1989 …2019
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Research Output 1989 2019

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Conference contribution
2006
24 Downloads (Pure)

Micro coriolis flow sensor

Haneveld, J., Lammerink, T. S. J., Dijkstra, M. & Wiegerink, R. J., 2006, Proceedings of the NanoNed / MicroNed Symposium II. Eindhoven: Eindhoven University of Technology, p. 174 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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53 Downloads (Pure)

Nano-flow thermal sensor applying dymamic w-2w sensing method

Dijkstra, M., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 3 Sep 2006, Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton: Southampton University Press, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Particle velocity sensors for separating multi incoherent sound (noise) sources

Yntema, D. R., Winkel, J. C., de Bree, H. E., Wiegerink, R. J. & Druyvesteyn, W. F., 22 Oct 2006, Proceedings of the 31st FISITA World Automotive Congress. Japan: Society of Automotive Engineers of Japan (JSAE) and FISITA, p. 1-3 3 p. (Technical programm; no. F2006D191).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

56 Downloads (Pure)

Versatile surface channel concept for microfluidic applications

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 3 Sep 2006, Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton: Southampton University Press, p. 37-40 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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2005
102 Downloads (Pure)

A cmos compatible process for improved rf performance on highly doped substrates

Fernandez, L. J., Arz, U., Schubert, D., Berenschot, J. W., Wiegerink, R. J. & Flokstra, J., May 2005, Proceedings. 9th IEEE Workshop on Signal Propagation on Interconnects, 2005.. Los Alamitos: IEEE Computer Society Press, p. 167-170 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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9 Downloads (Pure)

Analysis Of Micromachined Capacitive Incremental Position Sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 2005, 16th MicroMechanics European Workshop. Amsterdam: Elsevier, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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12 Downloads (Pure)

Analysis Of Micromachined Capacitive Incremental Position Sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 4 Sep 2005, 16th MicroMechanics Europ Workshop. Göteborg: Elsevier, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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27 Citations (Scopus)
37 Downloads (Pure)

Arrays of cricket-inspired sensory hairs with capacitive motion detection

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H., de Boer, R. & Krijnen, G. J. M., 2005, Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems. Los Alamitos: IEEE Computer Society, p. 646-649 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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42 Downloads (Pure)

Cryogenic imaging x-ray spectrometer

Wiegerink, R. J., van Baar, J. J. J., de Boer, J. H., Ridder, M. L., Bruijn, M. P., Germeau, A. & Hoevers, H. F. C., 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos: IEEE Computer Society, p. 56-59 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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22 Downloads (Pure)

Radio frequency power sensor based on mems technology with ultra low loss

Fernandez, L. J., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. V. & Elwenspoek, M. C., 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos: IEEE Computer Society Press, p. 191-194 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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2004

Capacitive flow sensors based on receptor hairs of crickets

Dijkstra, M., van Baar, J. J., Wiegerink, R. J., Lammerink, T. S. J., de Boer, J. H. & Krijnen, G. J. M., 5 Sep 2004, Proceedings of MicroMechanics Europe Conference 2004. Leuven, Belgium, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

17 Citations (Scopus)
41 Downloads (Pure)

Capacitive long-range position sensor for microactuators

Kuijpers, A. A., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 2004, Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). Los Alamitos: IEEE, p. 544-547 4 p. (Micro Electro Mechanical Systems).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Characterisation of Capacitive MEMS at Cryogenic Temperatures

van Essen, M. C., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., Sesé, J. & Flokstra, J., 2004, Sixth Europ. Workshop on LT Electronics WOLTE-6. Noordwijk: ESTEC, p. 137-143 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Characterization of capacitive MEMS at cryogenic temperatures

van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J. & Flokstra, J., 5 Sep 2004, MME 2004 Proceedings. p. 92-95 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

13 Downloads (Pure)

Optimization of a capacitive MEMS power sensor for radio frequency applications

Fernandez, L. J., Sesé, J., Jansen, H. V., Wiegerink, R. J. & Flokstra, J., 5 Sep 2004, 15th MicroMechanics Europe Workshop, MME 2004. Leuven: MicroMechanics Europe, p. 257-260 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Superconducting Micro Electro Mechanical Systems

Sesé, J., Ebeling, R., Wiegerink, R. J. & Flokstra, J., 14 Sep 2004, Proceedings of the 6th European Conference on Applied Superconductivity. Andreone, S., Pepe, G. P., Cristiano, R. & Masullo, G. (eds.). Bristol: Institute of Physics Publishing, p. 3372-3378 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Superconducting Micro Mechanical Systems

