3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer

D. Setiadi, D. Setiadi, P.M. Sarro, Paulus P.L. Regtien

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    Abstract

    This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.
    Original languageUndefined
    Title of host publicationProceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX
    Place of PublicationStockholm, Sweden
    Pages644-647
    Number of pages4
    Publication statusPublished - 25 Jun 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    CountrySweden
    CityStockholm
    Period25/06/9529/06/95

    Keywords

    • METIS-113464
    • IR-16579

    Cite this

    Setiadi, D., Setiadi, D., Sarro, P. M., & Regtien, P. P. L. (1995). 3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer. In Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX (pp. 644-647). Stockholm, Sweden.