Physics & Astronomy
mass flow
100%
sensors
69%
actuation
64%
silicon nitrides
50%
piezoelectric transducers
43%
combustion chambers
41%
actuators
33%
vibration meters
33%
fabrication
31%
flames
25%
ceramics
25%
chambers
22%
thin films
21%
heaters
19%
microbalances
19%
chips
17%
silicon
16%
flow measurement
16%
extinction
16%
quenching
15%
fluidics
14%
lead zirconate titanates
14%
combustion temperature
13%
microchannels
13%
natural gas
12%
low voltage
12%
readout
11%
pulsed laser deposition
11%
lasers
11%
phase shift
10%
propellants
10%
temperature sensors
10%
nitrogen
10%
gas temperature
10%
Q factors
9%
platinum
9%
tubes
8%
isolation
8%
output
8%
temperature gradients
8%
water
8%
sensitivity
7%
reactors
7%
characterization
6%
standard deviation
6%
heating
5%
fluids
5%
temperature
5%
Engineering & Materials Science
Lead zirconate titanate
45%
Gas fuels
43%
Fabrication
41%
Microfluidics
40%
Sensors
38%
Permittivity
37%
Thin films
35%
Actuators
28%
Piezoelectric actuators
22%
Electrodes
21%
Fluids
18%
Silicon
14%
Acoustic impedance
13%
Silicon nitride
11%
Patents and inventions
11%
Fluidics
10%
Flow of fluids
8%
Gases
8%
Energy dissipation
8%
Oxygen
7%
Heating
6%
Earth & Environmental Sciences
fuel gas
51%
combustion
28%
reactor
26%
sensor
25%
detection
22%
index
19%
gas mixture
14%
trench
11%
fixation
9%
method
8%
demand
8%
air
6%
monitoring
6%
gas
6%
energy
6%