Sesé, J., Flokstra, J. & Wiegerink, R. J., 2004, Sixth Europ. Workshop on LT Electronics. Noordwijk: ESTEC, p. 87-92 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2003

Capacitance measurements for micromachined capacitive long-range position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 2003, Proceedings of Safe/SeSens Conference 2003. p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)
60 Downloads (Pure)

Development of arrays of transition edge sensors for application in X-ray astronomy

Bruijn, M. P., Bergmann Tiest, W. M., Hoevers, H. F. C., Krouwer, E., van der Kuur, J., Ridder, M. L., Moktadir, Z., Wiegerink, R. J., van Gelder, D. & Elwenspoek, M. C., 2003, Proceedings of PSD6 Conference. Amsterdam: Elsevier, p. 143-146 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Development of cryogenic microcalorimeter array for application in X-ray astronomy

Bruijn, M. P., Ridder, M. L., Krouwer, E., Hoevers, H. F. C., Wiegerink, R. J., van Baar, J. J. J. & Elwenspoek, M. C., 20 May 2003, Proceedings of the 4th ESA Round Table on Micro & Nano Technologies for Space Applications Statistics. Noordwijk: ESA, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Citations (Scopus)
42 Downloads (Pure)

Fabrication of arrays of artificial hairs for complex flow pattern recognition

van Baar, J. J. J., Dijkstra, M., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Oct 2003, Proceedings of IEEE Sensors, 2003. Los Alamitos: IEEE Computer Society, p. 332-336 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Surface micromachining
Flow patterns
Pattern recognition
Drag
Fabrication
15 Downloads (Pure)

Micromachined capacitive long-range displacement sensor

Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 1 Sep 2003, Proceedings of EuroSensors Conference 2003. Portugal, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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7 Citations (Scopus)
3 Downloads (Pure)

Micromachined two dimensional resistor arrays for determination of gas parameters

van Baar, J. J. J., Verwey, W. B., Dijkstra, M., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M. C., Jun 2003, TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos: IEEE, p. 1606-1609 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

resistors
temperature distribution
gases
channel flow
thermal conductivity

Modelling and thermal characterization of an array of microcalorimeters at sub kelvin temperatures

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Krouwer, E., van Baar, J. J. J., Elwenspoek, M. C., Wiegerink, R. J., Kinnunen, K. & Pekola, J. P., 22 Oct 2003, Proceedings of IEEE sensors 2003 Conference. Toronto, Canada, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Out of plane artificial hairs for flow sensing

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 25 Nov 2003, Proceedings of Safe workshop 2003. Velthoven, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
45 Downloads (Pure)

Pirani pressure sensor with distributed temperature measurement

de Jong, B. R., Bula, W. P., Zalewski, D. R., van Baar, J. J. J. & Wiegerink, R. J., 22 Oct 2003, Proceedings of IEEE Sensors 2003. Piscataway: IEEE Computer Society, p. 718-722 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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pressure sensors
heaters
temperature measurement
Pirani gages
pressure gages
2002
19 Citations (Scopus)

2D finite element simulations for long range capacitive position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 6 Oct 2002, Proceedings of MME 2002 Conference. Sinaia, Romenia, p. 181-184

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2D-finite element simulations for long range capacitive position sensor

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 30 Nov 2002, Proceedings of SeSens workshop. Veldhoven: Sesens, p. - 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

A TES x-ray microcalorimeter-array for imaging spectroscopy

de Korte, P. A. J., Hoevers, H. F. C., den Herder, J. W. A., Bleeker, J. A. M., Bergmann Tiest, W. M., Bruijn, M. P., Ridder, M. L., Wiegerink, R. J., Kaastra, J. S., van der Kuur, J. & Mels, W. A., 24 Aug 2002, X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy: 24-28 August, 2002, Waikoloa, Hawaii, USA. Truemper, J. & Tananbaum, H. D. (eds.). SPIE, p. 779-789 11 p. (Proceedings of SPIE; vol. 4851).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

calorimeters
sensors
spectroscopy
x rays
imaging spectrometers

Capacitive MEMS application for high-frequency power sensor

Fernandes, A. M., Sesé, J., Flokstra, J. & Wiegerink, R. J., 6 Oct 2002, Proceedings of MME 2002 conference. Sinaia, Romenia, p. 209-212

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation

Krijnen, G. J. M., Kuijpers, A. A., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 21 May 2002, Proceedings of SPIE - The International Society for Optical Engineering. Culshaw, B. (ed.). Bellingham, USA: SPIE - The International Society for Optical Engineering, p. 201-206 6 p. 10.1117/12.508735. (Proceedings of SPIE; vol. 4763).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
52 Downloads (Pure)

