This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.
|Title of host publication||Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX|
|Place of Publication||Stockholm, Sweden|
|Number of pages||4|
|Publication status||Published - 25 Jun 1995|
|Event||Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden|
Duration: 25 Jun 1995 → 29 Jun 1995
Conference number: 9
|Conference||Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors|
|Period||25/06/95 → 29/06/95|
Setiadi, D., Setiadi, D., Sarro, P. M., & Regtien, P. P. L. (1995). 3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer. In Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX (pp. 644-647). Stockholm, Sweden.