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Theodorus Simon Joseph Lammerink

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1984 …2017
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Research Output 1984 2017

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Conference contribution
2017
100 Downloads (Pure)

Universal modular fluidic and electronic interfacing platform for microfluidic devices

Alveringh, D., Sanders, R. G. P., Groenesteijn, J., Lammerink, T. S. J., Wiegerink, R. J. & Lötters, J. C., 4 Oct 2017, Proceedings of the 3rd Conference on MicroFluidic Handling Systems, MFHS 2017. p. 106-109 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Open Access
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Fluidics
Microfluidics
Sensors
Pressure sensors
Resonators
2015
5 Citations (Scopus)

Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Lötters, J. C., Groenesteijn, J., van der Wouden, E. J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 21 Jun 2015, Proceedings of the18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 1798-1801 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

12 Downloads (Pure)

Readout circuit for capacitance ratio measurement

Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C. & Wiegerink, R. J., 21 Sep 2015, 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: Universiteit Twente, p. 1 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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2014
47 Downloads (Pure)

A compact micro Coriolis mass flow sensor with flow bypass for a monopropellant micro propulsion system

Groenesteijn, J., Dijkstra, M., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 8 Oct 2014, Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg im Breisgau, Germany: Albert-Ludwigs-Universität Freiburg, p. 21-24 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
9 Citations (Scopus)
15 Downloads (Pure)

Integrated multi-parameter flow measurement system

Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 26 Jan 2014, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 975-978 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
1 Citation (Scopus)

Real-time composition determination of gas mixtures

Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J. & Wiegerink, R. J., 2 Nov 2014, Proceedings of IEEE Sensors 2014. Valencia, Spain: IEEE Instrumentation & Measurement Society, p. 1640-1643 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

27 Downloads (Pure)

Truly calorimetric flow sensor chip based on surface channel technology

Sparreboom, W., van der Wouden, E. J., Lammerink, T. S. J. & Lötters, J. C., 8 Oct 2014, Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg, Germany: University of Freiburg, p. 53-56 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2013
6 Citations (Scopus)

A crossed-wire 2-dimensional acoustic particle velocity sensor

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Nov 2013, IEEE Sensors 2013. USA: IEEE Computer Society, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

A novel two dimensional particle velocity sensor

Pjetri, O., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 2 Jun 2013, International Congress on Acoustics. Acoustical Society of America through the American Institute of Physics, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system

Groenesteijn, J., Zhang, H-N., Zhang, H., Tiggelaar, R. M., Lammerink, T. S. J., Lötters, J. C., Gardeniers, J. G. E. & Wiegerink, R. J., 27 Oct 2013, Proceedings of MicroTAS 2013. Stoughton, USA: Printing House Inc., p. T.042c 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
72 Downloads (Pure)

Integrated micro Wobbe index meter towards on-chip energy content measurement

Lötters, J. C., Lammerink, T. S. J., Pap, M. G., Sanders, R. G. P., de Boer, M. J., Mouris, A. J. & Wiegerink, R. J., 22 Jan 2013, Technical Digest of the 26th IEEE International Conference on Micro Electro Mechanical Systems. Taipei, Taiwan: IEEE ROBOTICS AND AUTOMATION SOCIETY, p. 965-968 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
3 Citations (Scopus)
1 Downloads (Pure)

Large range multi-axis fingertip force sensor

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., Ma, K. & Krijnen, G. J. M., 16 Jun 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA: IEEE Electron Devices Society, p. 2737-2740 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Downloads (Pure)

Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system

Lötters, J. C., Groenesteijn, J., Dijkstra, M., Droogendijk, H., Lammerink, T. S. J. & Wiegerink, R. J., 14 May 2013, Proceedings of Sensor 2013. Wunstorf, Germany: AMA Services GmbH, p. 508-512 5 p. (Proceedings AMA conferences 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2 Citations (Scopus)

Parametric amplification in a micro Coriolis mass flow sensor: reduction of power dissipation without loss of sensitivity

Groenesteijn, J., Droogendijk, H., Wiegerink, R. J., Lammerink, T. S. J., Lötters, J. C., Sanders, R. G. P. & Krijnen, G. J. M., 4 Nov 2013, Proceedings of IEEE Sensors 2013. USA: IEEE Circuits & Systems Society, p. 1626-1629 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 3 Nov 2013, IEEE Sensors 2013. Los Alamitos, CA, USA: IEEE, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2012
86 Downloads (Pure)

Compact mass flow meter based on a micro Coriolis flow sensor

Sparreboom, W., Katerberg, M. R., Lammerink, T. S. J., Postma, F. M., Haneveld, J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 10 Oct 2012, Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. 30-33 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Integrated wafer-through fluidic connection for surface channel technology

Groenesteijn, J., de Boer, M. J., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 9 Sep 2012, Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop, MME 2012. Ilmenau, Germany: Verlag ISLE, Betriebsstatte des ISLE e.V., p. A03# 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

