2D finite element simulations for long range capacitive position sensor

A.A. Kuijpers; Gijsbertus J.M. Krijnen; Remco J. Wiegerink; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

2D finite element simulations for long range capacitive position sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of MME 2002 Conference
Place of Publication	Sinaia, Romenia
Pages	181-184
Publication status	Published - 6 Oct 2002
Event	13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania Duration: 6 Oct 2002 → 8 Oct 2002

Workshop

Workshop	13th Micromechanics Europe Workshop, MME 2002
Abbreviated title	MME
Country/Territory	Romania
City	Sinaia
Period	6/10/02 → 8/10/02

Keywords

METIS-207752
IR-43930

20 Citations
1 Conference contribution

2D-finite element simulations for long range capacitive position sensor
Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 30 Nov 2002, Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Veldhoven: STW, 5 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

@inproceedings{14bdf10c8d0a43e3a09cf832badd979f,

title = "2D finite element simulations for long range capacitive position sensor",

keywords = "METIS-207752, IR-43930",

author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "2002",

month = oct,

day = "6",

language = "Undefined",

isbn = "973-0-02472-3",

pages = "181--184",

booktitle = "Proceedings of MME 2002 Conference",

note = "null ; Conference date: 06-10-2002 Through 08-10-2002",

}

TY - GEN

T1 - 2D finite element simulations for long range capacitive position sensor

AU - Kuijpers, A.A.

AU - Krijnen, Gijsbertus J.M.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2002/10/6

Y1 - 2002/10/6

KW - METIS-207752

KW - IR-43930

M3 - Conference contribution

SN - 973-0-02472-3

SP - 181

EP - 184

BT - Proceedings of MME 2002 Conference

CY - Sinaia, Romenia

Y2 - 6 October 2002 through 8 October 2002

ER -

2D finite element simulations for long range capacitive position sensor

Workshop

Keywords

Research output

2D-finite element simulations for long range capacitive position sensor

Cite this