3D Silicon Nanophotonics

Research output: ThesisPhD Thesis - Research UT, graduation UT

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Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Vos, Willem L., Supervisor
Thesis sponsors
Award date13 Jul 2017
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-4374-3
DOIs
Publication statusPublished - 13 Jul 2017

Keywords

  • Silicon, photonics, nanofabrication, etching, lithography, photonic crystals, etch mask, 3D, nanopores, optics, tomography, X-ray, UV, RIE, DRIE, FIB, nanofabrication

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