2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate

Research output: Contribution to conference › Poster › Other research output

92 Downloads (Pure)

Original language	English
Pages	49-49
Publication status	Published - 8 Oct 2012
Event	2012 International Workshop on EUV and Soft X-ray Sources - Dublin, Ireland Duration: 8 Oct 2012 → 11 Oct 2012 https://euvlitho.com/source-workshop/2012-source-workshop/

Conference	2012 International Workshop on EUV and Soft X-ray Sources
Country/Territory	Ireland
City	Dublin
Period	8/10/12 → 11/10/12
Internet address	https://euvlitho.com/source-workshop/2012-source-workshop/

Keywords

@conference{d84027e9f3c642f69e10ff76963b77bd,

title = "2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate",

keywords = "METIS-293971",

author = "Dmitry Astakhov and W.J. Goedheer and D. Lopaev and V. Ivanov and O. Yakushev and V.M. Krivtsun and K. Koshelev and Frederik Bijkerk",

year = "2012",

month = oct,

day = "8",

language = "English",

pages = "49--49",

note = "2012 International Workshop on EUV and Soft X-ray Sources ; Conference date: 08-10-2012 Through 11-10-2012",

url = "https://euvlitho.com/source-workshop/2012-source-workshop/",

}

TY - CONF

T1 - 2D PIC Modeling of the EUV Induced Hydrogen Plasma and Comparison to the Observed Carbon Etching Rate

AU - Astakhov, Dmitry

AU - Goedheer, W.J.

AU - Lopaev, D.

AU - Ivanov, V.

AU - Yakushev, O.

AU - Krivtsun, V.M.

AU - Koshelev, K.

AU - Bijkerk, Frederik

PY - 2012/10/8

Y1 - 2012/10/8

KW - METIS-293971

M3 - Poster

SP - 49

EP - 49

T2 - 2012 International Workshop on EUV and Soft X-ray Sources

Y2 - 8 October 2012 through 11 October 2012

ER -