6-DoFs MEMS-based precision manipulators

Dannis Michel Brouwer, Herman Soemers

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Combining Design Principles, a mature design philosophy for creating precision machines, and MEMS fabrication, a technology for miniaturization, could lead to micro systems with deterministic behavior and accurate positioning capability. However, in MEMS design tradeoffs need to be made between fabrication complexity and design principle requirements. Here a micro-mechatronic design of a Stewart Platform, a six Degrees-of-Freedom MEMSbased Precision Manipulator, is presented.
Original languageEnglish
Pages (from-to)5-13
Issue number2
Publication statusPublished - 2008


  • METIS-302788
  • IR-89564

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