169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.
Original languageUndefined
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages418-421
Number of pages4
ISBN (Print)0-7803-5998-4
DOIs
Publication statusPublished - 21 Jan 2001

Keywords

  • IR-36298
  • EWI-12899
  • METIS-201524

Cite this

Burger, Johannes Faas ; Holland, Herman J. ; Berenschot, Johan W. ; Seppenwolde, Jan-Henry ; ter Brake, Hermanus J.M. ; Gardeniers, Johannes G.E. ; Elwenspoek, Michael Curt. / 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 2001. pp. 418-421
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abstract = "This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.",
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author = "Burger, {Johannes Faas} and Holland, {Herman J.} and Berenschot, {Johan W.} and Jan-Henry Seppenwolde and {ter Brake}, {Hermanus J.M.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",
year = "2001",
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doi = "10.1109/MEMSYS.2001.906567",
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booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",
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169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. / Burger, Johannes Faas; Holland, Herman J.; Berenschot, Johan W.; Seppenwolde, Jan-Henry; ter Brake, Hermanus J.M.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 2001. p. 418-421.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

AU - Burger, Johannes Faas

AU - Holland, Herman J.

AU - Berenschot, Johan W.

AU - Seppenwolde, Jan-Henry

AU - ter Brake, Hermanus J.M.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

PY - 2001/1/21

Y1 - 2001/1/21

N2 - This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.

AB - This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.

KW - IR-36298

KW - EWI-12899

KW - METIS-201524

U2 - 10.1109/MEMSYS.2001.906567

DO - 10.1109/MEMSYS.2001.906567

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BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

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Burger JF, Holland HJ, Berenschot JW, Seppenwolde J-H, ter Brake HJM, Gardeniers JGE et al. 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society. 2001. p. 418-421 https://doi.org/10.1109/MEMSYS.2001.906567