Robertus Adrianus Maria Wolters

prof.dr.ir.

20002018

Research output per year

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Research Output

Selective deposition of Tungsten

Kovalgin, A. Y., Yang, M., Aarnink, A. A. I. & Wolters, R. A. M., 25 Jan 2018, Patent No. US 2018/0025939 A1, Priority date 6 Jun 2017, Priority No. 15/615,489

Research output: Patent

  • 2 Downloads (Pure)
  • 3 Citations (Scopus)
    1 Downloads (Pure)

    Hot-Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

    Kovalgin, A. Y., Yang, M., Banerjee, S., Apaydin, R. O., Aarnink, A. A. I., Kinge, S. & Wolters, R. A. M., 8 May 2017, In : Advanced materials interfaces. 4, 18, p. 1-11 11 p., 1700058.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 14 Citations (Scopus)
    1 Downloads (Pure)
    Open Access
    File
  • 8 Citations (Scopus)
    26 Downloads (Pure)

    Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes

    Yang, M., Aarnink, A. A. I., Kovalgin, A. Y., Wolters, R. A. M. & Schmitz, J., 25 May 2015, In : Physica status solidi A. 212, 7, p. 1607-1614 8 p.

    Research output: Contribution to journalArticleAcademicpeer-review

    10 Citations (Scopus)

    Activities

    • 2 Oral presentation
    • 1 Invited talk

    Hot-wire assisted ALD of tungsten films: In-Situ study of the interplay between ALD, CVD and etching modes

    Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
    13 Jul 201517 Jul 2015

    Activity: Talk or presentationOral presentation

    A comparison of tungsten films grown by CVD and hot-wire assisted ALD

    Mengdi Yang (Speaker), Antonius A.I. Aarnink (Contributor), Alexey Y. Kovalgin (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Speaker)
    28 Jun 20151 Jul 2015

    Activity: Talk or presentationOral presentation

    Growth and Properties of Subnanometer Thin Titanium Nitride Films

    Alexey Y. Kovalgin (Invited speaker), Hao Van Bui (Contributor), Robertus A.M. Wolters (Contributor), Jurriaan Schmitz (Contributor)
    10 Mar 201414 Mar 2014

    Activity: Talk or presentationInvited talk