TY - GEN
T1 - 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability
AU - De Oliveira, Arthur C.
AU - Groenesteijn, Jarno
AU - Wiegerink, Remco J.
AU - Makinwa, Kofi A.A.
N1 - Funding Information:
The authors would like to thank the Dutch technology foundation STW, Bronkhorst BV, and KROHNE Nederland BV for financial support. We would also like to thank L. Pakula, Z. Chang, and R. van Puffelen for their help with the design of the measurement setup.
Publisher Copyright:
© 2021 IEEE.
PY - 2021/3/3
Y1 - 2021/3/3
N2 - Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.
AB - Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.
UR - http://www.scopus.com/inward/record.url?scp=85102371962&partnerID=8YFLogxK
U2 - 10.1109/ISSCC42613.2021.9365946
DO - 10.1109/ISSCC42613.2021.9365946
M3 - Conference contribution
AN - SCOPUS:85102371962
SN - 978-1-7281-9550-6
T3 - IEEE International Solid-State Circuits Conference (ISSCC)
SP - 84
EP - 86
BT - 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers
PB - IEEE
CY - Piscataway, NJ
T2 - IEEE International Solid-State Circuits Conference, ISSCC 2021
Y2 - 13 February 2021 through 22 February 2021
ER -