Robbert W.E. van de Kruijs

dr.ir.

  • 976 Citations
  • 18 h-Index
20032020
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Research Output 2003 2020

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Poster
2020
3 Downloads (Pure)
Open Access
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2019
3 Downloads (Pure)

Comparison of Sputtering of Transition Metals by Reactive Ion Bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 21 Jan 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
File
bombardment
sputtering
transition metals
lithography
ions
3 Downloads (Pure)
Open Access
File
Membranes
Thin films
Boron
Compressive stress
Tensile stress
9 Downloads (Pure)
Open Access
File
4 Downloads (Pure)
Open Access
File
2018
19 Downloads (Pure)

Advancing X-ray standing wave data analysis

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Nov 2018.

Research output: Contribution to conferencePosterAcademic

File
standing waves
x rays
mirrors
reflectance
fluorescence
34 Downloads (Pure)

Sputter damage by low energy charged particle irradiation

Phadke, P., Sturm, M., van de Kruijs, R. & Bijkerk, F., 18 Jun 2018.

Research output: Contribution to conferencePosterAcademic

Open Access
File
quartz crystals
microbalances
charged particles
damage
metal crystals
2017

Advanced crystal surface characterization with asymmetrical X-ray diffraction

Nikolaev, K., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePoster

5 Citations (Scopus)

Anomalous transmission filters for spectral monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 17 Jan 2017, p. -.

Research output: Contribution to conferencePosterOther research output

18 Downloads (Pure)

Crystal surface characterization

Nikolaev, K., Makhotkin, I., Yakunin, S., van de Kruijs, R. & Bijkerk, F., 22 May 2017.

Research output: Contribution to conferencePosterOther research output

Open Access
File
crystal surfaces
grazing incidence
x rays
insulators
injection

Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Oct 2017.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2017.

Research output: Contribution to conferencePosterOther research output

2016

Compact Anomalous Transmission Filters for EUV Spectral Monitoring

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 11 Oct 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Experimental Demonstration of Multilayer Anomalous-Transmission Filters for Narrow-Band Transmission at 13.5 nm

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 21 Jun 2016, p. -.

Research output: Contribution to conferencePoster

Growth kinetics of Ru on Si, SiN and SiO2 studied by in-vacuo low energy ion scattering (LEIS)

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePosterOther research output

ion scattering
kinetics
coatings
oxidation
optical coatings

In-house X-ray Standing Wave study of LaN/B multilayer mirrors

Hendrikx, C. P., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePoster

Insitu stress measurement of thin film and multilayer growth

Reinink, J., van de Kruijs, R. W. E. & Bijkerk, F., 19 Jan 2016, p. -.

Research output: Contribution to conferencePoster

In-vacuo growth studies and thermal oxidation of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

In-vacuo growth studies of ZrO2 thin films

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 1 Dec 2016, p. -.

Research output: Contribution to conferencePosterOther research output

thin films
sharpness
ion scattering
caps
mirrors

Nonequilibrium electron-phonon dynamics in ruthenium thin films exposed to ultra-short laser pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, R., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Single-shot damage of Ru thin film induced by FEL fs pulses

Milov, I., Makhotkin, I. A., Enkisch, H., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Scholze, F., Siewert, F., Störmer, M., van de Kruijs, R. W. E., Keim, E. G., van Wolferen, H. A. G. M., Yatsyna, I., Jurek, M., Juha, L., Hajkova, V., Vozda, V., Burian, T., Saksl, K. & 11 others, Faatz, B., Keitel, B., Ploenjes, E., Schreiber, S., Toleikis, S., Loch, R. A., Hermann, M., Strobel, S., Nienhuys, H., Louis, E. & Bijkerk, F., 10 Nov 2016, p. -.

Research output: Contribution to conferencePosterOther research output

Spectroscopic ellipsometry for H diffusion

Soroka, O., Jose, A. A., van de Kruijs, R. W. E., Bijkerk, F. & Lee, C. J., 3 Apr 2016, p. -.

Research output: Contribution to conferencePoster

Study of crystal surface with asymmetrical X-Ray diffraction

Nikolaev, K., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E. & Bijkerk, F., 10 Jul 2016, p. -.

Research output: Contribution to conferencePoster

2015

Ab-initio simulated X-ray Absorption Spectroscopy of hexagonal Boron Nitride

Huber, S., van de Kruijs, R. W. E., Bijkerk, F., Gullikson, E. M. & Prendergast, D., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Co-existence of 2D and 3D growth in thermally oxidized ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 11 May 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Controlling interface chemistry in 6.x nm La/B multilayer optics

Kuznetsov, D., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 5 Oct 2015, p. -.

