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Robertus Adrianus Maria Wolters

prof.dr.ir.

20002018
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Fingerprint Dive into the research topics where Robertus Adrianus Maria Wolters is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 6 Similar Profiles
titanium nitrides Physics & Astronomy
Tungsten Chemical Compounds
Polysilicon Engineering & Materials Science
Metals Chemical Compounds
Silicon Chemical Compounds
Contact resistance Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy

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Research Output 2000 2018

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: PatentProfessional

Tungsten
Hydrogen
Substrates
Metals
Wire
2 Citations (Scopus)
1 Downloads (Pure)
Tungsten
Fluorine
Atomic layer deposition
Hydrogen
Tungsten deposits
8 Citations (Scopus)
1 Downloads (Pure)

Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

Research output: Contribution to journalArticleAcademicpeer-review

Spectroscopic ellipsometry
Atomic layer deposition
Wire
Tungsten
Hydrogen
6 Citations (Scopus)
8 Citations (Scopus)

Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Activities 2014 2015

  • 2 Oral presentation
  • 1 Invited talk

Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
13 Jul 201517 Jul 2015

Activity: Talk or presentationOral presentation

A comparison of tungsten films grown by CVD and hot-wire assisted ALD

Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Speaker)
28 Jun 20151 Jul 2015

Activity: Talk or presentationOral presentation

Growth and Properties of Subnanometer Thin Titanium Nitride Films

Alexey Y. Kovalgin (Invited speaker), Hao Van Bui (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
10 Mar 201414 Mar 2014

Activity: Talk or presentationInvited talk