1989 …2019
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Research Output 1989 2019

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2019

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion

High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology

Veltkamp, H. W., Zhao, Y., De Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lotters, J. C., 17 Oct 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. IEEE, p. 648-651 4 p. 8870667

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
Fluidics
heaters
Silicon
Heating
2017
94 Downloads (Pure)

Coriolis mass flow and density sensor actuation using a phase-locked loop

Alveringh, D., Schut, T., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 102-105 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Phase locked loops
Sensors
Electric potential
Electronic equipment
Nitrogen
83 Downloads (Pure)

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability
74 Downloads (Pure)

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry
11 Citations (Scopus)
220 Downloads (Pure)

Nano-G accelerometer using geometric anti-springs

Boom, B. A., Bertolini, A., Hennes, E., Brookhuis, R. A., Wiegerink, R. J., Brand, van den, J. F. J., Beker, M. G., Oner, A. & Wees, van, D., 22 Jan 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 33-36 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Accelerometers
Stiffness
Leaf springs
Mechanics
Bandwidth
1 Citation (Scopus)

Resistive pressure sensors integrated with a Coriolis mass flow sensor

Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 18 Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, p. 1167-1170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Pressure sensors
Sensors
Pressure drop
Electronic equipment
Viscosity
111 Downloads (Pure)

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
Fluidics
Microfluidics
Sensors
Pressure sensors
Resonators
2016
1 Citation (Scopus)
1 Downloads (Pure)

Single-chip mass flow controller with integrated Coriolis flow sensor and proportional control valve

Groenesteijn, J., Alveringh, D., Groen, M., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 788-791 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
1 Downloads (Pure)

Three-axis force-torque sensor with fully differential capacitive readout

Brookhuis, R. A., Sanders, R. G. P., Sikkens, B. N. A. & Wiegerink, R. J., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA: IEEE, p. 885-888 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Towards nanogram per second Coriolis mass flow sensing

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 193-196 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Vortex generation and sensing in microfabricated surface channels

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 24 Jan 2016, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Shanghai: IEEE, p. 812-815 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2015
33 Downloads (Pure)

A 2D particle velocity sensor with minimal flow-disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 1 Nov 2015, Proceedings IEEE Sensors 2015. Piscataway: IEEE, p. 1307-1310 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
12 Downloads (Pure)

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague: MNE 2015, p. - 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
mass flow
tuning
actuation
sensitivity
sensors
5 Citations (Scopus)

Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Lötters, J. C., Groenesteijn, J., van der Wouden, E. J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 21 Jun 2015, Proceedings of the18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 1798-1801 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

20 Downloads (Pure)

In-line picogram-resolution microchannel resonator for protein adsorption measurements operating at atmospheric pressure

Groenesteijn, J., Steenwelle, R. J. A., Steenwelle, R. J. A., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: University of Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
5 Citations (Scopus)

Inline pressure sensing mechanisms enabling scalable range and sensitivity

Alveringh, D., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 21 Jun 2015, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., p. 1187-1190 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

13 Downloads (Pure)

Readout circuit for capacitance ratio measurement

Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: Universiteit Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2014
51 Downloads (Pure)

A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system

Groenesteijn, J., Dijkstra, M., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 8 Oct 2014, Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universität Freiburg, p. 21-24 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
6 Citations (Scopus)
1 Downloads (Pure)

A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer

Alveringh, D., Brookhuis, R. A., Wiegerink, R. J. & Krijnen, G. J. M., 26 Jan 2014, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. San Francisco: The Printing House, Inc., p. 680-683 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Torque
Sensors
Silicon
Reactive ion etching
Crosstalk
9 Citations (Scopus)
34 Downloads (Pure)

An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out

Groenesteijn, J., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Krijnen, G. J. M., 26 Jan 2014, Technical Digest of the 27th IEEE International Conference on Micro Electro Mechanical Systems. Los Alamitos, CA, USA: The Printing House, Inc., p. 696-699 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
9 Citations (Scopus)
15 Downloads (Pure)

Integrated multi-parameter flow measurement system

Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 26 Jan 2014, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 975-978 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)

Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation

Dijkstra, M., Ma, K., de Boer, M. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 26 Jan 2014, MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE, p. 999-1002 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Modelling of a micro coriolis mass flow sensor for sensitivity improvements

Groenesteijn, J., van de Ridder, B., Lötters, J. C. & Wiegerink, R. J., 2 Nov 2014, Proceedings of the Thirteenth IEEE Sensors Conference 2014. Valencia, Spain, p. 954-957

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Real-time composition determination of gas mixtures

Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 2 Nov 2014, Proceedings of IEEE Sensors 2014. Valencia, Spain: IEEE Instrumentation & Measurement Society, p. 1640-1643 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

240 Downloads (Pure)

Towards system-level modeling and characterization of components for intravenous therapy

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 8 Oct 2014, Proceedings of the 2nd International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universitat Freiburg, p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2013
6 Citations (Scopus)

A crossed-wire 2-dimensional acoustic particle velocity sensor

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Nov 2013, IEEE Sensors 2013. USA: IEEE Computer Society, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

A micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Groen, M., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 27 Oct 2013, Proceedings of MicroTAS 2013. Stoughton: The Printing House, Inc., p. 1469 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

A novel two dimensional particle velocity sensor

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 2 Jun 2013, International Congress on Acoustics. Acoustical Society of America through the American Institute of Physics, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Design, fabrication and characterization of a suspended plate mechano-optical modulator

Syed Nawazuddin, M. B., de Boer, M. J., Berenschot, J. W., Ma, K., Elwenspoek, M. C. & Wiegerink, R. J., 20 Jan 2013, 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, p. 560-563 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system

