Robbert W.E. van de Kruijs

dr.ir.

  • 976 Citations
  • 18 h-Index
20032020
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Research Output 2003 2020

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Article
2019
1 Citation (Scopus)
23 Downloads (Pure)

Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K. V., Yakunin, S. N., Makhotkin, I. A., de la Rie, J., Medvedev, R. V., Rogachev, A. V., Trunckin, I. N., Vasiliev, A. L., Hendrikx, C. P., Gateshki, M., van de Kruijs, R. W. E. & Bijkerk, F., Mar 2019, In : Acta Crystallographica Section A: Foundations and Advances. 75, p. 342-351 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
X ray scattering
grazing incidence
Scanning Transmission Electron Microscopy
Multilayers
X-Rays

Hydrogenation dynamics of Ru capped y thin films

Soroka, O., Sturm, J. M., Van De Kruijs, R. W. E., Makhotkin, I. A., Nikolaev, K., Yakunin, S. N., Lee, C. J. & Bijkerk, F., 8 Oct 2019, In : Journal of applied physics. 126, 14, 145301.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
hydrogenation
thin films
ellipsometry
hydrogen
surface plasmon resonance
14 Downloads (Pure)

In-situ studies of silicide formation during growth of molybdenum-silicon interfaces

Reinink, J., Zameshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 7 Oct 2019, In : Journal of applied physics. 126, 13, 135304.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
molybdenum
ion scattering
silicon
tensile stress
availability
11 Downloads (Pure)

Nanoscale Transition Metal Thin Films: Growth Characteristics and Scaling Law for Interlayer Formation

Chandrasekaran, A., van de Kruijs, R. W. E., Sturm, J. M., Zameshin, A. & Bijkerk, F., 11 Dec 2019, In : ACS applied materials & interfaces. 11, 49, p. 46311−46326 16 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Scaling laws
Film growth
Transition metals
Thin films
Interfacial energy
1 Citation (Scopus)
109 Downloads (Pure)
Open Access
File
nitrogen ions
Ion bombardment
Ruthenium
ruthenium
bombardment
1 Downloads (Pure)

Sputtering and nitridation of transition metal surfaces under low energy, steady state nitrogen ion bombardment

Phadke, P., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 26 Nov 2019, (Accepted/In press) In : Applied surface science. 505, 144529.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Nitridation
nitrogen ions
Ion bombardment
metal surfaces
Transition metals
2018
2 Citations (Scopus)
13 Downloads (Pure)

Control of YH3 formation and stability via hydrogen surface adsorption and desorption

Soroka, O., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 15 Oct 2018, In : Applied surface science. 455, p. 70-74 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Hydrogen
Desorption
Adsorption
Yttrium
Thin films
2 Citations (Scopus)
65 Downloads (Pure)

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Makhotkin, I. A., Milov, I., Chalupský, J., Tiedtke, K., Enkisch, H., de Vries, G., Scholze, F., Siewert, F., Sturm, J. M., Nikolaev, K. V., van de Kruijs, R. W. E., Smithers, M. A., Van Wolferen, H. A. G. M., Keim, E. G., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Pelka, J. B., Juha, L. & 15 others, Hájková, V., Vozda, V., Sburian, T., Saksl, K., Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Donker, R., Mey, T. & Sobierajski, R., 1 Nov 2018, In : Journal of the Optical Society of America B: Optical Physics. 35, 11, p. 2799-2805 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
free electron lasers
ruthenium
ablation
shot
damage
10 Citations (Scopus)
49 Downloads (Pure)

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Makhotkin, I. A., Sobierajski, R., Chalupsky, J., Tiedtke, K., de Vries, G., Störmer, M., Scholze, F., Siewert, F., van de Kruijs, R. W. E., Milov, I., Louis, E., Jacyna, I., Jurek, M., Klinger, D., Nittler, L., Syryanyy, Y., Juha, L., Hájková, V., Vozda, V., Burian, T. & 13 others, Saksl, K., Faatz, B., Keitel, B., Plonjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T. & Enkisch, H., Jan 2018, In : Journal of synchrotron radiation. 25, 1, p. 77-84 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Free electron lasers
Radiation damage
yield point
radiation damage
free electron lasers
5 Citations (Scopus)
34 Downloads (Pure)

