3D force sensor for biomechanical applications

Robert Anton Brookhuis, Theodorus S.J. Lammerink, Remco J. Wiegerink, Meint J. de Boer, Michael Curt Elwenspoek

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    27 Citations (Scopus)
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    A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand and its environment. The sensor measures the normal force and two perpendicular moments by dividing the read-out into four quadrants. The fabrication process is based on silicon fusion bonding allowing the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
    Original languageUndefined
    Pages (from-to)28-33
    Number of pages6
    JournalSensors and actuators. A: Physical
    Issue number182
    Publication statusPublished - 8 May 2012


    • EWI-23046
    • IR-84154
    • METIS-296288

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