1-D nanochannels fabricated in polyimide

    Research output: Contribution to journalArticleAcademicpeer-review

    55 Citations (Scopus)

    Abstract

    A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.
    Original languageUndefined
    Pages (from-to)161-163
    Number of pages3
    JournalLab on a chip
    Volume4
    Issue number3
    DOIs
    Publication statusPublished - 2004

    Keywords

    • IR-47958
    • METIS-219018

    Cite this

    @article{1bb3c7ece0e345839a8b4a7d47bef8fe,
    title = "1-D nanochannels fabricated in polyimide",
    abstract = "A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.",
    keywords = "IR-47958, METIS-219018",
    author = "Eijkel, {Jan C.T.} and Bomer, {Johan G.} and Tas, {Niels Roelof} and {van den Berg}, Albert",
    year = "2004",
    doi = "10.1039/b315859d",
    language = "Undefined",
    volume = "4",
    pages = "161--163",
    journal = "Lab on a chip",
    issn = "1473-0197",
    publisher = "Royal Society of Chemistry",
    number = "3",

    }

    1-D nanochannels fabricated in polyimide. / Eijkel, Jan C.T.; Bomer, Johan G.; Tas, Niels Roelof; van den Berg, Albert.

    In: Lab on a chip, Vol. 4, No. 3, 2004, p. 161-163.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - 1-D nanochannels fabricated in polyimide

    AU - Eijkel, Jan C.T.

    AU - Bomer, Johan G.

    AU - Tas, Niels Roelof

    AU - van den Berg, Albert

    PY - 2004

    Y1 - 2004

    N2 - A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.

    AB - A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.

    KW - IR-47958

    KW - METIS-219018

    U2 - 10.1039/b315859d

    DO - 10.1039/b315859d

    M3 - Article

    VL - 4

    SP - 161

    EP - 163

    JO - Lab on a chip

    JF - Lab on a chip

    SN - 1473-0197

    IS - 3

    ER -