36 Downloads (Pure)

Micro Coriolis mass flow sensor for chemical micropropulsion systems

Wiegerink, R. J., Lammerink, T. S. J., Groenesteijn, J., Dijkstra, M. & Lötters, J. C., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede: Universiteit Twente, p. 107-110 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
29 Downloads (Pure)

PowerGlove, Concepts and current results

Veltink, P. H., Kortier, H. G., Schepers, H. M., Sluiter, V. IJ., Brookhuis, R. A., Lammerink, T. S. J. & Wiegerink, R. J., 18 Jul 2012, Proceedings of XII International Symposium on 3D Analysis of Human Movement, DAHM 2012. Leardini, A. & Stagni, R. (eds.). Bologna, Italy: Universita di Bologna, p. 42-45 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
6 Citations (Scopus)
1 Downloads (Pure)

Scalable six-axis force-torque sensor with a large range for biomechanical applications

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J. & de Boer, M. J., 29 Jan 2012, Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. USA: IEEE Computer Society, p. 595-598 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Downloads (Pure)

The application of micro- and nanofluidics in Wobbe index meters

Wiegerink, R. J., Lötters, J. C., Lammerink, T. S. J., Pap, M. G. & Mouris, A. J., 10 Oct 2012, Proceedings of the 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. 166-167 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Wafer-through access trenches for surface channel technology

Groenesteijn, J., de Boer, M. J., Lammerink, T. S. J., Lötters, J. C. & Wiegerink, R. J., 10 Oct 2012, 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2011
22 Downloads (Pure)

Advancements in Biomimetic Hair Flow-Sensor Arrays

Dagamseh, A. M. K., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., Jun 2011, Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Norway: Vestfold University College, Norway, p. - 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
2 Citations (Scopus)
1 Downloads (Pure)

Force sensor for measuring power transfer between the human body and the environment

Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J. & Elwenspoek, M. C., 6 Jun 2011, 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA: IEEE, p. 2042-2045 4 p. (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; vol. 16).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
2 Downloads (Pure)

Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure

Wiegerink, R. J., Lammerink, T. S. J., Haneveld, J., Hageman, T. A. G. & Lötters, J. C., Jan 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). Piscataway, NJ: IEEE, p. 1135-1138 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

mass flow
atmospheric pressure
sensors
chips
electrodes
20 Downloads (Pure)

Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

Groenesteijn, J., Lammerink, T. S. J., Lötters, J. C., Haneveld, J. & Wiegerink, R. J., 19 Jun 2011, Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011. Toensberg, Norway: Micromechanics and Micro systems Europe, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
7 Citations (Scopus)

Single chip flow sensing system with a dynamic flow range of more than 4 decades

Lammerink, T. S. J., Lötters, J. C., Wiegerink, R. J., Groenesteijn, J. & Haneveld, J., 5 Jun 2011, Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE, p. 890-893 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Sensors
Hot Temperature
8 Citations (Scopus)
46 Downloads (Pure)

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

Dagamseh, A. M. K., Lammerink, T. S. J., Sanders, R. G. P., Wiegerink, R. J. & Krijnen, G. J. M., Jan 2011, 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

Syed Nawazuddin, M. B., Lammerink, T. S. J., Wiegerink, R. J., Berenschot, J. W., de Boer, M. J. & Elwenspoek, M. C., 1 Aug 2011, Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE Electron Devices Society, p. 434-437 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2010
3 Citations (Scopus)
24 Downloads (Pure)

Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition

Dagamseh, A. M. K., Bruinink, C. M., Kolster, M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., May 2010, DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. EDA Publshing, p. 48-51 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
14 Downloads (Pure)

Biomimetic Hair Sensor Arrays: From Inspiration To Implementation

Jaganatharaja, R. K., Bruinink, C. M., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 8 Apr 2010, The Sense of Contact 12. FHI - Federatie Van Technologiebranches, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
17 Citations (Scopus)
57 Downloads (Pure)

Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements

Dagamseh, A. M. K., Bruinink, C. M., Droogendijk, H., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., Nov 2010, IEEE Sensors 2010 conference. IEEE, p. 2251-2254 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
49 Downloads (Pure)

Learning from Crickets: Artificial Hair-Sensor Array Developments

Krijnen, G. J. M., Lammerink, T. S. J. & Wiegerink, R. J., 1 Nov 2010, IEEE Sensors 2010 Conference. USA: IEEE, p. 2218-2223 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2009
46 Citations (Scopus)
50 Downloads (Pure)

Advancements in technology and design of biomimetic flow-sensor arrays

Bruinink, C. M., Jaganatharaja, R. K., de Boer, M. J., Berenschot, J. W., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 24 Jan 2009, 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009). Piscataway: IEEE Computer Society Press, p. 152-155 152 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
8 Citations (Scopus)
31 Downloads (Pure)

Ambient temperature-gradient compensated low-drift thermopile flow sensor

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Wiegerink, R. J. & Elwenspoek, M. C., Jan 2009, 22nd IEEE International Conference on MEMS. Piscataway, NJ: IEEE, p. 479-482 4 p. 10.1109/MEMSYS.2009.4805423

