29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions

A.J. Nijdam, E. van Veenendaal, Johannes G.E. Gardeniers, A.P.M. Kentgens, G.H. Nachtegaal, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

We present results of 29Si-nuclear magnetic resonance experiments on a large number of KOH solutions in which silicon has been dissolved. The goal of the experiments is to clarify the chemical composition of concentrated alkaline solutions after etching of silicon. It is confirmed that the initial etching product of wet-chemical etching of silicon in KOH is a silicate monomer. Increasing the silicon content of the solution gives rise to silicate polymerization products. The often reported aging of etching solutions is due to silica in the etchant.
Original languageUndefined
Pages (from-to)2195-2198
Number of pages4
JournalJournal of the Electrochemical Society
Volume147
Issue number147 (6)
DOIs
Publication statusPublished - Jun 2000

Keywords

  • METIS-111721
  • IR-14653
  • EWI-12986

Cite this

Nijdam, A. J., van Veenendaal, E., Gardeniers, J. G. E., Kentgens, A. P. M., Nachtegaal, G. H., & Elwenspoek, M. C. (2000). 29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147(147 (6)), 2195-2198. https://doi.org/10.1149/1.1393506
Nijdam, A.J. ; van Veenendaal, E. ; Gardeniers, Johannes G.E. ; Kentgens, A.P.M. ; Nachtegaal, G.H. ; Elwenspoek, Michael Curt. / 29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. In: Journal of the Electrochemical Society. 2000 ; Vol. 147, No. 147 (6). pp. 2195-2198.
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Nijdam, AJ, van Veenendaal, E, Gardeniers, JGE, Kentgens, APM, Nachtegaal, GH & Elwenspoek, MC 2000, '29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions', Journal of the Electrochemical Society, vol. 147, no. 147 (6), pp. 2195-2198. https://doi.org/10.1149/1.1393506

29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. / Nijdam, A.J.; van Veenendaal, E.; Gardeniers, Johannes G.E.; Kentgens, A.P.M.; Nachtegaal, G.H.; Elwenspoek, Michael Curt.

In: Journal of the Electrochemical Society, Vol. 147, No. 147 (6), 06.2000, p. 2195-2198.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - 29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions

AU - Nijdam, A.J.

AU - van Veenendaal, E.

AU - Gardeniers, Johannes G.E.

AU - Kentgens, A.P.M.

AU - Nachtegaal, G.H.

AU - Elwenspoek, Michael Curt

PY - 2000/6

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N2 - We present results of 29Si-nuclear magnetic resonance experiments on a large number of KOH solutions in which silicon has been dissolved. The goal of the experiments is to clarify the chemical composition of concentrated alkaline solutions after etching of silicon. It is confirmed that the initial etching product of wet-chemical etching of silicon in KOH is a silicate monomer. Increasing the silicon content of the solution gives rise to silicate polymerization products. The often reported aging of etching solutions is due to silica in the etchant.

AB - We present results of 29Si-nuclear magnetic resonance experiments on a large number of KOH solutions in which silicon has been dissolved. The goal of the experiments is to clarify the chemical composition of concentrated alkaline solutions after etching of silicon. It is confirmed that the initial etching product of wet-chemical etching of silicon in KOH is a silicate monomer. Increasing the silicon content of the solution gives rise to silicate polymerization products. The often reported aging of etching solutions is due to silica in the etchant.

KW - METIS-111721

KW - IR-14653

KW - EWI-12986

U2 - 10.1149/1.1393506

DO - 10.1149/1.1393506

M3 - Article

VL - 147

SP - 2195

EP - 2198

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

SN - 0013-4651

IS - 147 (6)

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