165 k microcooler operating with a sorption compressor and a micromachined cold stage

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Abstract

This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.
Original languageEnglish
Title of host publicationCryocoolers 11
EditorsR.G. Ross Jr.
Place of PublicationBoston, MA
PublisherSpringer
Pages551-560
Number of pages10
ISBN (Electronic)978-0-306-47112-4
ISBN (Print)978-0-306-46567-3
DOIs
Publication statusPublished - 2002
Event11th International Cryocooler Conference, Cryocoolers-11 2000 - Keystone, United States
Duration: 20 Jun 200022 Jun 2000
Conference number: 11

Conference

Conference11th International Cryocooler Conference, Cryocoolers-11 2000
Abbreviated titleCryocoolers
CountryUnited States
CityKeystone
Period20/06/0022/06/00

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