Research output: Contribution to conferencePosterOther research output

Electron density profile determination for multilayers

Zameshin, A., Makhotkin, I. A., Yakunin, S. N., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Jan 2015, p. -.

Research output: Contribution to conferencePoster

Translating the Borrmann effect into narrow-band EUV transmission windows

Barreaux, J. L. P., Kozhevnikov, I. V., Bastiaens, H. M. J., van de Kruijs, R. W. E., Bijkerk, F. & Boller, K. J., 28 Sep 2015, p. -.

Research output: Contribution to conferencePoster

2014

Advanced metrology for multilayer mirrors

Makhotkin, I. A., van de Kruijs, R. W. E., Yakunin, S. N., Zoethout, E., Louis, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePoster

13 Downloads (Pure)

Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 22 May 2014, p. -.

Research output: Contribution to conferencePosterOther research output

File
Scattering
Ions
Thin films
Oxidation
Oxygen

Surface and sub-surface thermal oxidation of ruthenium thin films

Coloma Ribera, R., van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. & Bijkerk, F., 21 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

ruthenium
oxidation
thin films
atomic force microscopy
x rays

XUV Optics: from deposition to application

Makhotkin, I. A., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Kuznetsov, D. & Bijkerk, F., 1 Jan 2014, p. -.

Research output: Contribution to conferencePosterOther research output

2013

Deposition and Oxidation Studies by Low-Energy Ion Scattering (LEIS)

Coloma Ribera, R., Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Engineering optical constants for broadband single layer anti-reflection coatings

Huber, S., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 25 Aug 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakinun, A. M. & Bijkerk, F., 22 Jan 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Infrared antireflective filtering for 6.x nm multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Louis, E. & Bijkerk, F., 6 Oct 2013, p. -.

Research output: Contribution to conferencePoster

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePosterOther research output

Multilayer development for the generation beyond EUVL: 6.x nm

Makhotkin, I. A., Zoethout, E., Nyabero, S. L., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E., Yakunin, A. M., Banine, V., Muellender, S. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

Suppression of long wavelength reflection from Extreme UV multilayer optics

Huang, Q., Medvedev, V., van den Boogaard, T., van der Meer, R., van de Kruijs, R. W. E., Huber, S., Bastiaens, H. M. J., Bruineman, C., Vratsov, B., Louis, E. & Bijkerk, F., 20 Jun 2013, p. -.

Research output: Contribution to conferencePoster

The Industrial Focus Group XUV Optics

Sturm, J. M., van de Kruijs, R. W. E., Yakshin, A., Lee, C. J., Louis, E. & Bijkerk, F., 16 Sep 2013, p. -.

Research output: Contribution to conferencePosterOther research output

2012

Bragg reflectors with IR suppression for Extreme Ultraviolet Lithography

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 10 Dec 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Bragg reflectors
lithography
retarding
reflectance
radiation

Chemical interactions at the interfaces of Mo/B4C/Si/B4C multilayers upon low-temperature annealing

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

annealing
barrier layers
grazing incidence
free electron lasers
laminates

Extreme Ultraviolet Bragg mirrors with suppressed infrared reflectivity properties

Medvedev, V., Yakshin, A., Louis, E., van de Kruijs, R. W. E., van den Boogaard, T., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 22 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

Bragg reflectors
reflectance
radiation
lithography
dense plasmas

Infrared suppression by hybrid EUV multilayer - IR lossy etalon structures

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 17 Jan 2012, p. -.

Research output: Contribution to conferencePosterOther research output

infrared suppression
retarding
radiation
coatings
laser plasmas

IR antireflective filtering for EUV multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

infrared suppression
Bragg reflectors
mirrors
reflectance
coatings

Modelling of shot damage tresholds of multilayer optics for short-wavelength FELs

Loch, R. A., Sobierajski, R., Louis, E., Bosgra, J., van de Kruijs, R. W. E., Makhotkin, I. A., Zoethout, E. & Bijkerk, F., 25 Jan 2012, p. -.

Research output: Contribution to conferencePoster

Multilayer development for the generation beyond EUV: 6.x nm

Makhotkin, I. A., Zoethout, E., van de Kruijs, R. W. E., Louis, E., Yakunin, A. M., Muellender, S. & Bijkerk, F., 21 Jun 2012, p. -.

Research output: Contribution to conferencePosterOther research output

11 Downloads (Pure)

Solid state diffusion in multilayered structures on a picometer lengthscale

van de Kruijs, R. W. E., Bosgra, J., Bruijn, S., Yakshin, A. & Bijkerk, F., 15 Sep 2012, p. -.

Research output: Contribution to conferencePosterOther research output

File
solid state
activation energy
grazing incidence
laminates
x ray diffraction