Physics & Astronomy
reflectance
mirrors
laminates
x rays
grazing incidence
thin films
ruthenium
retarding
wavelengths
optics
ion scattering
lithography
oxidation
coatings
annealing
interlayers
radiation
barrier layers
Bragg reflectors
photolithography
standing waves
bombardment
nitrogen ions
sputtering
free electron lasers
thermal stability
shot
ions
molybdenum
damage
energy
photoelectron spectroscopy
transition metals
metals
purity
infrared suppression
silicides
magnetron sputtering
thresholds
absorbers
incidence
absorbers (materials)
oxygen
gratings
characterization
antireflection coatings
masks
laser beams
passivity
membranes
Engineering & Materials Science
Multilayers
Boron
X rays
Transition metals
Thin films
Ions
Optics
Ion bombardment
Ellipsometry
X ray photoelectron spectroscopy
Oxides
Nitridation
Sputtering
Radiation
Masks
Carbon
Ruthenium
Metals
Hydrogen
Extreme ultraviolet lithography
Photodetectors
Nitrogen
Diffusion barriers
Free electron lasers
Desorption
Wavelength
Crystalline materials
Defects
Vacancies
X ray absorption spectroscopy
Substrates
Diffraction
Surface roughness
Transmission electron microscopy
Annealing
Oxygen
X ray diffraction
Activation energy
Temperature
Crystallites
Optical materials
Film growth
X ray scattering
Imaging techniques
Radiation damage
Ultraviolet radiation
Atoms
Deuterium
Lithography
Boron nitride
Chemical Compounds
Multilayers
Boron
Thin films
Transition metals
X ray absorption spectroscopy
X rays
Metals
Nitridation
Masks
Hydrogen
Sputtering
Optics
Desorption
Defects
Extreme ultraviolet lithography
silicon nitride
Crystals
Oxides
Oxygen
Vacancies
Ions
X ray photoelectron spectroscopy
boron nitride
Transmission electron microscopy
Annealing
Ion bombardment
Radiation
Graphite
Crystallites
Nitrogen
Optical materials
Crystalline materials
X ray absorption
Film growth
X ray scattering
X ray diffraction
Deuterium
Wavelength
Optical constants
Superconducting materials
Activation energy
Spectroscopy
Scaling laws
Diffraction
Erosion
Photolithography
Imaging techniques
Optical properties
X ray optics
Diffusion barriers