2D-finite element simulations for long range capacitive position sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
    Place of PublicationVeldhoven
    PublisherSTW
    Number of pages5
    ISBN (Print)90-73461-33-2
    Publication statusPublished - 30 Nov 2002
    EventSemiconductor Sensor and Actuator Technology, SeSens 2002 - Veldhoven, Netherlands
    Duration: 29 Nov 200230 Nov 2002

    Workshop

    WorkshopSemiconductor Sensor and Actuator Technology, SeSens 2002
    Country/TerritoryNetherlands
    CityVeldhoven
    Period29/11/0230/11/02

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