165 k microcooler operating with a sorption compressor and a micromachined cold stage

Johannes Faas Burger; Herman J. Holland; J.H. Seppenwoolde; Johan W. Berenschot; Hermanus J.M. ter Brake; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Horst Rogalla

doi:10.1007/0-306-47112-4_69

165 k microcooler operating with a sorption compressor and a micromachined cold stage

Johannes Faas Burger
, Herman J. Holland
, J.H. Seppenwoolde
, Johan W. Berenschot
, Hermanus J.M. ter Brake
, Johannes G.E. Gardeniers
, Michael Curt Elwenspoek
, Horst Rogalla

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.

Original language	English
Title of host publication	Cryocoolers 11
Editors	R.G. Ross Jr.
Place of Publication	Boston, MA
Publisher	Springer
Pages	551-560
Number of pages	10
ISBN (Electronic)	978-0-306-47112-4
ISBN (Print)	978-0-306-46567-3
DOIs	https://doi.org/10.1007/0-306-47112-4_69
Publication status	Published - 2002
Event	11th International Cryocooler Conference, Cryocoolers-11 2000 - Keystone, United States Duration: 20 Jun 2000 → 22 Jun 2000 Conference number: 11

Conference

Conference	11th International Cryocooler Conference, Cryocoolers-11 2000
Abbreviated title	Cryocoolers
Country/Territory	United States
City	Keystone
Period	20/06/00 → 22/06/00

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10.1007/0-306-47112-4_69

Cite this

@inproceedings{fbe02932152f4beb8724784cd51ffd37,

title = "165 k microcooler operating with a sorption compressor and a micromachined cold stage",

abstract = "This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.",

author = "Burger, \{Johannes Faas\} and Holland, \{Herman J.\} and J.H. Seppenwoolde and Berenschot, \{Johan W.\} and \{ter Brake\}, \{Hermanus J.M.\} and Gardeniers, \{Johannes G.E.\} and Elwenspoek, \{Michael Curt\} and Horst Rogalla",

year = "2002",

doi = "10.1007/0-306-47112-4\_69",

language = "English",

isbn = "978-0-306-46567-3",

pages = "551--560",

editor = "\{Ross Jr.\}, R.G.",

booktitle = "Cryocoolers 11",

publisher = "Springer",

address = "Germany",

note = "11th International Cryocooler Conference, Cryocoolers-11 2000, Cryocoolers ; Conference date: 20-06-2000 Through 22-06-2000",

}

Burger, JF, Holland, HJ, Seppenwoolde, JH, Berenschot, JW , ter Brake, HJM , Gardeniers, JGE, Elwenspoek, MC & Rogalla, H 2002, 165 k microcooler operating with a sorption compressor and a micromachined cold stage. in RG Ross Jr. (ed.), Cryocoolers 11. Springer, Boston, MA, pp. 551-560, 11th International Cryocooler Conference, Cryocoolers-11 2000, Keystone, Colorado, United States, 20/06/00. https://doi.org/10.1007/0-306-47112-4_69

TY - GEN

T1 - 165 k microcooler operating with a sorption compressor and a micromachined cold stage

AU - Burger, Johannes Faas

AU - Holland, Herman J.

AU - Seppenwoolde, J.H.

AU - Berenschot, Johan W.

AU - ter Brake, Hermanus J.M.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Rogalla, Horst

N1 - Conference code: 11

PY - 2002

Y1 - 2002

N2 - This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.

AB - This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.

U2 - 10.1007/0-306-47112-4_69

DO - 10.1007/0-306-47112-4_69

M3 - Conference contribution

SN - 978-0-306-46567-3

SP - 551

EP - 560

BT - Cryocoolers 11

A2 - Ross Jr., R.G.

PB - Springer

CY - Boston, MA

T2 - 11th International Cryocooler Conference, Cryocoolers-11 2000

Y2 - 20 June 2000 through 22 June 2000

ER -

165 k microcooler operating with a sorption compressor and a micromachined cold stage

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