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Research Output 1989 2019

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Article
2018
4 Downloads (Pure)

Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J., Groenesteijn, J., Sanders, R. G. P. & Lötters, J. C., 1 Mar 2018, In : Sensors and actuators. A: Physical. 271, p. 212-216 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

mass flow
sensors
Sensors
equipartition theorem
random vibration
2 Citations (Scopus)
82 Downloads (Pure)

On frequency-based interface circuits for capacitive MEMS accelerometers

Qiao, Z., Boom, B. A., Annema, A. J., Wiegerink, R. J. & Nauta, B., 25 Sep 2018, In : Micromachines. 9, 10, 21 p., 488.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Phase noise
Accelerometers
MEMS
Bandwidth
Networks (circuits)
2017
6 Citations (Scopus)
67 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Silicon
Silicon nitride
Microfluidics
platforms
Metals
3 Citations (Scopus)
49 Downloads (Pure)

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn, J., de Boer, M. J., Lötters, J. C. & Wiegerink, R. J., 1 Jul 2017, In : Microfluidics and nanofluidics. 21, 7, 126.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Microfluidics
platforms
Fabrication
fabrication
slits
2 Citations (Scopus)

Integrated pressure sensing using capacitive Coriolis mass flow sensors

Alveringh, D., Wiegerink, R. J. & Lötters, J. C., 2 Jun 2017, In : Journal of microelectromechanical systems. 26, 3, p. 653-661 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Sensors
Flow measurement
Microchannels
Scalability
Fabrication
1 Citation (Scopus)

Phase relation recovery for scanning laser Doppler vibrometry

Alveringh, D., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., 12 Jan 2017, In : Measurement science and technology. 28, 2, p. 025208 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Scanning
Recovery
Lasers
Doppler effect
Laser beams
1 Citation (Scopus)

SU-8 micro Coriolis mass flow sensor

Monge, R., Groenesteijn, J., Alveringh, D., Wiegerink, R. J., Lötters, J. C. & Fernandez, L. J., 31 Mar 2017, In : Sensors and actuators. B: Chemical. 241, p. 744-749 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

isopropyl alcohol
2-Propanol
mass flow
Alcohols
Water
2016
4 Citations (Scopus)
1 Downloads (Pure)

A 2D acoustic particle velocity sensor with perfectly orthogonal sensitivity directions

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 1 Aug 2016, In : Sensors and actuators. A: Physical. 246, p. 28-34 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

A 2D particle velocity sensor with minimal flow disturbance

Pjetri, O., Wiegerink, R. J. & Krijnen, G. J. M., 18 May 2016, In : IEEE sensors journal. 16, 24, p. 8706-8714 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
64 Downloads (Pure)

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Tsoukalas, D. (ed.), Wiegerink, R. J. (ed.), Groenesteijn, J., Staufer, U. (ed.) & Lötters, J. C., 15 Jun 2016, In : Microelectronic engineering. 159, p. 1-5 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2015
11 Citations (Scopus)

Differential capacitive sensing circuit for a multi-electrode capacitive force sensor

Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 31 Aug 2015, In : Sensors and actuators. A: Physical. 234, p. 168-179 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
119 Downloads (Pure)

Miniature large range multi-axis force-torque sensor for biomechanical applications

Brookhuis, R. A., Sanders, R. G. P., Ma, K., Lammerink, T. S. J., de Boer, M. J., Krijnen, G. J. M. & Wiegerink, R. J., 22 Feb 2015, In : Journal of micromechanics and microengineering. 25, 2, p. 025012 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2 Citations (Scopus)
2 Downloads (Pure)

Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

Groen, M., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 9 Sep 2015, In : Journal of micromechanics and microengineering. 25, p. 105008 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
257 Downloads (Pure)

Multi parameter flow meter for on-line measurement of gas mixture composition

van der Wouden, E. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 10 Apr 2015, In : Micromachines. 6, 4, p. 452-461 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)