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

A simulation study of the dipole source localisation applied on bio-mimetic flow-sensor linear array

Dagamseh, A. M. K., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., Nov 2009, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht, the Netherlands: Technology Foundation (STW), p. 534-537 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
14 Downloads (Pure)

Developing the ultimate biomimetic flow-sensor array

Bruinink, C. M., Jaganatharaja, R. K., de Boer, M. J., Berenschot, J. W., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 26 Oct 2009, Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing. Juelich, Germany: Forschungszentrum Juelich GmbH, p. 65 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
11 Citations (Scopus)
74 Downloads (Pure)

Fabrication of dense flow sensor arrays on flexible membranes

Izadi, N., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., Lammerink, T. S. J., Jansen, H. V., Mogdans, J. & Krijnen, G. J. M., 21 Jun 2009, Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems. USA: IEEE, p. 1075-1078 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
8 Citations (Scopus)
54 Downloads (Pure)

Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows

Jaganatharaja, R. K., Bruinink, C. M., Hagedoorn, B. M., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 21 Jun 2009, Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems. U.S.A: IEEE, p. 1541-1544 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File

Highly sensitive biomimetic flow sensor arrays

Jaganatharaja, R. K., Bruinink, C. M., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 8 Apr 2009, The Sense of Contact 11. Leusden: FHI - Federatie Van Technologiebranches, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

11 Downloads (Pure)

Interfacing and processing artificial hairs array for flow pattern recognition

Dagamseh, A. M. K., Bruinink, C. M., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 8 Apr 2009, The Sense of Contact 11. FHI - Federatie Van Technologiebranches, p. - 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
18 Citations (Scopus)
46 Downloads (Pure)

Micro coriolis mass flow sensor with integrated capacitive readout

Haneveld, J., Lammerink, T. S. J., de Boer, M. J. & Wiegerink, R. J., Jan 2009, IEEE 22nd International Conference on MEMS. Piscataway, Inc: IEEE, p. 463-466 4 p. 10.1109/MEMSYS.2009.4805419

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
13 Downloads (Pure)

Optimized biomimetic hair sensor arrays for sensing oscillating air flows

Jaganatharaja, R. K., Bruinink, C. M., Kolster, M., Lammerink, T. S. J., Wiegerink, R. J. & Krijnen, G. J. M., 26 Oct 2009, Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing. Juelich, Germany: Forschungszentrum Juelich GmbH, p. 16 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

File
37 Downloads (Pure)

Parallel plate structures for optical modulation and casimir force measurement

Syed Nawazuddin, M. B., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 22 Sep 2009, MME 09 - Proceedings 20th MicroMechanics Europe 2009. Toulouse: LAAS-CNRS, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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2008
17 Downloads (Pure)

Fabrication scheme for dense aquatic flow sensor arrays

Izadi, N., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., Lammerink, T. S. J., Jansen, H. V. & Krijnen, G. J. M., Sep 2008, Proceedings of Eurosensors XXII. Germany: Verein Deutscher Ingenieure e.V. (VDI), p. 912-915 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
25 Citations (Scopus)
88 Downloads (Pure)

Highly sensitive micro coriolis mass flow sensor

Haneveld, J., Lammerink, T. S. J., Dijkstra, M., Droogendijk, H., Droogendijk, H., de Boer, M. J. & Wiegerink, R. J., 13 Jan 2008, MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. Piscataway: IEEE Computer Society, p. 920-923 4 p. 10.1109/MEMSYS.2008.4443807

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
15 Downloads (Pure)

Interfacing of artificial hairs array for complex flow pattern recognition

Dagamseh, A. M. K., Wiegerink, R. J., Lammerink, T. S. J. & Krijnen, G. J. M., 28 Sep 2008, Micromechanics Europe Workshop 2008. Aachen: RWTH Aachen University, p. 129-132 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
12 Citations (Scopus)
47 Downloads (Pure)

Low-Drift flow sensor with zero-offset thermopile-based power feedback

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 9 Apr 2008, Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS. EDA Publisher, p. 4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
7 Citations (Scopus)
62 Downloads (Pure)

Low-Drift U-Shaped Thermopile Flow Sensor

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J. & Elwenspoek, M. C., 26 Oct 2008, Sensors, 2008 IEEE. IEEE, p. 66-69 4 p. 10.1109/ICSENS.2008.4716384

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

File
2 Citations (Scopus)
36 Downloads (Pure)

MEMS-based Micro Coriolis mass flow sensor

Haneveld, J., Brouwer, D. M., Mehendale, A., Zwikker, R., Lammerink, T. S. J., de Boer, M. J. & Wiegerink, R. J., 18 May 2008, Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology: May 18th-May 22nd 2008, Zürich, Switzerland. Bedford, UK: EUSPEN, p. 560-564

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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mass flow
microelectromechanical systems
sensors
liquid flow
silicon nitrides