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Milov, I., Makhotkin, I. A., Sobierajski, R., Medvedev, N., lipp, V., Chalupsky, J., Sturm, J. M., Tiedtke, K., de Vries, G., Störmer, M., Siewert, F., van de Kruijs, R., Louis, E., Jacyna, I., Jurek, M., Juha, L., Hájková, V., Vozda, V., Burian, T., Saksl, K. & 13 others, Faatz, B., Keitel, B., Plönjes, E., Schreiber, S., Toleikis, S., Loch, R., Hermann, M., Strobel, S., Nienhuys, H. K., Gwalt, G., Mey, T., Enkisch, H. & Bijkerk, F., 23 Jul 2018, In : Optics express. 26, 15, p. 19665-19685 21 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
ultraviolet lasers
free electron lasers
shot
damage
thin films
1 Citation (Scopus)
60 Downloads (Pure)

Self-contained in-vacuum in situ thin film stress measurement tool

Reinink, J., Van De Kruijs, R. W. E. & Bijkerk, F., 14 May 2018, In : Review of scientific instruments. 89, 5, 6 p., 053904.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
stress measurement
Stress measurement
Vacuum
Thin films
vacuum
38 Downloads (Pure)

Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K. V., Makhotkin, I. A., Yakunin, S. N., Van De Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 1 Sep 2018, In : Acta Crystallographica Section A: Foundations and Advances. 74, 5, p. 545-552 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
specular reflection
grazing incidence
X-Ray Diffraction
Theoretical Models
Diffraction
2017
4 Citations (Scopus)

Detection of defect populations in superconductor boron subphosphide B12P2 through X-ray absorption spectroscopy

Huber, S., Gullikson, E., Meyer-Ilse, J., Frye, C. D., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2017, In : Journal of materials chemistry. A. 5, 12, p. 5737-5749 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

X ray absorption spectroscopy
Boron
Superconducting materials
Vacancies
Defects
2 Citations (Scopus)

Determining crystal phase purity in c-BP through X-ray absorption spectroscopy

Huber, S., Medvedev, V., Gullikson, E., Padavala, B., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2017, In : Physical chemistry chemical physics. 19, 12, p. 8174-8187 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

boron phosphides
X ray absorption spectroscopy
Boron
absorption spectroscopy
purity
4 Citations (Scopus)
301 Downloads (Pure)
Open Access
File
magnetron sputtering
oxidation
thin films
oxygen
photoelectron spectroscopy
122 Downloads (Pure)

Narrowband and tunable anomalous transmission filters for special monitoring in the extreme ultraviolet wavelength region

Barreaux, J. L. P., Kozhevnikov, I. V., Bayraktar, M., van de Kruijs, R. W. E., Bastiaens, H. M. J., Bijkerk, F. & Boller, K. J., 25 Jan 2017, In : Optics express. 25, 3, p. 1993-2008

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
narrowband
filters
wavelengths
incidence
standing waves
11 Citations (Scopus)

Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers

Philipsen, V., Luong, K. V., Souriau, L., Erdmann, A., Xu, D., Evanschitzky, P., Van De Kruijs, R. W. E., Edrisi, A., Scholze, F., Laubis, C., Irmscher, M., Naasz, S., Reuter, C. & Hendrickx, E., 1 Oct 2017, In : Journal of micro/nanolithography, MEMS, and MOEMS. 16, 4, 13 p., 041002.

Research output: Contribution to journalArticleAcademicpeer-review

absorbers (materials)
Masks
absorbers
masks
Metals
20 Citations (Scopus)
53 Downloads (Pure)

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang, Q., Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Louis, E. & Bijkerk, F., 21 Mar 2017, In : Applied physics reviews. 4, 1, 15 p., 011104.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
gratings
optics
monochromators
x rays
spectral sensitivity
2016
7 Citations (Scopus)
45 Downloads (Pure)

Electronegativity-dependent tin etching from thin films

Pachecka, M., Sturm, J. M., van de Kruijs, R. W. E., Lee, C. J. & Bijkerk, F., 29 Jul 2016, In : AIP advances. 6, 7, 9 p., 075222.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
tin
etching
thin films
hydrogen
availability
4 Citations (Scopus)
73 Downloads (Pure)