Proportional control valves integrated in silicon nitride surface channel technology

Groen, M., Groenesteijn, J., Meutstege, E., Brookhuis, R. A., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 25 Jun 2015, In : Journal of microelectromechanical systems. 24, 6, p. 1759-1767 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor

Hu, C., Zheng, D., Fan, S., Wiegerink, R. J. & Guo, Z., 21 Jan 2015, In : Microsystem technologies. 22, 4, p. 1-9 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

2014
3 Citations (Scopus)
1 Downloads (Pure)

A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Groen, M., Wu, K., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C. & Wiegerink, R. J., 26 Nov 2014, In : Journal of micromechanics and microengineering. 24, 12, p. 125020 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

First results of PRECISE—Development of a MEMS-based monopropellant micro chemical propulsion system

Gauer, M., Telitschkin, D., Gotzig, U., Batonneau, Y., Johansson, H., Ivanov, M., Palmer, P. & Wiegerink, R. J., Jan 2014, In : Acta astronautica. 93, p. 77-83 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Parametric amplification in a micro Coriolis mass flow sensor

Groenesteijn, J., Droogendijk, H., Wiegerink, R. J., Lammerink, T. S. J., Lötters, J. C., Sanders, R. G. P. & Krijnen, G. J. M., 21 May 2014, In : Journal of applied physics. 115, 19, p. 194503 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

22 Citations (Scopus)
3 Downloads (Pure)

Six-axis force-torque sensor with a large range for biomechanical applications

Brookhuis, R. A., Droogendijk, H., de Boer, M. J., Sanders, R. G. P., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 28 Feb 2014, In : Journal of micromechanics and microengineering. 24, 3, p. 1-10 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Thermal flow-sensor drift reduction by thermopile voltage cancellation via power feedback control

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., Aug 2014, In : Journal of microelectromechanical systems. 23, 4, p. 908-917 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

49 Downloads (Pure)

Thermal-wave balancing flow sensor with low-drift power feedback

Dijkstra, M., Lammerink, T. S. J., Pjetri, O., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 11 Apr 2014, In : Journal of micromechanics and microengineering. 24, 5, p. 055016 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2013
13 Citations (Scopus)
62 Downloads (Pure)

Compact mass flow meter based on a micro coriolis flow sensor

Sparreboom, W., van de Geest, J., Katerberg, M., Postma, F. M., Haneveld, J., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 2013, In : Micromachines. 4, 1, p. 22-33 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
25 Citations (Scopus)

Imaging dipole flow sources using an artificial lateral-line system made of biomimetic hair flow sensors

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 17 Apr 2013, In : Journal of the Royal Society. Interface. 10, 83, p. 20130162 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)
50 Downloads (Pure)

Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity

Dagamseh, A. M. K., Bruinink, C. M., Wiegerink, R. J., Lammerink, T. S. J., Droogendijk, H. & Krijnen, G. J. M., Mar 2013, In : Journal of micromechanics and microengineering. 23, 3, p. 035010 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)

Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation

Yagubizade, H., Darvishi, M., Chen, Y. Y., Nguyen, D. M., Dekkers, J. M., Wiegerink, R. J., Elwenspoek, M. C. & Tas, N. R., 14 Feb 2013, In : Applied physics letters. 102, 6, p. 063509 4 p., 063509.

