Research output per year
Research output per year
Personal profile
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Dive into the research topics where Antonius A.I. Aarnink is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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Chemisorption of H radical generated volatile Si hydrides on Ru films
Gaffarov, I., van der Zouw, K., Aarnink, T., Sturm, J. M., Makhotkin, I. A. & Ackermann, M., 1 Dec 2025, In: Surfaces and Interfaces. 78, 9 p., 107956.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile12 Downloads (Pure) -
Highly Reactive Atomic Hydrogen as an Alternative Reactant for Atomic Layer Deposition of Platinum Using MeCpPtMe3
Van Bui, H., Grillo, F., Nguyen, D. M., Dang, M. D., Aarnink, A. A. I., Wolters, R. A. M., van Ommen, J. R. & Kovalgin, A. Y., 31 Jul 2025, In: Journal of Physical Chemistry C. 129, 30, p. 13822-13829 8 p.Research output: Contribution to journal › Article › Academic › peer-review
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Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6
van der Zouw, K., van der Wel, B. Y., Sturm, J. M., Aarnink, A. A. I., Wolters, R. A. M., Gravesteijn, D. J. & Kovalgin, A. Y., 1 Mar 2025, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 43, 2, 022407.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile70 Downloads (Pure) -
Electrical behavior of ALD-molybdenum films in the thin-film limit
Van Der Zouw, K., Dulfer, S. D., Aarnink, A. A. I. & Kovalgin, A. Y., 10 May 2024, 2024 IEEE 36th International Conference on Microelectronic Test Structures, ICMTS 2024 - Proceedings. IEEE, (IEEE International Conference on Microelectronic Test Structures).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Open AccessFile1 Citation (Scopus)372 Downloads (Pure) -
From hot wire to cold finger:methods to detect the unstable product SnH4 of Sn etching
Onnink, A., Aarnink, A. A. I., Schmitz, J. & Kovalgin, A., 2024. 1 p.Research output: Contribution to conference › Poster › Academic
Open AccessFile44 Downloads (Pure)
Activities
- 9 Oral presentation
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Towards Deposition of Metallic Molybdenum Films from Molybdenum Hexacarbonyl in a Process Involving an Intermediate ALD Step and Subsequent Reduction
van der Zouw, K. (Speaker), Sturm, M. (Contributor), Aarnink, A. A. I. (Contributor) & Kovalgin, A. Y. (Contributor)
7 Aug 2024Activity: Talk or presentation › Oral presentation
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Electrical characterization of hot-wire assisted atomic layer deposited Tungsten films
van der Zouw, K. (Speaker), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Contributor)
19 Mar 2019Activity: Talk or presentation › Oral presentation
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Purely Thermal Deposition of Polycrystalline Gallium Nitride Films at 400 °C
Banerjee, S. (Speaker), Dutta, S. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor) & Kovalgin, A. Y. (Contributor)
29 Jul 2018 → 1 Aug 2018Activity: Talk or presentation › Oral presentation
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Hot wire technique as a radical source for atomic layer deposition of metal and metal nitride films
Banerjee, S. (Speaker), Apaydin, R. O. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor), Gravesteijn, D. J. (Contributor), de Jong, M. P. (Contributor) & Kovalgin, A. Y. (Contributor)
11 Jun 2017 → 17 Jun 2017Activity: Talk or presentation › Oral presentation
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Effects of oxygen, nitrogen and fluorine sources on the formation of α- and β-phase Tungsten films by hot-wire assisted ALD
Yang, M. (Contributor), Aarnink, A. A. I. (Contributor), Schmitz, J. (Contributor) & Kovalgin, A. Y. (Speaker)
11 Jun 2017 → 14 Jun 2017Activity: Talk or presentation › Oral presentation
Press/Media
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Hot-Wire assisted ALD: Another example of radical-enhanced atomic layer deposition
Kovalgin, A. Y., Aarnink, A. A. I. & Yang, M.
2/06/20
1 Media contribution
Press/Media: Research