2D finite element simulations for long range capacitive position sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    19 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProceedings of MME 2002 Conference
    Place of PublicationSinaia, Romenia
    Pages181-184
    Publication statusPublished - 6 Oct 2002
    Event13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania
    Duration: 6 Oct 20028 Oct 2002

    Workshop

    Workshop13th Micromechanics Europe Workshop, MME 2002
    Abbreviated titleMME
    CountryRomania
    CitySinaia
    Period6/10/028/10/02

    Keywords

    • METIS-207752
    • IR-43930

    Cite this

    Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J., & Elwenspoek, M. C. (2002). 2D finite element simulations for long range capacitive position sensor. In Proceedings of MME 2002 Conference (pp. 181-184). Sinaia, Romenia.