μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor

T.V.P. Schut*, R.J. Wiegerink, J.C. Lötters

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Abstract

In this paper we present μ-Coriolis mass flow sensor devices with improved flow sensitivity. An FEM model is set up which can estimate various parameters of a μ-Coriolis device such as resonance frequency, spring constants and Coriolis forces. These parameters are then used in an analytical model to determine flow sensitivity. The presented FEM model allows for fast simulation of these properties, enabling optimization by varying many dimensions and other properties of the designs and see their influence on flow sensitivity. Three devices have been fabricated based on simulation results. All have been characterized and a comparison was made between different devices and between measurement and simulation results. The model predicts the resonance frequencies with less than 10% error for all except 1 (out of 6) devices. The predicted sensitivities are within 6–40% accurate depending on the type of device. Flow sensitivity is improved approximately 4–11 times with respect to a reference device of typical dimensions.

Original languageEnglish
Article number111289
JournalMicroelectronic engineering
Volume226
DOIs
Publication statusPublished - 1 Apr 2020

Keywords

  • UT-Hybrid-D
  • FEM
  • Flow
  • Model
  • Optimization
  • Sensitivity
  • Sensor
  • Surface Channel
  • Coriolis

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