 1e Nederland, Priority date 27 Sep 2000

Research output: PatentProfessional

11 Citations (Scopus)
1 Downloads (Pure)

Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 20 Jan 2000, Proceedings of the 3rd symposium on Microsystems in practice. Utrecht, p. - 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1999
30 Downloads (Pure)

Low-cost piezoresistive silicon load cell independent of force distribution

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 27 Sep 1999, Proceedings of Micromechanics Europe '99 Conference. Gif-sur-Yvette, France, p. 81-84 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)

Low creep and hysteresis load cell based on a force-to-fluid pressure transformation

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., Dec 1999, In : Sensors and actuators. A: Physical. 78, 2, p. 74-80 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Wiegerink, R. J., Zwijze, A. F., Mateman, R., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 12 Sep 1999, Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII). Bartek, M. (ed.). Den Haag: Delft University of Technology, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review