1-D nanochannels fabricated in polyimide

Research output: Contribution to journalArticleAcademicpeer-review

55 Citations (Scopus)

Abstract

A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.
Original languageUndefined
Pages (from-to)161-163
Number of pages3
JournalLab on a chip
Volume4
Issue number3
DOIs
Publication statusPublished - 2004

Keywords

  • IR-47958
  • METIS-219018

Cite this

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title = "1-D nanochannels fabricated in polyimide",
abstract = "A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.",
keywords = "IR-47958, METIS-219018",
author = "Eijkel, {Jan C.T.} and Bomer, {Johan G.} and Tas, {Niels Roelof} and {van den Berg}, Albert",
year = "2004",
doi = "10.1039/b315859d",
language = "Undefined",
volume = "4",
pages = "161--163",
journal = "Lab on a chip",
issn = "1473-0197",
publisher = "Royal Society of Chemistry",
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1-D nanochannels fabricated in polyimide. / Eijkel, Jan C.T.; Bomer, Johan G.; Tas, Niels Roelof; van den Berg, Albert.

In: Lab on a chip, Vol. 4, No. 3, 2004, p. 161-163.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - 1-D nanochannels fabricated in polyimide

AU - Eijkel, Jan C.T.

AU - Bomer, Johan G.

AU - Tas, Niels Roelof

AU - van den Berg, Albert

PY - 2004

Y1 - 2004

N2 - A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.

AB - A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.

KW - IR-47958

KW - METIS-219018

U2 - 10.1039/b315859d

DO - 10.1039/b315859d

M3 - Article

VL - 4

SP - 161

EP - 163

JO - Lab on a chip

JF - Lab on a chip

SN - 1473-0197

IS - 3

ER -