3D force sensor for biomechanical applications

Robert Anton Brookhuis; Theodorus S.J. Lammerink; Remco J. Wiegerink; Meint J. de Boer; Michael Curt Elwenspoek

doi:10.1016/j.sna.2012.04.035

3D force sensor for biomechanical applications

Robert Anton Brookhuis, Theodorus S.J. Lammerink, Remco J. Wiegerink, Meint J. de Boer, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

34 Citations (Scopus)

22 Downloads (Pure)

Abstract

A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand and its environment. The sensor measures the normal force and two perpendicular moments by dividing the read-out into four quadrants. The fabrication process is based on silicon fusion bonding allowing the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

Original language	Undefined
Pages (from-to)	28-33
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	182
Issue number	182
DOIs	https://doi.org/10.1016/j.sna.2012.04.035
Publication status	Published - 8 May 2012

Keywords

EWI-23046
IR-84154
METIS-296288
TST-SENSORS

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/j.sna.2012.04.035

http://eprints.eemcs.utwente.nl/secure2/23046/01/final_published_version_-_2012_-_Brookhuis_-_3D_force_sensor_for_biomechanical_applications_-_Copy.pdf

Cite this

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title = "3D force sensor for biomechanical applications",

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AU - Brookhuis, Robert Anton

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

AU - de Boer, Meint J.

AU - Elwenspoek, Michael Curt

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AB - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate such sensors in a glove that will determine the complete mechanical interaction between the human hand and its environment. The sensor measures the normal force and two perpendicular moments by dividing the read-out into four quadrants. The fabrication process is based on silicon fusion bonding allowing the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

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KW - IR-84154

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KW - TST-SENSORS

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