@inproceedings{461685aaaa394fef873fd9d2a27209f9,
title = "2D-finite element simulations for long range capacitive position sensor",
author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
year = "2002",
month = nov,
day = "30",
language = "English",
isbn = "90-73461-33-2",
booktitle = "Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002",
publisher = "STW",
note = "Semiconductor Sensor and Actuator Technology, SeSens 2002 ; Conference date: 29-11-2002 Through 30-11-2002",
}