165 K microcooler demonstrator with sorption compressor and micromachined cold stage

Johannes Faas Burger; Hermanus J.M. ter Brake; Herman J. Holland; J.H. Seppenwoolde; Johan W. Berenschot; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Horst Rogalla

165 K microcooler demonstrator with sorption compressor and micromachined cold stage

Johannes Faas Burger, Hermanus J.M. ter Brake, Herman J. Holland, J.H. Seppenwoolde, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Horst Rogalla

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	University of Twente, The Netherlands
Publication status	Published - 12 Oct 2000

Keywords

METIS-131125

Cite this

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title = "165 K microcooler demonstrator with sorption compressor and micromachined cold stage",

keywords = "METIS-131125",

author = "Burger, {Johannes Faas} and {ter Brake}, {Hermanus J.M.} and Holland, {Herman J.} and J.H. Seppenwoolde and Berenschot, {Johan W.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and Horst Rogalla",

year = "2000",

month = oct,

day = "12",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - 165 K microcooler demonstrator with sorption compressor and micromachined cold stage

AU - Burger, Johannes Faas

AU - ter Brake, Hermanus J.M.

AU - Holland, Herman J.

AU - Seppenwoolde, J.H.

AU - Berenschot, Johan W.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Rogalla, Horst

PY - 2000/10/12

Y1 - 2000/10/12

KW - METIS-131125

M3 - Other contribution

CY - University of Twente, The Netherlands

ER -