Exploiting the P L2,3 absorption edge for optics: spectroscopic and structural characterization of cubic boron phosphide thin films

Huber, S., Medvedev, V., Meyer-Ilse, J., Gullikson, E., Padavala, B., Edgar, J. H., Sturm, J. M., van de Kruijs, R. W. E., Prendergast, D. & Bijkerk, F., 2016, In : Optical materials express. 6, 12, p. 3946-3959 12.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Boron
Optics
Thin films
X ray absorption
Spectroscopy
20 Citations (Scopus)
210 Downloads (Pure)

Highly efficient blazed grating with multilayer coating for tender X-ray energies

Senf, F., Bijkerk, F., Eggenstein, F., Gwalt, G., Huang, Q., van de Kruijs, R. W. E., Kutz, O., Lemke, S., Louis, E., Mertin, M., Packe, I., Rudolph, I., Schafers, F., Siewert, F., Sokolov, A., Sturm, J. M., Waberski, C., Wang, Z., Wolf, J., Zeschke, T. & 1 others, Erko, A., 2016, In : Optics express. 24, 12, p. 13220-13230 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
gratings
coatings
x rays
retarding
energy
5 Citations (Scopus)
176 Downloads (Pure)

In vacuo growth studies of Ru thin films on Si, SiN, and SiO2 by high-sensitivity low energy ion scattering

Coloma Ribera, R., van de Kruijs, R. W. E., Sturm, J. M., Yakshin, A. & Bijkerk, F., 2016, In : Journal of applied physics. 120, 6, p. 065303- 13 p., 065303.

Research output: Contribution to journalArticleAcademicpeer-review

File
ion scattering
sensitivity
thin films
energy
oxygen
15 Citations (Scopus)
77 Downloads (Pure)

Oxygen-stabilized triangular defects in hexagonal boron nitride

Huber, S., Gullikson, E., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2016, In : Physical review B: Condensed matter and materials physics. 92, 245310, p. 1-7 7 p., 245310.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Boron nitride
boron nitrides
Oxygen
Defects
defects
10 Citations (Scopus)
51 Downloads (Pure)
File
Multilayers
Optical constants
X-Rays
X rays
Incidence
4 Citations (Scopus)

Self-healing in B12P2 through Mediated Defect Recombination

Huber, S., Gullikson, E., Frye, C. D., Edgar, J. H., van de Kruijs, R. W. E., Bijkerk, F. & Prendergast, D., 2016, In : Chemistry of materials. 28, 22, p. 8415-8428

Research output: Contribution to journalArticleAcademicpeer-review

Vacancies
Defects
Boron
Boron Compounds
Particle beams
5 Citations (Scopus)
45 Downloads (Pure)

Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation

Kuznetsov, D., Yakshin, A., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 2016, In : AIP advances. 6, 9 p., 115117.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
mirrors
reflectance
laminates
passivity
thin films
2015
5 Citations (Scopus)

Anisotropy of heat conduction in Mo/Si multilayers

Medvedev, V., Yang, J., Schmidt, A. J., Yakshin, A., van de Kruijs, R. W. E., Zoethout, E. & Bijkerk, F., 2015, In : Journal of applied physics. 118, 8, p. - 085101.

Research output: Contribution to journalArticleAcademicpeer-review

conductive heat transfer
anisotropy
thermal conductivity
mean free path
tensors
Reflectivity
grazing incidence
Annealing
laminates
Multilayer
3 Citations (Scopus)
121 Downloads (Pure)

Determination of oxygen diffusion kinetics during thin film ruthenium oxidation

Coloma Ribera, R., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2015, In : Journal of applied physics. 118, p. 055303-

Research output: Contribution to journalArticleAcademicpeer-review

File
ruthenium
oxidation
kinetics
oxygen
thin films
14 Citations (Scopus)

Emissivity of freestanding membranes with thin metal coatings

van Zwol, P. J., Vles, D. F., Voorthuijzen, W. P., Péter, M., Vermeulen, H., Zande, W. J., Sturm, J. M., van de Kruijs, R. W. E. & Bijkerk, F., 7 Dec 2015, In : Journal of applied physics. 118, 21, p. 213107- 21.

