165 K Microcooler Operating with a Sorption Compressor and a Micromachined Cold Stage

Hermanus J.M. ter Brake, Johannes Faas Burger, Herman J. Holland, Michael Curt Elwenspoek, Horst Rogalla

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationDKV-Tagungsbericht 29. Jahrgang
    PublisherDeutscher Kälte- und Klimatechnischer Verein e.V.
    Publication statusPublished - 2002


    • METIS-284852

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