Research output: Contribution to journalArticleAcademicpeer-review

2012
20 Citations (Scopus)
1 Downloads (Pure)

3D force sensor for biomechanical applications

Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J. & Elwenspoek, M. C., 8 May 2012, In : Sensors and actuators. A: Physical. 182, 182, p. 28-33 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
91 Downloads (Pure)

Design considerations for a micromachined proportional control valve

Groen, M., Brouwer, D. M., Wiegerink, R. J. & Lötters, J. C., 17 Apr 2012, In : Micromachines. 3, 2, p. 396-412 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
14 Downloads (Pure)

Fully integrated micro coriolis mass flow sensor operating at atmospheric pressure

Lötters, J. C., Lammerink, T. S. J., Haneveld, J., Hageman, T. A. G. & Wiegerink, R. J., 1 Jan 2012, In : Technisches Messen. 79, 1, p. 4-9 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
mass flow
Atmospheric pressure
atmospheric pressure
sensors
Sensors
22 Citations (Scopus)

Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening

Droogendijk, H., Bruinink, C. M., Sanders, R. G. P., Dagamseh, A. M. K., Wiegerink, R. J. & Krijnen, G. J. M., 22 May 2012, In : Journal of micromechanics and microengineering. 22, 6, p. 065026 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
67 Downloads (Pure)

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Lötters, J. C., Lammerink, T. S. J., Groenesteijn, J., Haneveld, J. & Wiegerink, R. J., 15 Mar 2012, In : Micromachines. 3, 1, p. 194-203 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2 Citations (Scopus)
29 Downloads (Pure)

Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology

Dijkstra, M., Berenschot, J. W., de Boer, M. J., van der Linden, H. J., Hankemeier, T., Lammerink, T. S. J., Wiegerink, R. J., Elwenspoek, M. C. & Tas, N. R., 1 Jul 2012, In : Microfluidics and nanofluidics. 13, 1, p. 29-35 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
7 Citations (Scopus)
2 Downloads (Pure)

Optimization of a micro Coriolis mass flow sensor using Lorentz force actuation

Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., Haneveld, J. & Lötters, J. C., 7 Oct 2012, In : Sensors and actuators. A: Physical. 186, p. 48-53 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
2 Downloads (Pure)

Parametric excitation of a micro Coriolis mass flow sensor

Droogendijk, H., Groenesteijn, J., Haneveld, J., Sanders, R. G. P., Wiegerink, R. J., Lammerink, T. S. J., Lötters, J. C. & Krijnen, G. J. M., 30 Nov 2012, In : Applied physics letters. 101, 22, p. 223511 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

47 Downloads (Pure)

Towards a Casimir force measurement between micromachined parallel plate structures

Syed Nawazuddin, M. B., Lammerink, T. S. J., Berenschot, J. W., de Boer, M. J., Ma, K., Elwenspoek, M. C. & Wiegerink, R. J., 20 Nov 2012, In : Challenges. 3, 2, p. 261-277 17 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
24 Citations (Scopus)
45 Downloads (Pure)

Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 2012, In : Bioinspiration & biomimetics. 7, 4, p. 046009 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
2011
2 Citations (Scopus)
34 Downloads (Pure)

Artificial lateral-line system for imaging dipole sources using Beamforming techniques

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Jan 2011, In : Procedia engineering. 25, p. 779-782 4 p.

Research output: Contribution to journalArticleAcademic

Open Access
File
Open systems
Biomimetics
Beamforming
Fish
Robots
1 Citation (Scopus)
39 Downloads (Pure)

Optimization of a micro Coriolis mass flow sensor

Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J., Haneveld, J. & Lötters, J. C., 4 Sep 2011, In : Procedia engineering. 25, p. 783-786 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Sensors
Lorentz force
Permanent magnets
Magnetic fields
2010
46 Citations (Scopus)

Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

Dagamseh, A. M. K., Lammerink, T. S. J., Kolster, M. L., Bruinink, C. M., Wiegerink, R. J. & Krijnen, G. J. M., 19 Feb 2010, In : Sensors and actuators. A: Physical. 162, 2, p. 355-360 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance

Syed Nawazuddin, M. B., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 1 Jun 2010, In : Journal of micromechanics and microengineering. 20, 6, p. 064005 6 p., 10.1088/0960-1317/20/6/064005.

