2D-finite element simulations for long range capacitive position sensor

A.A. Kuijpers; Gijsbertus J.M. Krijnen; Remco J. Wiegerink; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

2D-finite element simulations for long range capacitive position sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
Place of Publication	Veldhoven
Publisher	STW
Number of pages	5
ISBN (Print)	90-73461-33-2
Publication status	Published - 30 Nov 2002
Event	Semiconductor Sensor and Actuator Technology, SeSens 2002 - Veldhoven, Netherlands Duration: 29 Nov 2002 → 30 Nov 2002

Workshop

Workshop	Semiconductor Sensor and Actuator Technology, SeSens 2002
Country/Territory	Netherlands
City	Veldhoven
Period	29/11/02 → 30/11/02

1 Conference contribution
1 Article

2d-finite-element simulations for long-range capacitive position sensor
Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 13 Jun 2003, In: Journal of micromechanics and microengineering. 13, 4, p. S183-S189 7 p.
Research output: Contribution to journal › Article › Academic › peer-review
19 Citations (Scopus)

4 Downloads (Pure)
2D finite element simulations for long range capacitive position sensor
Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. J. & Elwenspoek, M. C., 6 Oct 2002, Proceedings of MME 2002 Conference. Sinaia, Romenia, p. 181-184
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

@inproceedings{461685aaaa394fef873fd9d2a27209f9,

title = "2D-finite element simulations for long range capacitive position sensor",

author = "A.A. Kuijpers and Krijnen, \{Gijsbertus J.M.\} and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and Elwenspoek, \{Michael Curt\}",

year = "2002",

month = nov,

day = "30",

language = "English",

isbn = "90-73461-33-2",

booktitle = "Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002",

publisher = "STW",

note = "Semiconductor Sensor and Actuator Technology, SeSens 2002 ; Conference date: 29-11-2002 Through 30-11-2002",

}

TY - GEN

T1 - 2D-finite element simulations for long range capacitive position sensor

AU - Kuijpers, A.A.

AU - Krijnen, Gijsbertus J.M.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2002/11/30

Y1 - 2002/11/30

M3 - Conference contribution

SN - 90-73461-33-2

BT - Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002

PB - STW

CY - Veldhoven

T2 - Semiconductor Sensor and Actuator Technology, SeSens 2002

Y2 - 29 November 2002 through 30 November 2002

ER -

2D-finite element simulations for long range capacitive position sensor

Workshop

Research output

2d-finite-element simulations for long-range capacitive position sensor

2D finite element simulations for long range capacitive position sensor

Cite this