2D finite element simulations for long range capacitive position sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    19 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProceedings of MME 2002 Conference
    Place of PublicationSinaia, Romenia
    Pages181-184
    Publication statusPublished - 6 Oct 2002
    Event13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania
    Duration: 6 Oct 20028 Oct 2002

    Workshop

    Workshop13th Micromechanics Europe Workshop, MME 2002
    Abbreviated titleMME
    CountryRomania
    CitySinaia
    Period6/10/028/10/02

    Keywords

    • METIS-207752
    • IR-43930

    Cite this

    Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J., & Elwenspoek, M. C. (2002). 2D finite element simulations for long range capacitive position sensor. In Proceedings of MME 2002 Conference (pp. 181-184). Sinaia, Romenia.
    Kuijpers, A.A. ; Krijnen, Gijsbertus J.M. ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; Elwenspoek, Michael Curt. / 2D finite element simulations for long range capacitive position sensor. Proceedings of MME 2002 Conference. Sinaia, Romenia, 2002. pp. 181-184
    @inproceedings{14bdf10c8d0a43e3a09cf832badd979f,
    title = "2D finite element simulations for long range capacitive position sensor",
    keywords = "METIS-207752, IR-43930",
    author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
    year = "2002",
    month = "10",
    day = "6",
    language = "Undefined",
    isbn = "973-0-02472-3",
    pages = "181--184",
    booktitle = "Proceedings of MME 2002 Conference",

    }

    Kuijpers, AA, Krijnen, GJM, Wiegerink, RJ, Lammerink, TSJ & Elwenspoek, MC 2002, 2D finite element simulations for long range capacitive position sensor. in Proceedings of MME 2002 Conference. Sinaia, Romenia, pp. 181-184, 13th Micromechanics Europe Workshop, MME 2002, Sinaia, Romania, 6/10/02.

    2D finite element simulations for long range capacitive position sensor. / Kuijpers, A.A.; Krijnen, Gijsbertus J.M.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

    Proceedings of MME 2002 Conference. Sinaia, Romenia, 2002. p. 181-184.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - 2D finite element simulations for long range capacitive position sensor

    AU - Kuijpers, A.A.

    AU - Krijnen, Gijsbertus J.M.

    AU - Wiegerink, Remco J.

    AU - Lammerink, Theodorus S.J.

    AU - Elwenspoek, Michael Curt

    PY - 2002/10/6

    Y1 - 2002/10/6

    KW - METIS-207752

    KW - IR-43930

    M3 - Conference contribution

    SN - 973-0-02472-3

    SP - 181

    EP - 184

    BT - Proceedings of MME 2002 Conference

    CY - Sinaia, Romenia

    ER -

    Kuijpers AA, Krijnen GJM, Wiegerink RJ, Lammerink TSJ, Elwenspoek MC. 2D finite element simulations for long range capacitive position sensor. In Proceedings of MME 2002 Conference. Sinaia, Romenia. 2002. p. 181-184