Research output: Contribution to journalArticleAcademicpeer-review

46 Citations (Scopus)
1 Downloads (Pure)

Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor

Haneveld, J., Lammerink, T. S. J., de Boer, M. J., Sanders, R. G. P., Mehendale, A., Lötters, J. C., Lotters, J. C., Dijkstra, M. & Wiegerink, R. J., 6 Sep 2010, In : Journal of micromechanics and microengineering. 20, 6, p. 125001 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

2009
11 Citations (Scopus)
1 Downloads (Pure)

A MEMS-based gravity gradiometer for future planetary missions

Flokstra, J., Flokstra, J., Cuperus, R., Cupurus, R., Wiegerink, R. J. & van Essen, M. C., Nov 2009, In : Cryogenics. 49, 11, p. 665-668 4 p., 10.1016/j.cryogenics.2008.12.019.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
13 Downloads (Pure)

An integrated 3D sound intensity sensor using four-wire particle velocity sensors: I. Design and characterization

Yntema, D. R., van Honschoten, J. W. & Wiegerink, R. J., 14 Dec 2009, In : Journal of micromechanics and microengineering. 20, 1, p. 015042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)
8 Downloads (Pure)

An integrated 3D sound intensity sensor using four-wire particle velocity sensors: II. Modelling

van Honschoten, J. W., Yntema, D. R. & Wiegerink, R. J., 14 Dec 2009, In : Journal of micromechanics and microengineering. 20, 1, p. 015043 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
3 Citations (Scopus)
47 Downloads (Pure)

Dipole source localisation using bio-mimetic flow-sensor arrays

Dagamseh, A. M. K., Lammerink, T. S. J., Bruinink, C. M., Wiegerink, R. J. & Krijnen, G. J. M., 2009, In : Procedia chemistry. 1, 1, p. 891-894 4 p., 10.1016/j.proche.2009.07.222.

Research output: Contribution to journalArticleAcademicpeer-review

File
10 Citations (Scopus)
41 Downloads (Pure)

Thermal and Coriolis type micro flow sensors based on surface channel technology

Wiegerink, R. J., Lammerink, T. S. J., Dijkstra, M. & Haneveld, J., Sep 2009, In : Procedia chemistry. 1, 1, p. 1455-1458 4 p., 10.1016/j.proche.2009.07.363.

Research output: Contribution to journalArticleAcademicpeer-review

File
10 Citations (Scopus)
286 Downloads (Pure)

Towards embedded control for resonant scanning MEMS micromirror

Kuijpers, A. A., Lierop, D., Sanders, R. H. M., Tangenberg, J., Moddejonge, H., Eikenbroek, J. W. T., Lammerink, T. S. J. & Wiegerink, R. J., Sep 2009, In : Procedia chemistry. 1, 1, p. 1307-1310 4 p., 10.1016/j.proche.2009.07.326.

Research output: Contribution to journalArticleAcademicpeer-review

File
2008
6 Citations (Scopus)

A complete three-dimensional sound intensity sensor integrated on a single chip

Yntema, D. R., van Honschoten, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 23 Sep 2008, In : Journal of micromechanics and microengineering. 18, 2008/16200/11, p. 1-9 9 p., 10.1088/0960-1317/18/11/115004.

Research output: Contribution to journalArticleAcademicpeer-review

56 Citations (Scopus)

Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J. & Elwenspoek, M. C., 2 May 2008, In : Sensors and actuators. A: Physical. 143, 08332/1, p. 1-6 6 p., 10.1016/j.sna.2007.12.005.

Research output: Contribution to journalArticleAcademicpeer-review

2007
8 Citations (Scopus)

Analysis of a three-dimensional particle velocity sensor for design optimization

van Honschoten, J. W., Yntema, D. R., Wiegerink, R. J. & Elwenspoek, M. C., 3 Mar 2007, In : Journal of micromechanics and microengineering. 17, WP07-01, p. S137-S146 9 p., 10.1088/0960-1317/17/7/S11.

Research output: Contribution to journalArticleAcademicpeer-review