169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

Johannes Faas Burger; Herman J. Holland; Johan W. Berenschot; Jan-Henry Seppenwolde; Hermanus J.M. ter Brake; Johannes G.E. Gardeniers; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2001.906567

169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

Johannes Faas Burger, Herman J. Holland, Johan W. Berenschot, Jan-Henry Seppenwolde, Hermanus J.M. ter Brake, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

21 Citations (Scopus)

251 Downloads (Pure)

Abstract

This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.

Original language	English
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE
Pages	418-421
Number of pages	4
ISBN (Print)	0-7803-5998-4
DOIs	https://doi.org/10.1109/MEMSYS.2001.906567
Publication status	Published - 21 Jan 2001
Event	Interlaken, Zwitserland: Proceedings of Micro Electro Mechanical Sensors (MEMS) Conference - Duration: 21 Jan 2001 → 25 Jan 2001

Conference

Conference	Interlaken, Zwitserland
Period	21/01/01 → 25/01/01

Keywords

IR-36298
EWI-12899
METIS-201524

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10.1109/MEMSYS.2001.906567

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Burger, J. F., Holland, H. J., Berenschot, J. W., Seppenwolde, J.-H., ter Brake, H. J. M., Gardeniers, J. G. E., & Elwenspoek, M. C. (2001). 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 418-421). IEEE. https://doi.org/10.1109/MEMSYS.2001.906567

@inproceedings{657965f43b5e4c14ac48433dd8d08c48,

title = "169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers",

abstract = "This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.",

keywords = "IR-36298, EWI-12899, METIS-201524",

author = "Burger, {Johannes Faas} and Holland, {Herman J.} and Berenschot, {Johan W.} and Jan-Henry Seppenwolde and {ter Brake}, {Hermanus J.M.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",

year = "2001",

month = jan,

day = "21",

doi = "10.1109/MEMSYS.2001.906567",

language = "English",

isbn = "0-7803-5998-4",

pages = "418--421",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "Interlaken, Zwitserland : Proceedings of Micro Electro Mechanical Sensors (MEMS) Conference ; Conference date: 21-01-2001 Through 25-01-2001",

}

Burger, JF , Holland, HJ , Berenschot, JW, Seppenwolde, J-H, ter Brake, HJM , Gardeniers, JGE & Elwenspoek, MC 2001, 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, pp. 418-421, Interlaken, Zwitserland, 21/01/01. https://doi.org/10.1109/MEMSYS.2001.906567

169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. / Burger, Johannes Faas ; Holland, Herman J.; Berenschot, Johan W. et al.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, 2001. p. 418-421.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

AU - Burger, Johannes Faas

AU - Holland, Herman J.

AU - Berenschot, Johan W.

AU - Seppenwolde, Jan-Henry

AU - ter Brake, Hermanus J.M.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

PY - 2001/1/21

Y1 - 2001/1/21

N2 - This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.

AB - This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s.

KW - IR-36298

KW - EWI-12899

KW - METIS-201524

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DO - 10.1109/MEMSYS.2001.906567

M3 - Conference contribution

SN - 0-7803-5998-4

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EP - 421

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway

T2 - Interlaken, Zwitserland

Y2 - 21 January 2001 through 25 January 2001

ER -

169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers

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