20172019
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Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 51 Similar Profiles
heaters Physics & Astronomy
Fabrication Engineering & Materials Science
Etching Engineering & Materials Science
Gas fuels Engineering & Materials Science
fluidics Physics & Astronomy
combustion chambers Physics & Astronomy
Combustors Engineering & Materials Science
Microfluidics Engineering & Materials Science

Research Output 2017 2019

  • 3 Conference contribution
  • 2 Abstract

High power Si sidewall heaters for fluidic application fabricated by trench-assisted surface channel technology

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Sanders, R. G. P., Wiegerink, R. J. & Lötters, J. C., Jan 2019, 2019 IEEE 32nd Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Vol. 32. p. 648-651 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

fluidics
heaters
heating
silicon
thermal expansion

Design principles and fabrication method for a miniaturized fuel gas combustion reactor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Gas fuels
Combustors
Fabrication
MEMS
Mechanical stability

Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 14 Oct 2017, Conference Proceedings: The 3rd Conference on MicroFluidic Handling Systems. Enschede, Vol. 3. p. 114-117

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Open Access
File
Microfluidics
Fabrication
Silicon
Substrates
Electronics industry

Fabrication process for a large volume silicon nitride micro-combustor

Zhao, Y., Veltkamp, H-W., de Boer, M. J., Zeng, Y., Groenesteijn, J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 450.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
combustion chambers
silicon nitrides
flames
fabrication
chambers

Selective SiO2 etching in three dimensional structures using parylene-C as mask

Veltkamp, H-W., Zhao, Y., de Boer, M. J., Wiegerink, R. J. & Lötters, J. C., 19 Sep 2017, p. 380.

Research output: Contribution to conferenceAbstractOther research output

Open Access
File
Masks
Etching
Oxides
Packaging materials
Reactive ion etching

Activities 2016 2017

  • 2 Organising a conference, workshop, ...

3rd Conference on MicroFluidic Handling Systems, MFHS 2017

Joost Conrad Lötters (Chair), Gerald Urban (Chair), Remco J. Wiegerink (Organiser), Susan Janse (Organiser), Dennis Alveringh (Organiser), Remco G.P. Sanders (Organiser), Henk-Willem Veltkamp (Organiser), Jarno Groenesteijn (Organiser), Yiyuan Zhao (Organiser), Yaxiang Zeng (Organiser)
4 Oct 20176 Oct 2017

Activity: Participating in or organising an eventOrganising a conference, workshop, ...

10th International Nanoscience Student Conference, INASCON 2016

Henk-Willem Veltkamp (Chair), Pepijn Beekman (Organiser), Yiyuan Zhao (Organiser), Yorick Alexander Birkhölzer (Organiser), Maaike Rump (Organiser), Dilu Dilu George Mathew (Organiser), Bram van de Ven (Organiser), Peter van der Linde (Organiser), Haye Ype Witteveen (Organiser)
2 Aug 20165 Aug 2016

Activity: Participating in or organising an eventOrganising a conference, workshop, ...