Robbert W.E. van de Kruijs

dr.ir.

  • 977 Citations
  • 18 h-Index
20032020
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Research Output 2003 2020

2019
4 Downloads (Pure)

Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
bombardment
sputtering
transition metals
lithography
ions
1 Citation (Scopus)
23 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
X ray scattering
grazing incidence
Scanning Transmission Electron Microscopy
Multilayers
X-Rays

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance
3 Downloads (Pure)
Open Access
File
Membranes
Thin films
Boron
Compressive stress
Tensile stress
4 Downloads (Pure)
Open Access
File
9 Downloads (Pure)
Open Access
File
14 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of applied physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
molybdenum
ion scattering
silicon
tensile stress
availability

Multilayer filter using the borrmann effect for euv source monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 1 Jan 2019, Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

11 Downloads (Pure)

Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Scaling laws
Film growth
Transition metals
Thin films
Interfacial energy
1 Citation (Scopus)
111 Downloads (Pure)
Open Access
File
nitrogen ions
Ion bombardment
Ruthenium
ruthenium
bombardment
3 Downloads (Pure)

Sputtering and nitridation of transition metal surfaces under low energy, steady state nitrogen ion bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 26 Nov 2019, (Accepted/In press) In : Applied surface science. 505, 144529.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Nitridation
nitrogen ions
Ion bombardment
metal surfaces
Transition metals
2018
19 Downloads (Pure)

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

File
standing waves
x rays
mirrors
reflectance
fluorescence
2 Citations (Scopus)
13 Downloads (Pure)

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hydrogen
Desorption
Adsorption
Yttrium
Thin films
2 Citations (Scopus)
65 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 others, Hájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
free electron lasers
ruthenium
ablation
shot
damage
10 Citations (Scopus)
49 Downloads (Pure)

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 others, Saksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Free electron lasers
Radiation damage
yield point
radiation damage
free electron lasers
5 Citations (Scopus)
36 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 others, Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet lasers
free electron lasers
shot
damage
thin films
10 Citations (Scopus)
16 Downloads (Pure)

Novel EUV mask absorber evaluation in support of next-generation EUV imaging

Philipsen, V., Luong, K. V., Opsomer, K., Detavernier, C., Hendrickx, E., Erdmann, A., Evanschitzky, P., Van De Kruijs, R. W. E., Heidarnia-Fathabad, Z., Scholze, F. & Laubis, C., 10 Oct 2018, Photomask Technology 2018. Gallagher, E. E. & Rankin, J. H. (eds.). SPIE, Vol. 10810. 108100C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10810).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
File
EUV Mask
Absorber
Mask
Masks
absorbers
1 Citation (Scopus)
61 Downloads (Pure)

Self-contained in-vacuum in situ thin film stress measurement tool

Reinink, J., Van De Kruijs, R. W. E. & Bijkerk, F., 14 May 2018, In : Review of scientific instruments. 89, 5, 6 p., 053904.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stress measurement
Stress measurement
Vacuum
Thin films
vacuum
38 Downloads (Pure)

Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
specular reflection
grazing incidence
X-Ray Diffraction
Theoretical Models
Diffraction
34 Downloads (Pure)

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePosterAcademic

Open Access
File
quartz crystals
microbalances
charged particles
damage
metal crystals
2017

Advanced crystal surface characterization with asymmetrical X-ray diffraction

Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePoster

5 Citations (Scopus)

Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePoster

18 Downloads (Pure)

Crystal surface characterization

Nikolaev, K., Makhotkin, I., Yakunin, S., van de Kruijs, R. & Bijkerk, F., 22 May 2017.

Research output: Contribution to conferencePosterOther research output

Open Access
File
crystal surfaces
grazing incidence
x rays
insulators
injection
4 Citations (Scopus)

Detection of defect populations in superconductor boron subphosphide B12P2 through X-ray absorption spectroscopy

Huber, S., Gullikson, E., Meyer-Ilse, J., Frye, C. D., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2017, In : Journal of materials chemistry. A. 5, 12, p. 5737-5749 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

X ray absorption spectroscopy
Boron
Superconducting materials
Vacancies
Defects
2 Citations (Scopus)

Determining crystal phase purity in c-BP through X-ray absorption spectroscopy

Huber, S., Medvedev, V., Gullikson, E., Padavala, B., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2017, In : Physical chemistry chemical physics. 19, 12, p. 8174-8187 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

boron phosphides
X ray absorption spectroscopy
Boron
absorption spectroscopy
purity

Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Oct 2017.

