Robbert W.E. van de Kruijs

dr.ir.

  • 936 Citations
  • 18 h-Index
20032019
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Fingerprint Dive into the research topics where Robbert W.E. van de Kruijs is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 8 Similar Profiles
reflectance Physics & Astronomy
mirrors Physics & Astronomy
laminates Physics & Astronomy
Multilayers Engineering & Materials Science
x rays Physics & Astronomy
grazing incidence Physics & Astronomy
thin films Physics & Astronomy
retarding Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 2003 2019

Alternative EUV absorptive materials and novel architectures for EUV reticle in nm node technology scanner

Edrisi, A., 4 Mar 2019, Enschede: University of Twente. 80 p.

Research output: ThesisPd Eng ThesisAcademic

Open Access
File
scanners
silver
reticles
absorbers
nickel
1 Citation (Scopus)
11 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
X ray scattering
grazing incidence
Scanning Transmission Electron Microscopy
Multilayers
X-Rays

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance
1 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of applied physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
molybdenum
ion scattering
silicon
tensile stress
availability

Multilayer filter using the borrmann effect for euv source monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 1 Jan 2019, Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America, (Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Activities 2010 2018

  • 20 Oral presentation
  • 5 Invited talk

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)
26 Mar 2018

Activity: Talk or presentationOral presentation

Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)
11 Dec 2018

Activity: Talk or presentationOral presentation

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)
8 Nov 2018

Activity: Talk or presentationOral presentation

Damage processes in thin Ru films induced by single and multiple ultra-short XUV pulses

Igor A. Makhotkin (Speaker), Igor Milov (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Nikita Medvedev (Contributor), vladimir lipp (Contributor), B. Ziaja (Contributor), Frank Scholze (Contributor), V. Zhakhovsky (Contributor), N. Inogamov (Contributor), Hartmut Enkisch (Contributor), Gosse de Vries (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), J.M. Sturm (Contributor), Konstantin Nikolaev (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Eric Louis (Contributor), Iwanna Jacyna (Contributor), Marek Jurek (Contributor), Dorota Klinger (Contributor), Laurent Nittler (Contributor), Yevgen Syryanyy (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), Elke Plönjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor), Rilpho Dunker (Contributor), Grzegorz Gwalt (Contributor), Tobias Mey (Contributor), Mark A. Smithers (Contributor), Hendricus A.G.M. van Wolferen (Contributor), Enrico G. Keim (Contributor), F. Bijkerk (Contributor)
23 Jan 2018

Activity: Talk or presentationInvited talk

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)
12 Dec 2018

Activity: Talk or presentationOral presentation