165 K microcooler demonstrator with sorption compressor and micromachined cold stage

Johannes Faas Burger, Hermanus J.M. ter Brake, Herman J. Holland, J.H. Seppenwoolde, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Horst Rogalla

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationUniversity of Twente, The Netherlands
    Publication statusPublished - 12 Oct 2000


    • METIS-131125

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