Research output: Contribution to conferencePoster

4 Citations (Scopus)
306 Downloads (Pure)
Open Access
File
magnetron sputtering
oxidation
thin films
oxygen
photoelectron spectroscopy

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferenceAbstractOther research output

oxidation
thin films
photoelectron spectroscopy
sharpness
ion scattering

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering

Sturm, J. M., Coloma Ribera, R., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 3 Nov 2017, In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

ion scattering
magnetron sputtering
passivity
energy
silicates
123 Downloads (Pure)

Narrowband and tunable anomalous transmission filters for special monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 25 Jan 2017, In : Optics express. 25, 3, p. 1993-2008

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
narrowband
filters
wavelengths
incidence
standing waves
12 Citations (Scopus)
4 Downloads (Pure)

Pellicle films supporting the ramp to HVM with EUV

van Zwol, P. J., Nasalevich, M., Voorthuijzen, W. P., Kurganova, E., Notenboom, A., Vles, D. F., Peter, M., Symens, W., Giesbers, A. J. M., Klootwijk, J. H., Van De Kruijs, R. W. E. & Zande, W. J., 2017, Photomask Technology 2017. SPIE, 9 p. 104510O. (Proceedings of SPIE; vol. 10451).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

pellicle
ramps
Silicides
Graphite
silicides
16 Citations (Scopus)

Reducing EUV mask 3D effects by alternative metal absorbers

Philipsen, V., Luong, K. V., Souriau, L., Hendrickx, E., Erdmann, A., Xu, D., Evanschitzky, P., Van De Kruijs, R. W. E., Edrisi, A., Scholze, F., Laubis, C., Irmscher, M., Naasz, S. & Reuter, C., 24 Mar 2017, Extreme Ultraviolet (EUV) Lithography VIII. SPIE, Vol. 10143. 1014310

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

absorbers (materials)
EUV Mask
Absorber
Masks
absorbers
11 Citations (Scopus)

Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers

Philipsen, V., Luong, K. V., Souriau, L., Erdmann, A., Xu, D., Evanschitzky, P., Van De Kruijs, R. W. E., Edrisi, A., Scholze, F., Laubis, C., Irmscher, M., Naasz, S., Reuter, C. & Hendrickx, E., 1 Oct 2017, In : Journal of micro/nanolithography, MEMS, and MOEMS. 16, 4, 13 p., 041002.

Research output: Contribution to journalArticleAcademicpeer-review

absorbers (materials)
Masks
absorbers
masks
Metals
20 Citations (Scopus)
54 Downloads (Pure)

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang, Q., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 21 Mar 2017, In : Applied physics reviews. 4, 1, 15 p., 011104.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
gratings
optics
monochromators
x rays
spectral sensitivity
2016

Compact Anomalous Transmission Filters for EUV Spectral Monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 11 Oct 2016, p. -.

Research output: Contribution to conferencePoster

7 Citations (Scopus)
45 Downloads (Pure)

Electronegativity-dependent tin etching from thin films

Pachecka, M., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 29 Jul 2016, In : AIP advances. 6, 7, 9 p., 075222.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
tin
etching
thin films
hydrogen
availability

Experimental Demonstration of Multilayer Anomalous-Transmission Filters for Narrow-Band Transmission at 13.5 nm

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2016, p. -.

Research output: Contribution to conferencePoster

4 Citations (Scopus)
73 Downloads (Pure)

Exploiting the P L2,3 absorption edge for optics: spectroscopic and structural characterization of cubic boron phosphide thin films

Huber, S., Medvedev, V., Meyer-Ilse, J., Gullikson, E., Padavala, B., Edgar, J. H., Sturm, J. M., van de Kruijs, R. W. E., Prendergast, D. & Bijkerk, F., 2016, In : Optical materials express. 6, 12, p. 3946-3959 12.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Boron
Optics
Thin films
X ray absorption
Spectroscopy

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
kinetics
coatings
oxidation
optical coatings
20 Citations (Scopus)
213 Downloads (Pure)

Highly efficient blazed grating with multilayer coating for tender X-ray energies

Senf, F., Bijkerk, F., Eggenstein, F., Gwalt, G., Huang, Q., van de Kruijs, R. W. E., Kutz, O., Lemke, S., Louis, E., Mertin, M., Packe, I., Rudolph, I., Schafers, F., Siewert, F., Sokolov, A., Sturm, J. M., Waberski, C., Wang, Z., Wolf, J., Zeschke, T. & 1 others, Erko, A., 2016, In : Optics express. 24, 12, p. 13220-13230 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
gratings
coatings
x rays
retarding
energy

Influence of the surface oxide content of a boron capping layer on UV photodetector performance

Mohammadi, V., Van De Kruijs, R. W. E., Rao, P. R., Sturm, J. M. & Nihtianov, S., 21 Mar 2016, 2015 9th International Conference on Sensing Technology, ICST 2015. IEEE Computer Society, Vol. 2016-March. p. 656-660 5 p. 7438479

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Photodetectors
Boron
Chemical vapor deposition
Oxides
Physical vapor deposition

In-house X-ray Standing Wave study of LaN/B multilayer mirrors

Hendrikx, C. P., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Insitu stress measurement of thin film and multilayer growth

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

5 Citations (Scopus)
176 Downloads (Pure)

In vacuo growth studies of Ru thin films on Si, SiN, and SiO2 by high-sensitivity low energy ion scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 2016, In : Journal of applied physics. 120, 6, p. 065303- 13 p., 065303.

Research output: Contribution to journalArticleAcademicpeer-review

File
ion scattering
sensitivity
thin films
energy
oxygen

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePosterOther research output

thin films
sharpness
ion scattering
caps
mirrors

Nonequilibrium electron-phonon dynamics in ruthenium thin films exposed to ultra-short laser pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, R., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output