Research output: Contribution to journalArticleAcademicpeer-review

metal coatings
emissivity
membranes
heat
silicon nitrides
24 Citations (Scopus)

High-reflectance La/B-based multilayer mirror for 6.x  nm wavelength

Kuznetsov, D., Yakshin, A., Sturm, J. M., van de Kruijs, R. W. E., Louis, E. & Bijkerk, F., 2015, In : Optics letters. 40, 16, p. 3378-3781

Research output: Contribution to journalArticleAcademicpeer-review

mirrors
reflectance
laminates
wavelengths
passivity
9 Citations (Scopus)
1 Downloads (Pure)

PEALD AlN: Controlling growth and film crystallinity

Banerjee, S., Aarnink, A. A. I., van de Kruijs, R. W. E., Kovalgin, A. Y. & Schmitz, J., 10 Jun 2015, In : Physica status solidi. C. 12, 7, p. 1036-1042 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
59 Downloads (Pure)

Phosphorus-based compounds for EUV multilayer optics materials

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E. & Bijkerk, F., 2015, In : Optical materials express. 5, 6, p. 1450-1459

Research output: Contribution to journalArticleAcademicpeer-review

File
2014
19 Citations (Scopus)
189 Downloads (Pure)

Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures

Yakunin, S. N., Makhotkin, I. A., Nikolaev, K. V., van de Kruijs, R. W. E., Chuev, M. A. & Bijkerk, F., 2014, In : Optics express. 22, 17, p. 20076-20086 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
laminates
reflectance
grazing incidence
x rays
sensitivity
7 Citations (Scopus)

Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Makhotkin, I. A., Bosgra, J. & Bijkerk, F., 2014, In : Journal of micro/nanolithography, MEMS, and MOEMS. 13, 1, p. 013014-013014-5 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Multilayers
thermal stability
reflectance
Radiation
annealing
3 Citations (Scopus)

Model independent X-ray standing wave analysis of periodic multilayer structures

Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E., Chuev, M. A., Pashaev, E. M., Zoethout, E., Louis, E., Seregin, S. Y., Subbotin, I. A., Novikov, D., Bijkerk, F. & Kovalchuk, M. V., 2014, In : Journal of applied physics. 115, 13, p. - 134303.

Research output: Contribution to journalArticleAcademicpeer-review

standing waves
laminates
fluorescence
x rays
profiles
12 Citations (Scopus)
73 Downloads (Pure)

Subwavelength single layer absorption resonance antireflection coatings

Huber, S. P., van de Kruijs, R. W. E., Yakshin, A. E., Zoethout, E., Boller, K. . J. & Bijkerk, F., 3 Jan 2014, In : Optics express. 22, 1, p. 490-497

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
antireflection coatings
retarding
thin films
molybdenum
phase shift
7 Citations (Scopus)
356 Downloads (Pure)

Surface and sub-surface thermal oxidation of thin ruthenium films

Coloma Ribera, R., van de Kruijs, R. W. E., Kokke, S., Zoethout, E., Yakshin, A. & Bijkerk, F., 2014, In : Applied physics letters. 105, 13, p. 131601- 131601.

Research output: Contribution to journalArticleAcademicpeer-review

File
ruthenium
oxidation
oxides
oxide films
reflectance
5 Citations (Scopus)

UV spectral filtering by surface structures multilayer mirrors

Huang, Q., Paardekooper, D. M., Zoethout, E., Medvedev, V., van de Kruijs, R. W. E., Bosgra, J., Louis, E. & Bijkerk, F., 2014, In : Optics letters. 39, 5, p. 1185-1188 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

laminates
retarding
mirrors
2013
3 Citations (Scopus)

Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 2013, In : Applied physics letters. 103, 9, p. - 3 p., 093105.

Research output: Contribution to journalArticleAcademicpeer-review

thermal stability
compacting
centroids
periodic variations
optimization
10 Citations (Scopus)

Interlayer growth in Mo/B4C multilayered structures upon thermal annealing

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E., von Blanckenhage, G., Bosgra, J., Loch, R. A. & Bijkerk, F., 2013, In : Journal of applied physics. 113, 14, p. 144310-1-144310-6 6 p., 144310.

