2D finite element simulations for long range capacitive position sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

19 Citations (Scopus)
Original languageUndefined
Title of host publicationProceedings of MME 2002 Conference
Place of PublicationSinaia, Romenia
Pages181-184
Publication statusPublished - 6 Oct 2002
Event13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania
Duration: 6 Oct 20028 Oct 2002

Workshop

Workshop13th Micromechanics Europe Workshop, MME 2002
Abbreviated titleMME
CountryRomania
CitySinaia
Period6/10/028/10/02

Keywords

  • METIS-207752
  • IR-43930

Cite this

@inproceedings{14bdf10c8d0a43e3a09cf832badd979f,
title = "2D finite element simulations for long range capacitive position sensor",
keywords = "METIS-207752, IR-43930",
author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
year = "2002",
month = "10",
day = "6",
language = "Undefined",
isbn = "973-0-02472-3",
pages = "181--184",
booktitle = "Proceedings of MME 2002 Conference",

}

Kuijpers, AA, Krijnen, GJM, Wiegerink, RJ, Lammerink, TSJ & Elwenspoek, MC 2002, 2D finite element simulations for long range capacitive position sensor. in Proceedings of MME 2002 Conference. Sinaia, Romenia, pp. 181-184, 13th Micromechanics Europe Workshop, MME 2002, Sinaia, Romania, 6/10/02.

2D finite element simulations for long range capacitive position sensor. / Kuijpers, A.A.; Krijnen, Gijsbertus J.M.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

Proceedings of MME 2002 Conference. Sinaia, Romenia, 2002. p. 181-184.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - 2D finite element simulations for long range capacitive position sensor

AU - Kuijpers, A.A.

AU - Krijnen, Gijsbertus J.M.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2002/10/6

Y1 - 2002/10/6

KW - METIS-207752

KW - IR-43930

M3 - Conference contribution

SN - 973-0-02472-3

SP - 181

EP - 184

BT - Proceedings of MME 2002 Conference

CY - Sinaia, Romenia

ER -

Kuijpers AA, Krijnen GJM, Wiegerink RJ, Lammerink TSJ, Elwenspoek MC. 2D finite element simulations for long range capacitive position sensor. In Proceedings of MME 2002 Conference. Sinaia, Romenia. 2002. p. 181-184