1989 …2019
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Research Output 1989 2019

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Paper
2018
1 Citation (Scopus)
108 Downloads (Pure)

Micro Coriolis mass flow sensor driven by integrated PZT thin film actuators

Zeng, Y., Groenesteijn, J., Alveringh, D., Steenwelle, R. J. A., Ma, K., Wiegerink, R. J. & Lötters, J. C., 21 Jan 2018.

Research output: Contribution to conferencePaperAcademicpeer-review

File
mass flow
actuators
actuation
sensors
thin films
2017
67 Downloads (Pure)

Micro Coriolis mass flow sensor driven by external piezo ceramic

Zeng, Y., Groenesteijn, J., Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, p. 45-48.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
File
mass flow
ceramics
sensors
vibration meters
chips

Micro Coriolis mass flow sensor with integrated resistive pressure sensors

Groenesteijn, J., Alveringh, D., Schut, T., Wiegerink, R. J., Sparreboom, W. & Lötters, J. C., 4 Oct 2017, p. 16-19. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
Pressure sensors
Sensors
Pressure drop
Viscosity
Fluids
2014
40 Downloads (Pure)

Modelling of a micro Coriolis mass flow sensor for sensitivity improvement

Groenesteijn, J., van de Ridder, B., Lötters, J. C. & Wiegerink, R. J., 4 Nov 2014, p. 954-957. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
2012
16 Downloads (Pure)

Micro Coriolis mass flow sensor for chemical micropropulsion systems

Wiegerink, R. J., Lammerink, T. S. J., Groenesteijn, J., Dijkstra, P. J. & Lötters, J. C., 15 Oct 2012. 1 p.

Research output: Contribution to conferencePaperAcademic

File
2010

MEMS based gravimeters and gravity gradiometers

Cuperus, R., Abelmann, L. (ed.), Groenland, J. P. J. (ed.), Flokstra, F. F., van Honschoten, J. W. (ed.), Wiegerink, R. J., Verputten, H. (ed.) & Flokstra, J., 26 Sep 2010, p. 189-192.

Research output: Contribution to conferencePaperAcademic

2009
28 Downloads (Pure)

Gravity gradiometer system for Earth Exploration

Cuperus, R., Flokstra, F. F., Droogendijk, H., Wiegerink, R. J., Flokstra, J. & Flokstra, J., Nov 2009. 1 p.

Research output: Contribution to conferencePaperAcademic

File
2006

Charge trapping in cryogenically stable capacitive MEMS devices

van Essen, M. C., Fernandez, L. J., Galan, J. A., Wiegerink, R. J., Rogalla, H. & Flokstra, J., 21 Jun 2006, p. 185-191. 6 p.

Research output: Contribution to conferencePaperAcademic

Miniaturized gravity gradiometers

Cuperus, R., Flokstra, J., Wiegerink, R. J., Koop, R. & Selig, A., 16 Nov 2006, p. 175-175. 1 p.

Research output: Contribution to conferencePaperAcademic

2005

Design and fabrication of stable capacitive test structures to study charge trapping phenomena

van Essen, M. C., Wiegerink, R. J., Fernandez, L. J., Rogalla, H. & Flokstra, J., 4 Sep 2005, p. 296-299. 4 p.

Research output: Contribution to conferencePaperAcademic

82 Downloads (Pure)

MEMS based hair flow-sensors as model systems for acoustic perception studies

Krijnen, G. J. M., Dijkstra, M., van Baar, J. J., de Boer, J. H., Lammerink, T. S. J. & Wiegerink, R., 20 Jul 2005, p. 1-4. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

Open Access
File
hair
microelectromechanical systems
acoustics
sensors
crickets
2004
8 Downloads (Pure)

Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

van Baar, J. J. J., Dijkstra, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 2004, p. 726-729.

Research output: Contribution to conferencePaperAcademic

File
40 Downloads (Pure)

Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Jansen, H. V., Flokstra, J. & Elwenspoek, M. C., 27 Jun 2004, p. 117-118. 2 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
11 Downloads (Pure)

Measurements for a capacitive incremental position sensor for microactuators

Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 2004, p. 760-763.

Research output: Contribution to conferencePaperAcademic

File
2003
13 Downloads (Pure)

Novel rf power sensor based on capacitive MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Jansen, H. V., Wiegerink, R. J. & Flokstra, J., 2 Nov 2003, p. 41-44. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
33 Citations (Scopus)
41 Downloads (Pure)

Radio frequency power sensor based on MEMS technology

Fernandez, L. J., Visser, E., Sesé, J., Wiegerink, R. J., Jansen, H. V., Flokstra, J., Flokstra, J. & Elwenspoek, M. C., Oct 2003, p. 549-552. 4 p.

Research output: Contribution to conferencePaperAcademicpeer-review

File
1 Citation (Scopus)
25 Downloads (Pure)

Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Baars, N. H. R., Krouwer, E., van Baar, J. J. J. & Wiegerink, R. J., 22 Oct 2003, p. 353-357. 5 p.

Research output: Contribution to conferencePaperAcademicpeer-review

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