3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer

D. Setiadi; D. Setiadi; P.M. Sarro; Paulus P.L. Regtien

3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer

D. Setiadi
, D. Setiadi
, P.M. Sarro
, Paulus P.L. Regtien

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.

Original language	Undefined
Title of host publication	Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX
Place of Publication	Stockholm, Sweden
Pages	644-647
Number of pages	4
Publication status	Published - 25 Jun 1995
Event	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 Conference number: 9

Conference

Conference	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
Country/Territory	Sweden
City	Stockholm
Period	25/06/95 → 29/06/95

Keywords

METIS-113464
IR-16579

Access to Document

Setiadi95integrated

Cite this

@inproceedings{484f93b9eab74aae85be68386601a0c3,

title = "3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer",

abstract = "This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.",

keywords = "METIS-113464, IR-16579",

author = "D. Setiadi and D. Setiadi and P.M. Sarro and Regtien, \{Paulus P.L.\}",

year = "1995",

month = jun,

day = "25",

language = "Undefined",

isbn = "91-630-3473-5",

pages = "644--647",

booktitle = "Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX",

note = "Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors ; Conference date: 25-06-1995 Through 29-06-1995",

}

Setiadi, D, Setiadi, D, Sarro, PM & Regtien, PPL 1995, 3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer. in Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX. Stockholm, Sweden, pp. 644-647, Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors, Stockholm, Sweden, 25/06/95.

TY - GEN

T1 - 3 x 1 Integrated Pyroelectric Sensor Based on VDF/TrFE Copolymer

AU - Setiadi, D.

AU - Sarro, P.M.

AU - Regtien, Paulus P.L.

N1 - Conference code: 9

PY - 1995/6/25

Y1 - 1995/6/25

N2 - This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.

AB - This paper presents an integrated pyroelectric sensor based on a Vinylidene Fluoride TriFluoroEthylene (VDF/TrFE) copolymer. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a stepwise poling at room temperature. An array of 3x1 pyroelectric sensor has been realized. Current and voltage sensitivities and noise of this sensor have been measured. A signal-to-noise of 80 dB has been achieved.

KW - METIS-113464

KW - IR-16579

M3 - Conference contribution

SN - 91-630-3473-5

SP - 644

EP - 647

BT - Proceedings of the 8th International Conference on Solid-State Sensors and Aduators Eurosensors IX

CY - Stockholm, Sweden

T2 - Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors

Y2 - 25 June 1995 through 29 June 1995

ER -