Stress development of thin films monitored in-situ by cantilever laser deflection and low energy ion scattering

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Johan Reinink (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS

Konstantin Nikolaev (Contributor), Sergey N. Yakunin (Contributor), Igor A. Makhotkin (Speaker), Joris de la Rie (Contributor), Roman Medvedev (Contributor), A.V. Rogachev (Contributor), C.P. Hendrikx (Contributor), M. Gateshki (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Advancing thin film X-ray reflectivity data analysis

Igor A. Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)

Activity: Talk or presentation › Oral presentation

Irradiation of EUV-mirrors with multiple FEL pulses below the single shot damage threshold

Igor A. Makhotkin (Speaker), Hartmut Enkisch (Contributor), Ryszard Sobierajski (Contributor), Jaromir Chalupský (Contributor), Kai Tiedtke (Contributor), Gosse de Vries (Contributor), Michael Störmer (Contributor), Frank Scholze (Contributor), Frank Siewert (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Igor Milov (Contributor), Eric Louis (Contributor), I. Yatsyna (Contributor), Marek Jurek (Contributor), Libor Juha (Contributor), Věra Hájková (Contributor), Vojtěch Vozda (Contributor), Tomáš Burian (Contributor), Karel Saksl (Contributor), Bart Faatz (Contributor), Barbara Keitel (Contributor), E. Ploenjes (Contributor), Siegfried Schreiber (Contributor), Sven Toleikis (Contributor), R.A. Loch (Contributor), Martin Hermann (Contributor), Sebastian Strobel (Contributor), Han Kwang Nienhuys (Contributor)

Activity: Talk or presentation › Oral presentation

Model independent approach for the analysis of GIXR data from thin films

Igor Alexandrovich Makhotkin (Speaker), Sergey N. Yakunin (Contributor), J.F. Woitok (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), E.J. Reuvekamp (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Capabilities of model free X-ray standing wave analysis of periodic multilayer structures

I.A. Makhotkin (Speaker), S.N. Yakunin (Contributor), C.P. Hendrikx (Contributor), A. Chandrasekaran (Contributor), Andrey Zameshin (Contributor), A. Zarkadas (Contributor), M. Gateshki (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

J.M. Sturm (Speaker), Roger Coloma Ribera (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Model independent approach for the analysis of GIXR data from thin films

I.A. Makhotkin (Contributor), S.N. Yakunin (Speaker), J.F. Woitok (Contributor), R.W.E. van de Kruijs (Contributor), E. Reuvekamp (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Single-shot damage of Ru thin film induced by XUV FEL fs pulses

Igor Milov (Speaker), Igor Alexandrovich Makhotkin (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), R. Keim (Contributor), H.A.G.M. van Wolferen (Contributor), Eric Louis (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Status of multilayer reflective optics

Eric Louis (Speaker), H. Enkisch (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Andrey Yakshin (Contributor), J.M. Sturm (Contributor), Igor A. Makhotkin (Contributor), Christopher James Lee (Contributor), Stephan Müllender (Contributor), F. Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

High efficiency multilayer coated blazed grating for tender X-rays

A. Sokolov (Speaker), F. Senf (Speaker), Frederik Bijkerk (Speaker), F. Eggenstein (Speaker), G. Gwalt (Speaker), Qiushi Huang (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), O. Kutz (Speaker), S. Lemke (Speaker), Eric Louis (Speaker), M. Mertin (Speaker), I. Packe (Speaker), I. Rudolph (Speaker), F. Schafers (Speaker), F. Siewert (Speaker), Jacobus Marinus Sturm (Speaker), C. Waberski (Speaker), Z. Wang (Speaker), J. Wolf (Speaker), T. Zeschke (Speaker), A. Erko (Speaker)

Activity: Talk or presentation › Oral presentation

Insitu Stress Measurement of Thin Film and Multilayer Deposition

Johan Reinink (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)

Activity: Talk or presentation › Oral presentation

Narrow-band Zr-coated Ni/Si multilayer Borrmann filter for 13.5 nm monitoring

J.L.P. Barreaux (Speaker), I.V. Kozhevnikov (Speaker), Hubertus M.J. Bastiaens (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Frederik Bijkerk (Speaker), Klaus J. Boller (Speaker)

Activity: Talk or presentation › Oral presentation

“ABC Physics” or (solid state) physics in the nanometer range

Robbert Wilhelmus Elisabeth van de Kruijs (Speaker)

Activity: Talk or presentation › Oral presentation

Novel approach to simultaneous analysis of grazing incidence X-ray reflectivity and X-ray standing wave data

S.N. Yakunin (Speaker), I.A. Makhotkin (Speaker), M. Chuev (Speaker), A.Y. Seregin (Speaker), E.M. Pashaev (Speaker), E. Louis (Speaker), R.W.E. van de Kruijs (Speaker), F. Bijkerk (Speaker), M.V. Kovalchuk (Speaker)

Activity: Talk or presentation › Oral presentation

Multilayer XUV/SXR beam splitters for short-wavelength FEL applications

Rolf A. Loch (Speaker), Ryszard Sobierajski (Speaker), Eric M. Gullikson (Speaker), Dorota Klinger (Speaker), Robbert W.E. van de Kruijs (Speaker), Eric Louis (Speaker), Frank Siewert (Speaker), Andrzej Wawro (Speaker), Fred Bijkerk (Speaker)

Activity: Talk or presentation › Oral presentation

Progress in multilayer XUV reflecting Bragg optics

Frederik Bijkerk (Speaker), Eric Louis (Speaker), Andrey Yakshin (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), E. Zoethout (Speaker), S. Dobrovolsky (Speaker), M. Wu (Speaker), I.N. Nedelcu (Speaker), T. Tsarfati (Speaker), V. Lohmann (Speaker), S. Bruijn (Speaker)

Activity: Talk or presentation › Oral presentation

Structural influence of N-ions treatment on the La-B4C systems

Igor Alexandrovich Makhotkin (Speaker), E. Zoethout (Speaker), Eric Louis (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), Andrey Yakshin (Speaker), T. Tsarfati (Speaker), A.Y. Seregin (Speaker), S.N. Yakunin (Speaker), Frederik Bijkerk (Speaker)

Activity: Talk or presentation › Oral presentation

Multilayer optics for XUV and X-ray free electron lasers

Frederik Bijkerk (Speaker), Eric Louis (Speaker), R. Sobierajski (Speaker), R.A. Loch (Speaker), R. van der Meer (Speaker), Robbert Wilhelmus Elisabeth van de Kruijs (Speaker), S. Bruijn (Speaker)

Activity: Talk or presentation › Oral presentation