1989 …2019
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Research Output 1989 2019

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Abstract
2019
12 Downloads (Pure)

A short post-processing method for high aspect ratio trenches after Bosch etching

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019. 1 p.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Aspect ratio
Etching
Cleaning
Processing
Vapors
7 Downloads (Pure)

Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels

Zhao, Y., Veltkamp, H-W., Schut, T. V. P., Groenesteijn, J., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 23 Sep 2019.

Research output: Contribution to conferenceAbstractAcademic

Open Access
File
Microfluidics
Electrodes
Tuning
Sensors

Towards a miniaturized Wobbe index meter, an essential piece of equipment in the future?

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 9 Oct 2019, p. 30-31. 2 p.

Research output: Contribution to conferenceAbstractProfessional

2017
57 Downloads (Pure)

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers
83 Downloads (Pure)

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching
2011
7 Downloads (Pure)

Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades

Lötters, J. C., Lammerink, T. S. J., Groenesteijn, J., Haneveld, J. & Wiegerink, R. J., 15 Nov 2011, p. 1-1. 1 p.

Research output: Contribution to conferenceAbstractOther research output

File
Coriolis force
Resistors
Sensors
Lorentz force
Microchannels
9 Downloads (Pure)

Optimization of the Lorentz Force Actuation for a micro Coriolis mass flow sensor

Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., Haneveld, J. & Lötters, J. C., 15 Nov 2011, p. 1-1. 1 p.

Research output: Contribution to conferenceAbstractOther research output

File
Lorentz force
Sensors
Magnetic fields
Permanent magnets