3D Silicon Nanophotonics

Research output: ThesisPhD Thesis - Research UT, graduation UT

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Vos, Willem L., Supervisor
Thesis sponsors
Award date13 Jul 2017
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-4374-3
DOIs
Publication statusPublished - 13 Jul 2017

Keywords

  • Silicon
  • Photonics
  • Nanofabrication
  • Etching
  • Lithography
  • Photonic crystals
  • Etch mask
  • 3D
  • Nanopores
  • optics
  • Tomography
  • X-ray
  • UV
  • RIE
  • DRIE
  • FIB

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