Robbert W.E. van de Kruijs

dr.ir.

  • 976 Citations
  • 18 h-Index
20032020
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Research Output 2003 2020

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Conference article
2007
34 Citations (Scopus)

Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition

Yakshin, A. E., Van De Kruijs, R. W. E., Nedelcu, I., Zoethout, E., Louis, E., Bijkerk, F., Enkisch, H. & Müllender, S., 15 Oct 2007, In : Proceedings of SPIE - the international society for optical engineering. 6517, PART 1, 65170I.

Research output: Contribution to journalConference articleAcademicpeer-review

Reflectance
Multilayer
Multilayers
barrier layers
reflectance

Substrate recovery layers for EUVL optics: Effects on multilayer reflectivity and surface roughness

Nedelcu, I., Van De Kruijs, R. W. E., Yakshin, A. E., Louis, E., Bijkerk, F. & Muellender, S., 16 Oct 2007, In : Proceedings of SPIE - the international society for optical engineering. 6517, PART 2, 651730.

Research output: Contribution to journalConference articleAcademicpeer-review

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
Reflectivity
Surface Roughness
Multilayer
2005
4 Citations (Scopus)

Enhanced performance of EUV multilayer coatings

Louis, E., Yakshin, A. E., Zoethout, E., Van De Kruijs, R. W. E., Nedelcu, I., Van Der Westen, S. A., Tsarfati, T., Bijkerk, F., Enkisch, H., Müllender, S., Wolschrijn, B. & Mertens, B., 1 Dec 2005, In : Proceedings of SPIE - the international society for optical engineering. 5900, p. 1-4 4 p., 590002.

Research output: Contribution to journalConference articleAcademicpeer-review

Coating
coating
Multilayer
Multilayers
coatings
11 Citations (Scopus)

Multilayer coatings for the EUVL Process Development Tool

Louis, E., Zoethout, E., Van De Kruijs, R. W. E., Nedelcu, I., Yakshin, A. E., Van Der Westen, S. A., Tsarfati, T., Bijkerk, F., Enkisch, H. & Müllender, S., 19 Sep 2005, In : Progress in Biomedical Optics and Imaging - Proceedings of SPIE. 5751, II, p. 1170-1177 8 p., 154.

Research output: Contribution to journalConference articleAcademicpeer-review

Extreme ultraviolet lithography
Multilayers
Ions
coatings
illuminators
2004
41 Citations (Scopus)

Progress in EUV optics lifetime expectations

Mertens, B., Weiss, M., Meiling, H., Klein, R., Louis, E., Kurt, R., Wedowski, M., Trenkler, H., Wolschrijn, B., Jansen, R., Van De Runstraat, A., Moors, R., Spee, K., Plöger, S. & Van De Kruijs, R., 1 Jan 2004, In : Microelectronic engineering. 73-74, p. 16-22 7 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Optics
Carbon
optics
life (durability)
Contamination
3 Citations (Scopus)

Subatomic accuracy in EUVL multilayer coatings

Zoethout, E., Suter, P., Van De Kruijs, R. W. E., Yakshin, A. E., Louis, E., Bijkerk, F., Enkisch, H. & Müllender, S., 18 Aug 2004, In : Proceedings of SPIE - the international society for optical engineering. 5374, PART 2, p. 892-896 5 p.

Research output: Contribution to journalConference articleAcademicpeer-review

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
Coating
coating
Multilayer
2003
25 Citations (Scopus)

Stress mitigation in Mo/Si multilayers for EUV lithography

Zoethout, E., Sipos, G., Van De Kruijs, R. W. E., Yakshin, A. E., Louis, E., Müllender, S. & Bijkerk, F., 1 Oct 2003, In : Proceedings of SPIE - the international society for optical engineering. 5037 II, p. 872-878 7 p.

Research output: Contribution to journalConference articleAcademicpeer-review

EUV Lithography
Extreme ultraviolet lithography
Multilayer
Multilayers
lithography