3-D coupled electric mechanics for MEMS: Applications of COSOLVE-EM

J.R. Gilbert, R. Legtenberg, S.D. Senturia

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    Abstract

    Micro-electro-mechanical systems (MEMS) are often designed on scales at which electrostatic forces are capable of moving or deforming the parts of the system. In this regime accurate prediction of device behavior may require 3D coupled simulations between the electrostatic and mechanical domains. We have recently developed CoSolve-EM, a coupled solver for 3D quasi-static electro-mechanics. In this paper, we demonstrate the application of CoSolve-EM to five classes of electro-mechanical problems that are often intractable to other techniques. These classes are: devices with electrostatic pull-in instabilities, devices in which precise deformations are required, devices driven by multiple conductors, capacitive sensors that make use of surface contact, and actuators that make use of surface contact.
    Original languageEnglish
    Title of host publicationMicro Electro Mechanical Systems (MEMS)
    Place of PublicationAmsterdam
    PublisherIEEE
    Pages122-127
    ISBN (Print)0-7803-2503-6
    DOIs
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995

    Publication series

    Name
    PublisherIEEE

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS
    CountryNetherlands
    CityAmsterdam
    Period29/01/952/02/95

    Keywords

    • METIS-130283
    • IR-92502

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  • Cite this

    Gilbert, J. R., Legtenberg, R., & Senturia, S. D. (1995). 3-D coupled electric mechanics for MEMS: Applications of COSOLVE-EM. In Micro Electro Mechanical Systems (MEMS) (pp. 122-127). Amsterdam: IEEE. https://doi.org/10.1109/MEMSYS.1995.472542