| Original language | English |
|---|---|
| Pages | 49-49 |
| Publication status | Published - 8 Oct 2012 |
| Event | 2012 International Workshop on EUV and Soft X-ray Sources - Dublin, Ireland Duration: 8 Oct 2012 → 11 Oct 2012 https://euvlitho.com/source-workshop/2012-source-workshop/ |
Conference
| Conference | 2012 International Workshop on EUV and Soft X-ray Sources |
|---|---|
| Country | Ireland |
| City | Dublin |
| Period | 8/10/12 → 11/10/12 |
| Internet address |
Keywords
- METIS-293971
Cite this
Astakhov, D., Goedheer, W. J., Lopaev, D., Ivanov, V., Yakushev, O., Krivtsun, V. M., ... Bijkerk, F. (2012). 2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate. 49-49. Poster session presented at 2012 International Workshop on EUV and Soft X-ray Sources, Dublin, Ireland.
@conference{d84027e9f3c642f69e10ff76963b77bd,
title = "2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate",
keywords = "METIS-293971",
author = "Dmitry Astakhov and W.J. Goedheer and D. Lopaev and V. Ivanov and O. Yakushev and V.M. Krivtsun and K. Koshelev and Frederik Bijkerk",
year = "2012",
month = "10",
day = "8",
language = "English",
pages = "49--49",
note = "2012 International Workshop on EUV and Soft X-ray Sources ; Conference date: 08-10-2012 Through 11-10-2012",
url = "https://euvlitho.com/source-workshop/2012-source-workshop/",
}
Astakhov, D, Goedheer, WJ, Lopaev, D, Ivanov, V, Yakushev, O, Krivtsun, VM, Koshelev, K & Bijkerk, F 2012, '2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate' 2012 International Workshop on EUV and Soft X-ray Sources, Dublin, Ireland, 8/10/12 - 11/10/12, pp. 49-49.
2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate. / Astakhov, Dmitry; Goedheer, W.J.; Lopaev, D.; Ivanov, V.; Yakushev, O.; Krivtsun, V.M.; Koshelev, K.; Bijkerk, Frederik.
2012. 49-49 Poster session presented at 2012 International Workshop on EUV and Soft X-ray Sources, Dublin, Ireland.Research output: Contribution to conference › Poster
TY - CONF
T1 - 2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate
AU - Astakhov, Dmitry
AU - Goedheer, W.J.
AU - Lopaev, D.
AU - Ivanov, V.
AU - Yakushev, O.
AU - Krivtsun, V.M.
AU - Koshelev, K.
AU - Bijkerk, Frederik
PY - 2012/10/8
Y1 - 2012/10/8
KW - METIS-293971
M3 - Poster
SP - 49
EP - 49
ER -
Astakhov D, Goedheer WJ, Lopaev D, Ivanov V, Yakushev O, Krivtsun VM et al. 2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate. 2012. Poster session presented at 2012 International Workshop on EUV and Soft X-ray Sources, Dublin, Ireland.