Research output: Contribution to journalArticleAcademicpeer-review

interlayers
annealing
expansion
causes
stress relaxation
5 Citations (Scopus)
50 Downloads (Pure)

Mo/Si multilayer-coated amplitude division beam splitters for XUV radiation sources

Sobierajski, R., Loch, R. A., van de Kruijs, R. W. E., Louis, E., von Blanckenhagen, G., Gullikson, E. M., Siewert, F., Wawro, A. & Bijkerk, F., 2013, In : Journal of synchrotron radiation. 20, 2, p. 249-257 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

File
beam splitters
Optical devices
radiation sources
division
Multilayers
6 Citations (Scopus)

Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography

Medvedev, V., van de Kruijs, R. W. E., Yakshin, A., Novikova, N. N., Krivtsun, V. M., Yakunin, A. M. & Bijkerk, F., 2013, In : Applied physics letters. 103, 22, p. 221114-1-21114-4 221114.

Research output: Contribution to journalArticleAcademicpeer-review

lithography
selectivity
mirrors
coatings
infrared radiation
29 Citations (Scopus)
43 Downloads (Pure)

Short period La/B and LaN/B multilayer mirrors for ~6.8 nm wavelength

Makhotkin, I. A., Zoethout, E., van de Kruijs, R., Yakunin, S. N., Louis, E., Yakunin, A. M., Banine, V., Müllender, S. & Bijkerk, F., 2 Dec 2013, In : Optics express. 21, 24, p. 29894-29904 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
mirrors
reflectance
wavelengths
grazing incidence
laminates
2012
9 Citations (Scopus)

Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors

Medvedev, V., Yakshin, A., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. N. & Bijkerk, F., 1 Apr 2012, In : Optics letters. 37, 7, p. 1169-1171 3 p.

Research output: Contribution to journalArticleAcademicpeer-review

Bragg reflectors
coatings
retarding
acceptability
phase shift
5 Citations (Scopus)

Ion assisted growth of B4C diffusion barrier layers in Mo/Si multilayered structures

Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 16 Mar 2012, In : Journal of applied physics. 111, 6, p. 064303-1-064303-5 5 p., 064303.

Research output: Contribution to journalArticleAcademicpeer-review

barrier layers
thermal stability
ions
grazing incidence
physics
2 Citations (Scopus)

Non-constant diffusion characteristics of nanoscopic Mo-Si interlayer growth

Bosgra, J., Verhoeven, J., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 4 Sep 2012, In : Thin solid films. 522, p. 228-232 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Crystallites
interlayers
Multilayers
Activation energy
X ray diffraction
5 Citations (Scopus)

Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors

Bosgra, J., Zoethout, E., Eerden, A. M. J., Verhoeven, J., van de Kruijs, R. W. E., Yakshin, A. & Bijkerk, F., 20 Dec 2012, In : Applied Optics. 51, 36, p. 8541-8548 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

laminates
Structural properties
Multilayers
mirrors
x ray absorption
5 Citations (Scopus)

Thermally induced interface chemistry in Mo/B 4C/Si/B 4C multilayered films

Nyabero, S. L., van de Kruijs, R. W. E., Yakshin, A., Zoethout, E. & Bijkerk, F., 10 Sep 2012, In : Journal of applied physics. 112, 5, p. 054317-1-054317-5 5 p., 054317.

Research output: Contribution to journalArticleAcademicpeer-review

chemistry
annealing
expansion
barrier layers
grazing incidence
2011
8 Citations (Scopus)

Carbon induced extreme ultraviolet (EUV) reflectance loss characterized using visible-light ellipsometry

Chen, J., Louis, E., Wormeester, H., Harmsen, R., van de Kruijs, R. W. E., Lee, C. J., van Schaik, W. & Bijkerk, F., 2011, In : Measurement science and technology. 22, 10, p. - 8 p., 105705.

Research output: Contribution to journalArticleAcademicpeer-review

Ellipsometry
Carbon
Optical constants
Multilayers
Extreme ultraviolet lithography