Groenesteijn, J., Zhang, H-N., Zhang, H., Tiggelaar, R. M., Lammerink, T. S. J., Lötters, J. C., Gardeniers, J. G. E. & Wiegerink, R. J., 27 Oct 2013, Proceedings of MicroTAS 2013. Stoughton, USA: Printing House Inc., p. T.042c 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
82 Downloads (Pure)

Integrated micro Wobbe index meter towards on-chip energy content measurement

Lötters, J. C., Lammerink, T. S. J., Pap, M. G., Sanders, R. G. P., de Boer, M. J., Mouris, A. J. & Wiegerink, R. J., 22 Jan 2013, Technical Digest of the 26th IEEE International Conference on Micro Electro Mechanical Systems. Taipei, Taiwan: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 965-968 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
4 Citations (Scopus)
1 Downloads (Pure)

Large range multi-axis fingertip force sensor

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., Ma, K. & Krijnen, G. J. M., 16 Jun 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA: IEEE Electron Devices Society, p. 2737-2740 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Downloads (Pure)

Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system

Lötters, J. C., Groenesteijn, J., Dijkstra, M., Droogendijk, H., Lammerink, T. S. J. & Wiegerink, R. J., 14 May 2013, Proceedings of Sensor 2013. Wunstorf, Germany: AMA Services GmbH, p. 508-512 5 p. (Proceedings AMA conferences 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2 Citations (Scopus)

Parametric amplification in a micro Coriolis mass flow sensor: reduction of power dissipation without loss of sensitivity

Groenesteijn, J., Droogendijk, H., Wiegerink, R. J., Lammerink, T. S. J., Lötters, J. C., Sanders, R. G. P. & Krijnen, G. J. M., 4 Nov 2013, Proceedings of IEEE Sensors 2013. USA: IEEE Circuits & Systems Society, p. 1626-1629 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 3 Nov 2013, IEEE Sensors 2013. Los Alamitos, CA, USA: IEEE, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2012
91 Downloads (Pure)

Compact mass flow meter based on a micro Coriolis flow sensor

Sparreboom, W., Katerberg, M. R., Lammerink, T. S. J., Postma, F. M., Haneveld, J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 10 Oct 2012, Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. 30-33 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File

Improved dicing method for the microflown particle velocity sensor

Pjetri, O., Wiegerink, R. J., Jansen, H. V. & Krijnen, G. J. M., 2012, 23rd Micromechanics And Microsystems Europe Workshop, 2012. Ilmenau: Ilmenau University of Technology, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Integrated wafer-through fluidic connection for surface channel technology

Groenesteijn, J., de Boer, M. J., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 9 Sep 2012, Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop, MME 2012. Ilmenau, Germany: Verlag ISLE, Betriebsstatte des ISLE e.V., p. A03# 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

40 Downloads (Pure)

Micro Coriolis mass flow sensor for chemical micropropulsion systems

Wiegerink, R. J., Lammerink, T. S. J., Groenesteijn, J., Dijkstra, M. & Lötters, J. C., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede: Universiteit Twente, p. 107-110 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
30 Downloads (Pure)

PowerGlove, Concepts and current results

Veltink, P. H., Kortier, H. G., Schepers, H. M., Sluiter, V. IJ., Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 18 Jul 2012, Proceedings of XII International Symposium on 3D Analysis of Human Movement, DAHM 2012. Leardini, A. & Stagni, R. (eds.). Bologna, Italy: Universita di Bologna, p. 42-45 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
8 Citations (Scopus)
1 Downloads (Pure)

Scalable six-axis force-torque sensor with a large range for biomechanical applications

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J. & de Boer, M. J., 29 Jan 2012, Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. USA: IEEE Computer Society, p. 595-598 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Downloads (Pure)

The application of micro- and nanofluidics in Wobbe index meters

Wiegerink, R. J., Lötters, J. C., Lammerink, T. S. J., Pap, M. G. & Mouris, A. J., 10 Oct 2012, Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. 166-167 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Towards a microvalve for proportional control of mass flow

Groen, M., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede: University of Twente, p. 148-151 4 p. (Micromachines).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Wafer-through access trenches for surface channel technology

Groenesteijn, J., de Boer, M. J., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2011
23 Downloads (Pure)

Advancements in Biomimetic Hair Flow-Sensor Arrays

Dagamseh, A. M. K., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., Jun 2011, Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Norway: Vestfold University College, Norway, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2 Citations (Scopus)
1 Downloads (Pure)

Force sensor for measuring power transfer between the human body and the environment

Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J. & Elwenspoek, M. C., 6 Jun 2011, 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA: IEEE, p. 2042-2045 4 p. (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; vol. 16).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
2 Downloads (Pure)

Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure

Wiegerink, R. J., Lammerink, T. S. J., Haneveld, J., Hageman, T. A. G. & Lötters, J. C., Jan 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). Piscataway, NJ: IEEE, p. 1135-1138 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

mass flow
atmospheric pressure
sensors
chips
electrodes
21 Downloads (Pure)

Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

Groenesteijn, J., Lammerink, T. S. J., Lötters, J. C., Haneveld, J. & Wiegerink, R. J., 19 Jun 2011, Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Toensberg, Norway: Micromechanics and Micro systems Europe, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
7 Citations (Scopus)

Single chip flow sensing system with a dynamic flow range of more than 4 decades

Lammerink, T. S. J., Lötters, J. C., Wiegerink, R. J., Groenesteijn, J. & Haneveld, J., 5 Jun 2011, Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE, p. 890-893 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sensors
Hot Temperature