3D Silicon Nanophotonics

Diana  Grishina

doi:10.3990/1.9789036543743

3D Silicon Nanophotonics

Diana Grishina

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Vos, Willem L., Supervisor
Thesis sponsors	Stichting voor Fundamenteel Onderzoek der Materie (FOM)
Award date	13 Jul 2017
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-4374-3
DOIs	https://doi.org/10.3990/1.9789036543743
Publication status	Published - 13 Jul 2017

Keywords

Silicon
Photonics
Nanofabrication
Etching
Lithography
Photonic crystals
Etch mask
3D
Nanopores
optics
Tomography
X-ray
UV
RIE
DRIE
FIB

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.3990/1.9789036543743

Thesis D. GrishinaFinal published version, 61.1 MB

Cite this

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title = "3D Silicon Nanophotonics",

keywords = "Silicon, Photonics, Nanofabrication, Etching, Lithography, Photonic crystals, Etch mask, 3D, Nanopores, optics, Tomography, X-ray, UV, RIE, DRIE, FIB",

author = "Diana Grishina",

year = "2017",

month = jul,

day = "13",

doi = "10.3990/1.9789036543743",

language = "English",

isbn = "978-90-365-4374-3",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}

TY - THES

T1 - 3D Silicon Nanophotonics

AU - Grishina, Diana

PY - 2017/7/13

Y1 - 2017/7/13

KW - Silicon

KW - Photonics

KW - Nanofabrication

KW - Etching

KW - Lithography

KW - Photonic crystals

KW - Etch mask

KW - 3D

KW - Nanopores

KW - optics

KW - Tomography

KW - X-ray

KW - UV

KW - RIE

KW - DRIE

KW - FIB

U2 - 10.3990/1.9789036543743

DO - 10.3990/1.9789036543743

M3 - PhD Thesis - Research UT, graduation UT

SN - 978-90-365-4374-3

PB - University of Twente

CY - Enschede

ER -