Combined-Pirani/bending membrane-pressure sensor

van Baar, J. J. J., Wiegerink, R. J., Lammerink, T. S. J., Berenschot, J. W., Krijnen, G. J. M. & Elwenspoek, M. C., 20 Jan 2002, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society, p. 328-331 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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3 Citations (Scopus)
22 Downloads (Pure)

Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness

Moktadir, Z., Bruijn, M. P., Wiegerink, R. J., Elwenspoek, M. C., Ridder, M. & Mels, W. A., 12 Jun 2002, Proceedings of IEEE Sensors. Piscataway: IEEE, p. 1024-1027 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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1 Citation (Scopus)
29 Downloads (Pure)

Pressure sensor based on distributed temperature sensing

van Baar, J. J. J., Wiegerink, R. J., Berenschot, J. W., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M. C., 12 Jun 2002, Proceedings of IEEE Sensors. Piscataway: IEEE Computer Society, p. 964-968 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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2001

Flow sensing using the temperature distribution along a heated microbeam

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Lammerink, T. S. J., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht, The Netherlands: Kluwer, p. 13-18

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

High capacity silicon load cells

Wiegerink, R. J., Zwijze, A. F. & Krijnen, G. J. M., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. (ed.). Dordrecht: Kluwer, p. 71-75

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters

Bruijn, M. P., Ridder, M., Hoevers, H. F. C., Bergmann, W. M., de Korte, P. A. J., Moktadir, Z., Wiegerink, R. J. & Berenschot, J. W., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 179-184

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

30 Downloads (Pure)

Pirani pressure sensor with distributed temperature sensing

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 11 Nov 2001, ASME International Mechanical Engineering Congress and Exposition, Proceedings. New York, NY, USA: American Society of Mechanical Engineers (ASME), p. 2689-2696 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 10 Jun 2001, Proceedings of Transducers 2001. p. 1436-1439

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Temperature balance micro flow sensor system based on a free oscillating differential power controller

Lammerink, T. S. J. & Wiegerink, R. J., 14 May 2001, Proceedings of Sensor Technology 2001 Conference. Elwenspoek, M. C. & Elwenspoek, M. (eds.). Dordrecht: Kluwer, p. 19-24

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2000
27 Downloads (Pure)

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Tong, D. H. & Elwenspoek, M. C., 5 Nov 2000, Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, p. - 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Determination of fluid and flow parameters using heat transfer

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 27 Aug 2000, Proceedings of 14th European Conference on Solid-State Transducers, Eurosensors 2000. Kopenhagen, Denemarken, p. 375-376

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

16 Downloads (Pure)

High force 10 kN piezoresistive silicon force sensor with output independent of force distribution

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Berenschot, J. W., de Boer, M. J. & Elwenspoek, M. C., 18 Sep 2000, Proceedings of SPIE - The International Society for Optical Engineering. Peeters, E. & Paul, O. (eds.). Bellingham, WA, USA: SPIE, p. 47-58 12 p. (Proceedings of SPIE; vol. 4176).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Micro-machined structures for thermal measurement of fluid and flow parameters

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 3 Oct 2000, Proceedings of MicroMechanics Europe (MME) 2000 Conference. Uppsala, Sweden, p. - 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Resistive actuator sensor structures for the determination of fluid and flow parameters - first results

van Baar, J. J. J., Wiegerink, R. J., Krijnen, G. J. M. & Elwenspoek, M. C., 20 Jan 2000, Proceedings of the 3rd symposium on Microsystems in practice. Utrecht, p. - 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1999
26 Downloads (Pure)

Low-cost piezoresistive silicon load cell independent of force distribution

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 27 Sep 1999, Proceedings of Micromechanics Europe '99 Conference. Gif-sur-Yvette, France, p. 81-84 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Wiegerink, R. J., Zwijze, A. F., Mateman, R., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 12 Sep 1999, Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII). Bartek, M. (ed.). Den Haag: Delft University of Technology, p. -

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
38 Downloads (Pure)

Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Wiegerink, R. J., Zwijze, A. F., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 17 Jan 1999, Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE, p. 558-563 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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1998
11 Downloads (Pure)

Design and realisation of a quasi monolithic silicon load cell

Wensink, H., Wiegerink, R. J., Zwijze, A. F., de Boer, M. J. & Elwenspoek, M. C., 3 Jun 1998, Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, p. 190-193

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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11 Citations (Scopus)
29 Downloads (Pure)

First micromachined silicon load cell for loads up to 1000 kg

Wensink, H., de Boer, M. J., Wiegerink, R. J., Zwijze, A. F. & Elwenspoek, M. C., 20 Sep 1998, Proceedings Micromachined Devices and Components IV. SPIE, p. 424-430

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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